Manufacturing and integration of micro-electro-mechanical systems(MEMS) devices and integrated circuits(ICs) by wafer bonding often generate problems caused by thermal properties of materials.This paper presents a low...Manufacturing and integration of micro-electro-mechanical systems(MEMS) devices and integrated circuits(ICs) by wafer bonding often generate problems caused by thermal properties of materials.This paper presents a low temperature wafer direct bonding process assisted by O2 plasma.Silicon wafers were treated with wet chemical cleaning and subsequently activated by O2 plasma in the etch element of a sputtering system.Then,two wafers were brought into contact in the bonder followed by annealing in N2 atmosphere for several hours.An infrared imaging system was used to detect bonding defects and a razor blade test was carried out to determine surface energy.The bonding yield reaches 90%-95% and the achieved surface energy is 1.76 J/m2 when the bonded wafers are annealed at 350 ℃ in N2 atmosphere for 2 h.Void formation was systematically observed and elimination methods were proposed.The size and density of voids greatly depend on the annealing temperature.Short O2 plasma treatment for 60 s can alleviate void formation and enhance surface energy.A pulling test reveals that the bonding strength is more than 11.0 MPa.This low temperature wafer direct bonding process provides an efficient and reliable method for 3D integration,system on chip,and MEMS packaging.展开更多
In clinical practice,examination of the hemorrhagic spot (HS) remains difficult.In this paper,we describe a remote controlled capsule (RCC) micro-system with an automated,color-based sensor to identify and localize th...In clinical practice,examination of the hemorrhagic spot (HS) remains difficult.In this paper,we describe a remote controlled capsule (RCC) micro-system with an automated,color-based sensor to identify and localize the HS of the gastrointestinal (GI) tract.In vitro testing of the detecting sensor demonstrated that it was capable of discriminating mimetic intestinal fluid (MIF) with and without the hemoglobin (Hb) when the concentration of Hb in MIF was above 0.05 g/ml.Therefore,this RCC system is able to detect the relatively accurate location of the HS in the GI tract.展开更多
基金Project supported by the Foreign Cultural and Educational Experts Employing Plan,Ministry of Education,China (No. TS2010CQDX 056)the Fundamental Research Funds for the Central Universi-ties,China (No. CDJZR12135502)
文摘Manufacturing and integration of micro-electro-mechanical systems(MEMS) devices and integrated circuits(ICs) by wafer bonding often generate problems caused by thermal properties of materials.This paper presents a low temperature wafer direct bonding process assisted by O2 plasma.Silicon wafers were treated with wet chemical cleaning and subsequently activated by O2 plasma in the etch element of a sputtering system.Then,two wafers were brought into contact in the bonder followed by annealing in N2 atmosphere for several hours.An infrared imaging system was used to detect bonding defects and a razor blade test was carried out to determine surface energy.The bonding yield reaches 90%-95% and the achieved surface energy is 1.76 J/m2 when the bonded wafers are annealed at 350 ℃ in N2 atmosphere for 2 h.Void formation was systematically observed and elimination methods were proposed.The size and density of voids greatly depend on the annealing temperature.Short O2 plasma treatment for 60 s can alleviate void formation and enhance surface energy.A pulling test reveals that the bonding strength is more than 11.0 MPa.This low temperature wafer direct bonding process provides an efficient and reliable method for 3D integration,system on chip,and MEMS packaging.
基金Project supported by the National Natural Science Foundation of China (Nos. 30700160 and 30970883)the Postdoctoral Science Foundation of China (Nos. 20070420718 and 200801225)+1 种基金Chongqing University Postgraduates’ Science and Innovation Fund (No. 2008 01A1B0250284)the Specialized Research Fund for the Doctoral Program of Higher Education (No. 20070611045), China
文摘In clinical practice,examination of the hemorrhagic spot (HS) remains difficult.In this paper,we describe a remote controlled capsule (RCC) micro-system with an automated,color-based sensor to identify and localize the HS of the gastrointestinal (GI) tract.In vitro testing of the detecting sensor demonstrated that it was capable of discriminating mimetic intestinal fluid (MIF) with and without the hemoglobin (Hb) when the concentration of Hb in MIF was above 0.05 g/ml.Therefore,this RCC system is able to detect the relatively accurate location of the HS in the GI tract.
