Position sensitive detector is very important for nuclear physics experiment. There several techniques can be used to fabricate position sensitive detector, for example, Si-surface barrier method, diffusion method, io...Position sensitive detector is very important for nuclear physics experiment. There several techniques can be used to fabricate position sensitive detector, for example, Si-surface barrier method, diffusion method, ion implantation and planar process etc. Among all the techniques mentioned above planar process is the best one. We have developed batch of position sensitive detector -- silicon multi-strip detector by using planar process.展开更多
文摘Position sensitive detector is very important for nuclear physics experiment. There several techniques can be used to fabricate position sensitive detector, for example, Si-surface barrier method, diffusion method, ion implantation and planar process etc. Among all the techniques mentioned above planar process is the best one. We have developed batch of position sensitive detector -- silicon multi-strip detector by using planar process.
