Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various applications.It enables multidimensional and dynamic modulation of the laser beam,which significantly impro...Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various applications.It enables multidimensional and dynamic modulation of the laser beam,which significantly improves the processing efficiency,accuracy,and flexibility,and presents wider prospects over traditional mechanical technologies for machining three-dimensional,hard,brittle,or transparent materials.In this review,we introduce:(1)The role of spatial light modulation technology in the development of femtosecond laser manufacturing;(2)the structured light generated by spatial light modulation and its generation methods;and(3)representative applications of spatial-light-modulated femtosecond laser manufacturing,including aberration correction,parallel processing,focal field engineering,and polarization control.Finally,we summarize the present challenges in the field and possible future research.展开更多
基金This work was supported by the National Key R&D Program of China(Grant No.2021YFB2802000)the National Natural Science Foundation of China(Grant Nos.61827826,62175086,62131018)+1 种基金the Natural Science Foundation of Jilin Province(Grant No.20220101107JC)the Education Department of Jilin Province(Grant No.JJKH20221003KJ).
文摘Since the invention of lasers,spatial-light-modulated laser processing has become a powerful tool for various applications.It enables multidimensional and dynamic modulation of the laser beam,which significantly improves the processing efficiency,accuracy,and flexibility,and presents wider prospects over traditional mechanical technologies for machining three-dimensional,hard,brittle,or transparent materials.In this review,we introduce:(1)The role of spatial light modulation technology in the development of femtosecond laser manufacturing;(2)the structured light generated by spatial light modulation and its generation methods;and(3)representative applications of spatial-light-modulated femtosecond laser manufacturing,including aberration correction,parallel processing,focal field engineering,and polarization control.Finally,we summarize the present challenges in the field and possible future research.
