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Structure and properties of CIGS films based on one-stage RF-sputtering process at low substrate temperature 被引量:1
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作者 Yong Yan Shasha Li +5 位作者 yufeng ou Yaxin Ji Chuanpeng Yan Lian Liu Zhou Yu Yong Zhao 《Journal of Modern Transportation》 2014年第1期37-44,共8页
Currently, Nanjing South Railway Stationplanning to implement slate roof renovation is integratingsolar cell modules into traditional roof materials to generateclean energy. Copper–indium–gallium diselenide(CuIn1-x... Currently, Nanjing South Railway Stationplanning to implement slate roof renovation is integratingsolar cell modules into traditional roof materials to generateclean energy. Copper–indium–gallium diselenide(CuIn1-xGaxSe2, CIGS) is one of the most promisingmaterials for thin film solar cells. Cu(In1-xGax)Se2 filmswere deposited by a one-step radio frequency magnetronsputtering process at low substrate temperature. X-raydiffraction, Raman, scanning electron microscopy, energydispersiveX-ray spectroscopy, and electrical and opticalmeasurements were carried out to investigate the depositedfilms. The results reveal that a temperature of 320 C iscritical for near-stoichiometric CIGS films with uniformsurface morphology. Cu-rich phase particulates are foundat less than this temperature. The sample deposited at380 C gives well-crystalline single-phase CIGS film.Furthermore, the electrical and optical performances of theabsorber layer are improved significantly with theincreasing substrate temperature. 展开更多
关键词 CIGS LOW-TEMPERATURE Electrical andoptical propertie
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