磁控溅射工艺参数对Cu薄膜织构的影响

介绍了直流磁控溅射制备Cu薄膜时,溅射功率和玻璃基片温度等工艺参数的变化对薄膜织构的影响.靶材采用质量分数大于99.9%的铜靶,溅射室内真空度低于1.7×10-4,在氩气为保护气体的氛围下制备薄膜.用X射线衍射(XRD)、扫描电镜(SEM)测试分析了薄膜的物相结构、表面组成、表面形貌的变化.结果表明,随着玻璃基片温度升高,薄膜微观结构呈明显的差异.随着溅射功率的增大,溅射速率增大,薄膜织构减弱;当功率增大到200 W时,速率开始减小,织构开始增强.选择功率40 W、溅射气压0.5 Pa、衬底温度423 K和473 K的工艺参数,可获得表面结构平滑、致密和呈微小晶粒结构的薄膜.

Silver Film Growth on Glass Ceramic by Radio Frequency Magnetron Sputtering

Thin silver films are deposited by radio frequency magnetron sputtering on glass ceramic at room temperature.Variations of sputtering power,bios voltage and power density are carried out for each deposition,then parts of as-deposited samples are subjected to annealing at 600 ℃ within a vacuum chamber.Structural properties are studied by X-ray diffraction(XRD),scanning electron microscope(SEM)and laser scanning confocal microscope(LSCM).It is shown that structural properties have a strong dependency on sputtering power and annealing temperature.Electrical contact resistance measured by a four point probe instrument is directly affected by the thickness of films.It is also found that the film conductivity,especially in thinner films,is improved by the increasing grain size.Finally,the film adhesion is observed by scratch tests.And the adhesive ability deposited by radio frequency magnetron sputtering shows a better performance than that produced by traditional methods.

基于正交设计的纳米蛇纹石-纳米氧化镧/聚四氟乙烯复合材料在沙尘环境下的摩擦学性能

以聚四氟乙烯(PTFE)为基体,采用正交实验法研究了纳米蛇纹石(nano Serpentine)、纳米氧化镧(nano La2O3)和环境三种因素对nano Serpentine-nano La2O3/PTFE复合材料摩擦学性能的影响。采用自制沙尘模拟装置改进现有的MMU-5G摩擦磨损试验机对nano Serpentine-nano La2O3/PTFE复合材料进行摩擦学实验。通过SEM观察试样磨损表面和转移膜形貌,分析nano Serpentine-nano La2O3/PTFE复合材料磨损机制。结果表明:环境因素对nano Serpentine-nano La2O3/PTFE复合材料的摩擦系数影响最大,干摩擦摩擦系数比沙尘环境下摩擦系数低;nano Serpentine含量对nano Serpentine-nano La2O3/PTFE复合材料的磨损率影响最大,当nano Serpentine质量分数为9wt%时,nano Serpentine-nano La2O3/PTFE复合材料的总体磨损率最低。nano Serpentine-nano La2O3/PTFE复合材料的干摩擦的磨损机制主要为黏着磨损,沙尘环境的磨损机制主要为磨粒磨损。