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A review of high-performance MEMS sensors for resource exploration and geophysical applications 被引量:3
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作者 Hua-Feng Liu Zhi-Cai Luo +4 位作者 Zhong-Kun Hu Shan-Qing Yang Liang-Cheng Tu ze-bing zhou Michael Kraft 《Petroleum Science》 SCIE CAS CSCD 2022年第6期2631-2648,共18页
MEMS sensors have the advantages of small volume,lightweight,and low cost,therefore,have been widely used in the fields of consumer electronics,industry,health,defence,and aerospace.With their ever-improving performan... MEMS sensors have the advantages of small volume,lightweight,and low cost,therefore,have been widely used in the fields of consumer electronics,industry,health,defence,and aerospace.With their ever-improving performance,MEMS sensors have also started to be used in resource exploration and geophysical applications.However,the requirements of high-precision MEMS sensors for geophysical applications have not been specified in detail.Therefore,this paper systematically analyzes the requirements of high-performance MEMS sensors for prospecting and geophysical applications,including seismic surveillance,Earth tide,volcanic activity monitoring for natural disasters;seismic,gravity,and magnetic resource prospecting;drilling process monitoring and local gravity measurement for gravity aided navigation.Focusing on the above applications,this paper summarizes the state-of-the-art of research on high-performance MEMS sensors for resource exploration and geophysical applications.Several off-the-shelf MEMS sensors have been used for earthquake monitoring,seismic exploration and drilling process monitoring,and a range of MEMS research prototype sensors have successfully been employed for Earth tides measurement and are promising to be used for gravity exploration.MEMS magnetometers should have a lower noise floor to meet the demand for magnetic exploration.MEMS gravity gradiometers are still under early development and will not be deployable in short-term.Highperformance MEMS sensors hold the advantages of low-cost,high integration,and capability of working in extreme environments;therefore,they are likely to gradually replace some conventional geophysical instruments in some application areas. 展开更多
关键词 ACCELEROMETER SEISMOMETER GRAVIMETER Tilt-meter MAGNETOMETER
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