A miniature thermoacoustic prime mover, consuming heat to radiate sound, may be considered as a potential way of heat management in microcircuits because of its simplicity and stability. A prototype with variable reso...A miniature thermoacoustic prime mover, consuming heat to radiate sound, may be considered as a potential way of heat management in microcircuits because of its simplicity and stability. A prototype with variable resonant tube length of 10 to 25 cm was built, and experiments were carried out to observe its performance, such as onset temperature, oscillation amplitude and operating frequency. The results with atmospheric air showed that proper structures and operating conditions can make the system start an oscillation at a temperature lower than 100 ℃, which proves the feasibility of potential usage in electronic units. The influences of stack position, heat input power or tube inclination on the oscillation amplitude, onset temperature and operating frequency are also presented.展开更多
The conception of the soft layer during chemical mechanical polishing(CMP) was proposed for the first time. The soft layer was a reaction layer formed on the silicon surface; it was softer than the silicon substrate a...The conception of the soft layer during chemical mechanical polishing(CMP) was proposed for the first time. The soft layer was a reaction layer formed on the silicon surface; it was softer than the silicon substrate and its thickness was about several nanometers. The existence of the soft layer could increase the material volume removed by one particle and increase the material removal rate during CMP. At the same time, the soft layer could decrease the cutting depth of the abrasive particle so as to realize ductile grinding, and it is useful to decrease the roughness of the polished surface and to improve the polishing quality.展开更多
基金Project supported by the National Natural Sciences Foundation of China (No. 50536040), the China Postdoctoral Science Foundation(No. 2005038280), and the Natural Sciences Foundation of ZhejiangProvince (No. Y104326), China
文摘A miniature thermoacoustic prime mover, consuming heat to radiate sound, may be considered as a potential way of heat management in microcircuits because of its simplicity and stability. A prototype with variable resonant tube length of 10 to 25 cm was built, and experiments were carried out to observe its performance, such as onset temperature, oscillation amplitude and operating frequency. The results with atmospheric air showed that proper structures and operating conditions can make the system start an oscillation at a temperature lower than 100 ℃, which proves the feasibility of potential usage in electronic units. The influences of stack position, heat input power or tube inclination on the oscillation amplitude, onset temperature and operating frequency are also presented.
基金Natural Science Foundation of Jiangsu Province ( BK2002010) High-tech Project of Jiangsu Province(BG2004022)
文摘The conception of the soft layer during chemical mechanical polishing(CMP) was proposed for the first time. The soft layer was a reaction layer formed on the silicon surface; it was softer than the silicon substrate and its thickness was about several nanometers. The existence of the soft layer could increase the material volume removed by one particle and increase the material removal rate during CMP. At the same time, the soft layer could decrease the cutting depth of the abrasive particle so as to realize ductile grinding, and it is useful to decrease the roughness of the polished surface and to improve the polishing quality.
