In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)structure.Five-element QCL arrays were simulated and fabricated through ...In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)structure.Five-element QCL arrays were simulated and fabricated through a two-step etching method to extend the CRW structure to a mid-wave infrared regime.A lateral far-field with the main peak near a diffraction-limited intensity curve of about 10°was observed by properly designing a geometric shape of the ridges and interspaces.By introducing a buried 2nd-order distributed feedback(DFB)grating,substrate emission with a radiation power above 1 W at 25℃ is achieved.Single longitudinal mode operation is obtained by changing the temperature of the heatsink with a good linear wavelength tuning coefficient of -0.2 cm^(-1)/K.展开更多
基金supported by National Basic Research Program of China(Grant Nos.2018YFA0209103,2018YFB2200504)in part by National Natural Science Foundation of China(Grant Nos.61991430,61774146,61790583,61734006,61835011,61674144,61774150,61805168)+1 种基金in part by Beijing Municipal Science&Technology Commission(Grant No.Z201100004020006)in part by the Key projects of the Chinese Academy of Sciences(Grant No.2018147,Grant No.YJKYYQ20190002,Grant No.QYZDJ-SSW-JSC027,Grant No.XDB43000000,Grant No.ZDKYYQ20200006).
文摘In this work,we demonstrated high-power quantum cascade laser(QCL)arrays lasing at λ~5μm by employing an optimized coupled-ridge waveguide(CRW)structure.Five-element QCL arrays were simulated and fabricated through a two-step etching method to extend the CRW structure to a mid-wave infrared regime.A lateral far-field with the main peak near a diffraction-limited intensity curve of about 10°was observed by properly designing a geometric shape of the ridges and interspaces.By introducing a buried 2nd-order distributed feedback(DFB)grating,substrate emission with a radiation power above 1 W at 25℃ is achieved.Single longitudinal mode operation is obtained by changing the temperature of the heatsink with a good linear wavelength tuning coefficient of -0.2 cm^(-1)/K.
