Diamond-like films have been deposited by dc plasma chemical vapor deposition(CVD).During deposition,the characteristics of the plasma have been measured by means of the Langmuir single probe.The structure of the depo...Diamond-like films have been deposited by dc plasma chemical vapor deposition(CVD).During deposition,the characteristics of the plasma have been measured by means of the Langmuir single probe.The structure of the deposits has been studied by X-ray diffraction,Raman spectroscopy and Fourier transform infrared spectroscopy.展开更多
文摘Diamond-like films have been deposited by dc plasma chemical vapor deposition(CVD).During deposition,the characteristics of the plasma have been measured by means of the Langmuir single probe.The structure of the deposits has been studied by X-ray diffraction,Raman spectroscopy and Fourier transform infrared spectroscopy.
