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大尺寸高端显示器件用薄膜晶体管Al–Mo复合电极坡度的形成过程与可控调节
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作者 刘丹 欧忠文 +6 位作者 方亮 黄中浩 李砚秋 熊永 林鸿涛 欧影轻 刘璐 《中国科学:化学》 CAS CSCD 北大核心 2023年第10期2079-2088,共10页
栅极坡度角(PA)对薄膜晶体管(TFT)性能和良率具有重要影响,如何将坡度角调节到合适的范围是TFT量产中关键技术之一.本文以大尺寸高端显示器件用a-Si TFT的Al/Mo、Mo/Al/Mo电极在磷酸系溶液下刻蚀得到的坡度角为研究对象,探究了膜层结构... 栅极坡度角(PA)对薄膜晶体管(TFT)性能和良率具有重要影响,如何将坡度角调节到合适的范围是TFT量产中关键技术之一.本文以大尺寸高端显示器件用a-Si TFT的Al/Mo、Mo/Al/Mo电极在磷酸系溶液下刻蚀得到的坡度角为研究对象,探究了膜层结构、Mo厚度、刻蚀时间对坡度角的影响.结果表明:在Al/Mo结构中,随着顶Mo厚度增加,Al与光刻胶之间的间隙增加,刻蚀液更易侵入,侧向刻蚀增强,坡度角减小;在Mo/Al/Mo三层电极结构中,随着底Mo厚度增加,底Mo和中间临近的Al侧壁发生电偶腐蚀,Al侧壁上形成氧化物钝化层,Al刻蚀速率减慢,坡度角变小.水池效应将导致刻蚀液残留在电极底部,阻碍新鲜刻蚀液与底部接触,底部刻蚀速率低于顶部;故当刻蚀时间延长时,底部和顶部刻蚀速率差进一步增大,导致坡度角减小.得到了Mo/Al/Mo坡度角与顶Mo和底Mo厚度回归方程,为调节坡度角和优选Mo厚度提供了依据.此电极坡度角的调节技术可为确保TFT的良率和性能提供参考. 展开更多
关键词 薄膜晶体管 AL电极 坡度角 叠层结构 水池效应 电偶腐蚀
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Diet and feeding behavior of a group of high-altitude rhesus macaques: high adaptation to food shortages and seasonal fluctuations
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作者 Kechu Zhang Fazal Karim +7 位作者 Zuxiang Jin Hongtao Xiao Yongfang Yao Qingyong Ni Bajin Li Wangjia Pu-Cuo zhonghao huang Huailiang Xu 《Current Zoology》 SCIE CAS CSCD 2023年第3期304-314,共11页
Diet and feeding behavior data are crucial to a deep understanding of the behavioral response and adaptation of primates to a high-altitude environment.From August 2019 to June 2021,we collected data on the feeding be... Diet and feeding behavior data are crucial to a deep understanding of the behavioral response and adaptation of primates to a high-altitude environment.From August 2019 to June 2021,we collected data on the feeding behavior of a high-altitude rhesus macaque Macaca mulatta group from Yajiang County,Western Sichuan Plateau,which has an altitude of over 3,500 m.The results showed that feeding(33.0±1.8%)and moving(28.3±2.6%)were the dominant behavior of rhesus macaques.Macaques ate 193 food items,comprising 11 food categories from 90 species.Our study found that plant roots(30.9±30.1%)and young leaves(28.0±33.1%)were the main foods eaten by macaques.The preferred foods of rhesus macaques were young leaves,fruits,and seeds,and the consumption of these items was positively correlated with its food availability.When the availability of preferred foods was low,macaques took plant roots,barks,and fallen leaves as fallback foods.In particular,roots were a dominant food item in winter,and this way of feeding became a key survival strategy.Our results suggest that,facing the relative scarcity and strong seasonal fluctuations of food resources in high-altitude habitat,macaques adopt active foraging strategies,relying on a variety of food species and adjusting flexibly their food choices based on food availability,which may help to maximize the energy efficiency of high-altitude macaques. 展开更多
关键词 DIET foraging strategy fallback food high-altitude habitat Macaca mulatta
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Diet of the Assamese macaque Macaca assamensis in lime- stone habitats of Nonggang, China 被引量:4
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作者 Qihai ZHOU Hua WEI +1 位作者 zhonghao huang Chengming huang 《Current Zoology》 SCIE CAS CSCD 北大核心 2011年第1期18-25,共8页
To enhance our understanding of dietary adaptations in macaques we studied the diet of the Assamese macaque Macaca assamensis in limestone seasonal rain forests at Nonggang Nature Reserve, China from September 2005 to... To enhance our understanding of dietary adaptations in macaques we studied the diet of the Assamese macaque Macaca assamensis in limestone seasonal rain forests at Nonggang Nature Reserve, China from September 2005 to August 2006. Our results show that although macaques fed on many plant species, 85.2% of the diet came from only 12 species, of which a bamboo species, Indocalamus calcicolus contributed to 62% of the diet. Young leaves were staple food items (74.1% of the diet) for Assamese macaques at Nonggang, and constituted the bulk of monthly diets almost year-round, ranging from 44.9% (July) to 92.9% (May). Young parts of Indocalamus calcicolus unexpanded leaves contributed to a large proportion of the young leaf diet in most months. Fruit accounted for only 17.4% of the diet, with a peak of consumption in July. We suggest that this highly fo- livorous diet may be related to the long lean season of fruit availability in limestone habitats as well as the utilization of cliffs of low fruit availability 展开更多
关键词 Assamese macaque Macaca assamensis DIET Limestone habitat
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