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Three-dimensional Deposition of Silicon Structure from Silicate Glass with Dispersed Metallie Muminum by Femtosecond Laser Irradiation
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作者 Masashi Hamabe Kiyotaka Miura +4 位作者 yasuhiko shimotsum Masaaki Sakakura Shingo Kanehira Masayuki Nishi Kazuyuki Hirao 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2007年第B12期783-786,共4页
We fabricated a silicon structure in silicate glass prepared with metallic aluminum in the starting material, using femtosecond laser irradiation. Small Si-rich structures such as Si clusters were transformed into lar... We fabricated a silicon structure in silicate glass prepared with metallic aluminum in the starting material, using femtosecond laser irradiation. Small Si-rich structures such as Si clusters were transformed into larger, but still nano-sized, Si particles by laser irradiation. These structures grew to microsize particles due to the thermite reaction promoted by heat treatment. We determined the effect of focused laser pulses on the Si deposition process using the time-resolved transient lens method. Localized high-temperature, high-pressure, and the generation of shock waves appear to be very important in forming the Si-rich structures that ultimately grow into Si particles. 展开更多
关键词 three-dimensional deposition femtosecond laser silicon structure
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