Abnormal voltages such as electrostatic,constant current,and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze,which may result in casualties.This stud...Abnormal voltages such as electrostatic,constant current,and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze,which may result in casualties.This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek’s Law.The MEMS switch can be transferred from“off”to“on”through the gas breakdown between the corona electrodes.In the model,one of the two electrodes is spherical and the other flat,so a non-uniform electric field is formed around the electrodes.The theoretical work is as follows.First,the relation among the radius of curvature of the spherical electrode,the discharge gap,and the air breakdown voltage is obtained;to meet the low voltage(30-60 V)required to drive the MEMS switch,the radius of curvature of the spherical electrode needs to be 10 e50 mm and the discharge gap between the two electrodes needs to be 9e11 mm.Second,the optimal ratioεis introduced to parameterize the model.Finally,the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results.The switch is then fabricated via MEMS processing.A hardware test platform is built and the performing chip tested.It is found that when the electrode gap is 9 mm,the electrostatic voltage is at least 37.3 V,with an error of 2.6%between the actual and theoretical air breakdown voltages.When the electrode gap is 11 mm,the electrostatic voltage is at least 42.3 V,with an error of 10.5%between the actual and theoretical air breakdown voltages.Both cases meet the design requirements.展开更多
文摘Abnormal voltages such as electrostatic,constant current,and strong electromagnetic signals can erroneously trigger operation of MEMS pyrotechnics and control systems in a fuze,which may result in casualties.This study designs a solid-state micro-scale switch by combining the corona gas discharge theory of asymmetric electric fields and Peek’s Law.The MEMS switch can be transferred from“off”to“on”through the gas breakdown between the corona electrodes.In the model,one of the two electrodes is spherical and the other flat,so a non-uniform electric field is formed around the electrodes.The theoretical work is as follows.First,the relation among the radius of curvature of the spherical electrode,the discharge gap,and the air breakdown voltage is obtained;to meet the low voltage(30-60 V)required to drive the MEMS switch,the radius of curvature of the spherical electrode needs to be 10 e50 mm and the discharge gap between the two electrodes needs to be 9e11 mm.Second,the optimal ratioεis introduced to parameterize the model.Finally,the corona discharge structural parameters are determined by comparing the theoretical and electric field simulation results.The switch is then fabricated via MEMS processing.A hardware test platform is built and the performing chip tested.It is found that when the electrode gap is 9 mm,the electrostatic voltage is at least 37.3 V,with an error of 2.6%between the actual and theoretical air breakdown voltages.When the electrode gap is 11 mm,the electrostatic voltage is at least 42.3 V,with an error of 10.5%between the actual and theoretical air breakdown voltages.Both cases meet the design requirements.
