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基于自解耦三明治结构的横向运动栅场效应晶体管MEMS微力传感器
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作者 高文迪 乔智霞 +10 位作者 韩香广 王小章 Adnan Shakoor 刘存朗 卢德江 杨萍 赵立波 王永录 王久洪 蒋庄德 孙东 《Engineering》 SCIE EI CAS CSCD 2023年第2期61-74,M0004,共15页
本文介绍了一种基于横向可移动栅极场效应晶体管(LMGFET)的新型微型力传感器的开发。提出了一种精确的电气模型,用于小型LMGFET器件的性能评估,与以前的模型相比,其精度有所提高。采用了一种新型三明治结构,该结构由一个金交叉解耦栅阵... 本文介绍了一种基于横向可移动栅极场效应晶体管(LMGFET)的新型微型力传感器的开发。提出了一种精确的电气模型,用于小型LMGFET器件的性能评估,与以前的模型相比,其精度有所提高。采用了一种新型三明治结构,该结构由一个金交叉解耦栅阵列层和两个软光阻层SU-8组成。通过所提出的双差分传感结构,LMGFET横向工作在垂直干扰下的输出电流被大大消除,所提出传感器的相对输出误差从4.53%(传统差分结构)降低到0.01%。提出了一种实用的传感器制造工艺,并对其进行了模拟。基于LMGFET的力传感器的灵敏度为4.65μA·nN^(-1),可与垂直可移动栅极场效应晶体管(VMGFET)器件相媲美,但非线性度提高了0.78%,测量范围扩大了±5.10μN。这些分析为LMGFET器件的电气和结构参数提供了全面的设计优化,并证明了所提出的传感器在生物医学显微操作应用中具有良好的力传感潜力。 展开更多
关键词 力传感器 场效应晶体管 横向运动 三明治结构 电气模型 显微操作 非线性度 双差分
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A new type-γ'/γ''coprecipitation behavior and its evolution mechanism in wrought Ni-based ATI 718Plus superalloy 被引量:1
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作者 Qianying Guo Zongqing Ma +5 位作者 zhixia qiao Chong Li Teng Zhang Jun Li Chenxi Liu Yongchang Liu 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2022年第24期98-110,共13页
In the precipitation-hardened Ni-based superalloy,typified by ATI 718 Plus,the nano-scaleγandγphase in duplet or triple coprecipitate morphology can provide superior high-temperature strength.Thus,it is of great sen... In the precipitation-hardened Ni-based superalloy,typified by ATI 718 Plus,the nano-scaleγandγphase in duplet or triple coprecipitate morphology can provide superior high-temperature strength.Thus,it is of great sense to study the evolution ofγ’/γ’’coprecipitate during long term service at elevated temperature.In this study,the new-typeγ’/γ’’coprecipitates with a sandwich or compact configuration were found firstly in wrought ATI 718 Plus superalloy during long term thermal exposure at 705℃.These co-structure of theγ’/γ’’precipitates evidently inhibit the coarsening ofγ’phase.The increase of thermal exposure time evidently leads to the increase of the volume fraction ofγ’/γ’’coprecipitate and transformation of sandwich-typeγ’/γ’’coprecipitate to compact-typeγ’/γ’’coprecipitate,which is characterized asγphase precipitate at several faces of theγphase.The main evolution mechanism ofγ’/γ’’coprecipitates is element segregation,especially the composition variations of Al+Ti and Nb and their ratio of Al+Ti/Nb.In addition,the interfacial energy betweenγ’’phase andγmatrix also plays a key role on theγ’/γ’’coprecipitates evolution.The calculated results show that the longer thermal exposure time leads to the higher interfacial energy,which is beneficial for nucleation and precipitation ofγ’’phase on the faces ofγ’phase. 展开更多
关键词 Wrought 718Plus superalloy γ’/γ’’coprecipitates Long-term thermal exposure Precipitate evolution
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