The effect of amorphous film on the deformation mechanism and mechanical properties of 6 H-SiC were systematically explored by a combination of both experiments and molecular dynamic(MD)simulations in nanoindentation....The effect of amorphous film on the deformation mechanism and mechanical properties of 6 H-SiC were systematically explored by a combination of both experiments and molecular dynamic(MD)simulations in nanoindentation.The experimental results showed that the plastic deformation of surface-modified6 H-SiC is mainly accommodated by dislocation activities in the subsurface and an amorphous layer with uniform thickness.The MD results indicated that the amorphous layer on the surface of the residual indentation mark consists of both amorphous SiO_(2)and SiC due to direct amorphization.In addition,the amorphous SiO_(2)film undergoes densification and then ruptures with the indentation depth increases.The modulus and hardness increase with increasing the indentation depth at the initial stage but will reach their stable values equivalent to monocrystalline 6 H-SiC.展开更多
基金financially supported by the Guangdong Specific Discipline Project(No.2020ZDZX2006)Shenzhen Key Laboratory of Cross-scale Manufacturing Mechanics Project(No.ZDSYS20200810171201007)undertaken with the assistance of the resources provided at the NCI National Facility systems through the National Computational Merit Allocation Scheme supported by the Australian Government。
文摘The effect of amorphous film on the deformation mechanism and mechanical properties of 6 H-SiC were systematically explored by a combination of both experiments and molecular dynamic(MD)simulations in nanoindentation.The experimental results showed that the plastic deformation of surface-modified6 H-SiC is mainly accommodated by dislocation activities in the subsurface and an amorphous layer with uniform thickness.The MD results indicated that the amorphous layer on the surface of the residual indentation mark consists of both amorphous SiO_(2)and SiC due to direct amorphization.In addition,the amorphous SiO_(2)film undergoes densification and then ruptures with the indentation depth increases.The modulus and hardness increase with increasing the indentation depth at the initial stage but will reach their stable values equivalent to monocrystalline 6 H-SiC.
