This paper presents a 65-nm 1-Gb NOR-type floating-gate flash memory,in which the cell device and chip circuit are developed and optimized.In order to solve the speed problem of giga-level NOR flash in the deep submic...This paper presents a 65-nm 1-Gb NOR-type floating-gate flash memory,in which the cell device and chip circuit are developed and optimized.In order to solve the speed problem of giga-level NOR flash in the deep submicron process,the models of long bit-line and word-line are first given,by which the capacitive and resistive loads could be estimated.Based on that,the read path and key modules are optimized to enhance the chip access property and reliability.With the measurement results,the flash memory cell presents good endurance and retention properties,and the macro is operated with 1-ls/byte program speed and less than 50-ns read time under 3.3 V supply.展开更多
As one of the most advanced and precise equipment in the world,a photo-lithography scanner is able to fabricate nanometer‐scale devices on a chip.To realize such a small dimension,the optical system is the fundamenta...As one of the most advanced and precise equipment in the world,a photo-lithography scanner is able to fabricate nanometer‐scale devices on a chip.To realize such a small dimension,the optical system is the fundamental,but the me-chanical system often becomes the bottleneck.In the photolithography,the ex-posure is a dynamic process.The accuracy and precision of the movement are determined by the mechanical system,which is even more difficult to control compared with the optical system.In the mechanical system,there are four crucial components:the reticle and wafer stages,the linear motor,the metrology system,and the control system.They work together to secure the reticle and substrate locating at the correct position,which determines the overlay and alignment per-formance in the lithography.In this paper,the principles of these components are reviewed,and the development history of the mechanical system is introduced.展开更多
基金supported in part by the Ministry of Science and Technology of China (2010CB934200,2011CBA00600)the National Natural Science Foundation of China (61176073)+1 种基金the National Science and Technology Major Project of China (2009ZX02023-005)the Director’s Fund of Institute of Microelectronics,Chinese Academy of Science
文摘This paper presents a 65-nm 1-Gb NOR-type floating-gate flash memory,in which the cell device and chip circuit are developed and optimized.In order to solve the speed problem of giga-level NOR flash in the deep submicron process,the models of long bit-line and word-line are first given,by which the capacitive and resistive loads could be estimated.Based on that,the read path and key modules are optimized to enhance the chip access property and reliability.With the measurement results,the flash memory cell presents good endurance and retention properties,and the macro is operated with 1-ls/byte program speed and less than 50-ns read time under 3.3 V supply.
基金National Key R&D Program of China,Grant/Award Number:2019YFB1704600National Natural Science Foundation of China(NSFC),Grant/Award Number:U20A6004。
文摘As one of the most advanced and precise equipment in the world,a photo-lithography scanner is able to fabricate nanometer‐scale devices on a chip.To realize such a small dimension,the optical system is the fundamental,but the me-chanical system often becomes the bottleneck.In the photolithography,the ex-posure is a dynamic process.The accuracy and precision of the movement are determined by the mechanical system,which is even more difficult to control compared with the optical system.In the mechanical system,there are four crucial components:the reticle and wafer stages,the linear motor,the metrology system,and the control system.They work together to secure the reticle and substrate locating at the correct position,which determines the overlay and alignment per-formance in the lithography.In this paper,the principles of these components are reviewed,and the development history of the mechanical system is introduced.
