Manufacturing technologies for making advanced micro systems have been developing in a rapid pace recently. Research progress towards nanosized structures and devices opens up a whole new horizon for miniaturized syst...Manufacturing technologies for making advanced micro systems have been developing in a rapid pace recently. Research progress towards nanosized structures and devices opens up a whole new horizon for miniaturized system integration. Advances in this field will have an enormous societal impact and economic benefit in areas such as information technology, energy, healthcare, and many more. There has been an enormous scientific and industrial interest in nanosized advanced technologies. The theories, tools and practices for the design, manufacturing and test of these systems are emerging. The aim of this special section is to capture some of the latest developments in integration technologies for the micro/nanosystems, with the following topics： Molecular and crystal assembly inside the carbon nanotube： encapsulation and manufacturing approachesElectroplating for high aspect ratio vias in PCB manufacturing： enhancement capabilities of acoustic streaming Local synthesis of carbon nanotubes for direct integra tion in Si microsystemsdesign considerations Waferlevel SLID bonding for MEMS encapsulation Effect of substrates and underlayer on CNT synthesis by plasma enhanced CVD These papers will briefly highlight important advance ments in manufacturing technologies of the micro/nano systems, and outline the blueprint of upcoming information technology revolution from the manufacturing point of view.展开更多
基金Acknowledgements This work was financially supported by the National Basic Research Program of China （Nos. 2013CB932603, 2012CB933404, 2011CB921903, and 2013CB934600）, the National Natural Science Foundation of China （Nos. 51432002, 51290272, 51121091, 51~201, and 11222434）, the Ministry of Education （No. 20120001130010） and the Beijing Municipal Sdence and Technology Planning Project （No. Z151100003315013）.
文摘Manufacturing technologies for making advanced micro systems have been developing in a rapid pace recently. Research progress towards nanosized structures and devices opens up a whole new horizon for miniaturized system integration. Advances in this field will have an enormous societal impact and economic benefit in areas such as information technology, energy, healthcare, and many more. There has been an enormous scientific and industrial interest in nanosized advanced technologies. The theories, tools and practices for the design, manufacturing and test of these systems are emerging. The aim of this special section is to capture some of the latest developments in integration technologies for the micro/nanosystems, with the following topics： Molecular and crystal assembly inside the carbon nanotube： encapsulation and manufacturing approachesElectroplating for high aspect ratio vias in PCB manufacturing： enhancement capabilities of acoustic streaming Local synthesis of carbon nanotubes for direct integra tion in Si microsystemsdesign considerations Waferlevel SLID bonding for MEMS encapsulation Effect of substrates and underlayer on CNT synthesis by plasma enhanced CVD These papers will briefly highlight important advance ments in manufacturing technologies of the micro/nano systems, and outline the blueprint of upcoming information technology revolution from the manufacturing point of view.
