ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central...ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central points are determined automatically according to their distribution rules. However, for the measurement of their phases, fringes should be recognized and processed with different calculating algorithms and least square optimization methods depending on the scanning modulation mode. When this technique is used for measurement of surface roughness, the measurement uncertainty is better than 5nm and the repeatability is less than 5%.展开更多
文摘ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central points are determined automatically according to their distribution rules. However, for the measurement of their phases, fringes should be recognized and processed with different calculating algorithms and least square optimization methods depending on the scanning modulation mode. When this technique is used for measurement of surface roughness, the measurement uncertainty is better than 5nm and the repeatability is less than 5%.
