We studied the effects of reductive annealing on insulating polycrystalline thin films of anatase Nb- doped TiO2 （TNO）. The insulating TNO films were intentionally fabricated by annealing conductive TNO films in oxy...We studied the effects of reductive annealing on insulating polycrystalline thin films of anatase Nb- doped TiO2 （TNO）. The insulating TNO films were intentionally fabricated by annealing conductive TNO films in oxygen ambient at 400 ℃. Reduced free carrier absorption in the insulating TNO films indicated carrier com- pensation due to excess oxygen. With H2-annealing, both carrier density and Hall mobility recovered to the level of conducting TNO, demonstrating that the excess oxygen can be efficiently removed by the annealing process without introducing additional scattering centers.展开更多
基金partially supported by JSPS KAKENHI Grant Number 15K04687
文摘We studied the effects of reductive annealing on insulating polycrystalline thin films of anatase Nb- doped TiO2 （TNO）. The insulating TNO films were intentionally fabricated by annealing conductive TNO films in oxygen ambient at 400 ℃. Reduced free carrier absorption in the insulating TNO films indicated carrier com- pensation due to excess oxygen. With H2-annealing, both carrier density and Hall mobility recovered to the level of conducting TNO, demonstrating that the excess oxygen can be efficiently removed by the annealing process without introducing additional scattering centers.
