Growth of semi-polar （1-101）GaN has been attempted on a patterned （001） silicon substrate adopting selective area MOVPE. The growth was initiated on （111） facets of the Si, which had been prepared by anisotropy ...Growth of semi-polar （1-101）GaN has been attempted on a patterned （001） silicon substrate adopting selective area MOVPE. The growth was initiated on （111） facets of the Si, which had been prepared by anisotropy etching in a KOH solution. A uni- form semi-polar layer was achieved by coalescence of stripes. Since the growth was performed on facets, the surface was atomically fiat in AFM surface analyses. By using a high temperature grown A1N nucleation layer, we achieved low threading dislocation density at the top most surface. Moreover, by tilting the c-axis of the GaN on the Si substrate, the effect of the thermal expansion coefficient mismatch was much reduced. As the result, we achieved a crack free （1-101）GaN template on （001）Si. On the thus prepared （1-101）GaN, a GalnN/GaN LED was fabricated, which showed excellent performance with weak quantum confined Stark effect.展开更多
基金supported by the Grant in Aid for Scientific Research by JSPS and Nagoya University Akasaki Research Center
文摘Growth of semi-polar （1-101）GaN has been attempted on a patterned （001） silicon substrate adopting selective area MOVPE. The growth was initiated on （111） facets of the Si, which had been prepared by anisotropy etching in a KOH solution. A uni- form semi-polar layer was achieved by coalescence of stripes. Since the growth was performed on facets, the surface was atomically fiat in AFM surface analyses. By using a high temperature grown A1N nucleation layer, we achieved low threading dislocation density at the top most surface. Moreover, by tilting the c-axis of the GaN on the Si substrate, the effect of the thermal expansion coefficient mismatch was much reduced. As the result, we achieved a crack free （1-101）GaN template on （001）Si. On the thus prepared （1-101）GaN, a GalnN/GaN LED was fabricated, which showed excellent performance with weak quantum confined Stark effect.
