A novel DLC film deposition method was proposed to realize the deposition of DLC film on the surface of complex shaped workpiece.Meanwhile,Si-DLC film was deposited on the surface of M2 high-speed steel(HSS M2)and 304...A novel DLC film deposition method was proposed to realize the deposition of DLC film on the surface of complex shaped workpiece.Meanwhile,Si-DLC film was deposited on the surface of M2 high-speed steel(HSS M2)and 304 stainless steel(304SS),and the microstructure,surface roughness,mechanical properties,corrosion resistance and tribological properties of Si-DLC films were characterized in detail.Results show that Si-DLC film at different axial positions of the auxiliary cathode possesses similar microstructure,film thickness and surface roughness,and the as-deposited Si-DLC film shows the low intrinsic stress of<0.3 GPa.Compared with the 304SS substrate,the Si-DLC film presents more noble corrosion potential,lower corrosion current density and higher polarization resistance,exhibiting higher corrosion resistance.Moreover,the Si-DLC film exhibits higher hardness,elastic factor and plastic factor than HSS M2 substrate and the corresponding adhesive strength is more than 10 N.The Si-DLC film sliding against GCr15 steel ball shows a lower friction coefficient than that of HSS M2 substrate and the wear rate of GCr15 steel ball sliding against the Si-DLC is lower than that of HSS M2 substrate.In addition,this novel method was used to deposit Si-DLC film on gears,drills and bearings without rotating sample racks.As a consequence,this method possesses great potential and can be generalized for the deposition of DLC film on the surface of complex shape workpiece.展开更多
基金financially supported by the National Key R&D Program of China(No.2018YFB0703801)the Sichuan Science and Technology Program(No.2019YFSY0012)the CAS"Light of West China"Program。
文摘A novel DLC film deposition method was proposed to realize the deposition of DLC film on the surface of complex shaped workpiece.Meanwhile,Si-DLC film was deposited on the surface of M2 high-speed steel(HSS M2)and 304 stainless steel(304SS),and the microstructure,surface roughness,mechanical properties,corrosion resistance and tribological properties of Si-DLC films were characterized in detail.Results show that Si-DLC film at different axial positions of the auxiliary cathode possesses similar microstructure,film thickness and surface roughness,and the as-deposited Si-DLC film shows the low intrinsic stress of<0.3 GPa.Compared with the 304SS substrate,the Si-DLC film presents more noble corrosion potential,lower corrosion current density and higher polarization resistance,exhibiting higher corrosion resistance.Moreover,the Si-DLC film exhibits higher hardness,elastic factor and plastic factor than HSS M2 substrate and the corresponding adhesive strength is more than 10 N.The Si-DLC film sliding against GCr15 steel ball shows a lower friction coefficient than that of HSS M2 substrate and the wear rate of GCr15 steel ball sliding against the Si-DLC is lower than that of HSS M2 substrate.In addition,this novel method was used to deposit Si-DLC film on gears,drills and bearings without rotating sample racks.As a consequence,this method possesses great potential and can be generalized for the deposition of DLC film on the surface of complex shape workpiece.
