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基于(111)硅单片集成三轴加速度计的工艺研究 被引量:3
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作者 赵忆 王家畴 +1 位作者 陈方 李昕欣 《微纳电子技术》 CAS 北大核心 2015年第6期390-395,共6页
介绍了一种新型单片集成电容式三轴微加速度计的加工方法,该方法采用非绝缘体上硅(SOI)的单硅片单面加工技术,易于与IC工艺兼容,而且成本低廉,成品率高,适用于批量生产,可替代传统的SOI工艺。该方法主要利用硅深度反应离子刻蚀(DRIE)技... 介绍了一种新型单片集成电容式三轴微加速度计的加工方法,该方法采用非绝缘体上硅(SOI)的单硅片单面加工技术,易于与IC工艺兼容,而且成本低廉,成品率高,适用于批量生产,可替代传统的SOI工艺。该方法主要利用硅深度反应离子刻蚀(DRIE)技术结合普通(111)单晶硅片内部可选择性横向自停止腐蚀技术制作并释放得到悬浮可动的敏感结构。此外,创新的锚点设计不仅使检测电极之间相互电学隔离,而且便于引线键合与封装。最后基于开环接口电路对加工制造的三轴加速度计进行了测试,验证了该工艺的可行性。 展开更多
关键词 微机电系统(MEMS) (111) 片单面加工 三轴加速度计 单片集成
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基于“8悬臂梁-质量块”结构的新颖x轴音叉式硅微机械陀螺 被引量:1
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作者 段飞 焦继伟 +5 位作者 王育才 张颖 宓斌玮 李金鹏 钱清 王跃林 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2007年第10期1630-1635,共6页
设计、制作并测试了一种新颖的x轴音叉式微机械陀螺,它以"8悬臂梁-质量块"结构来实现Coriolis力的检测,与常见的单层弹性梁-质量块结构相比,具有更好的模态稳定性;大质量块与薄弹性梁的结构设计有助于获得低机械噪声与高灵敏... 设计、制作并测试了一种新颖的x轴音叉式微机械陀螺,它以"8悬臂梁-质量块"结构来实现Coriolis力的检测,与常见的单层弹性梁-质量块结构相比,具有更好的模态稳定性;大质量块与薄弹性梁的结构设计有助于获得低机械噪声与高灵敏度.采用体硅微机械加工工艺在(111)硅晶圆上试制了基于"8悬臂梁-质量块"结构的微陀螺,由于在(111)晶向上硅的湿法腐蚀速率极其缓慢,而用氧化硅填充的限制槽限定侧向腐蚀范围,因此这套工艺能对双层弹性梁的结构尺寸进行精确控制,获得较小的模态失配.在大气环境中,该陀螺具有±200°/s的量程,角速度灵敏度为0.15mV/(°/s),分辨率约为0.1°/s. 展开更多
关键词 微机械陀螺 X轴 音叉式陀螺 “8悬臂梁-质量块”结构 限制槽 (111)晶圆
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Simulation of Surfactant Effects on Growth of Semiconductor Hetero-Epitaxial Sb-Ge/Si(111)
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作者 吴黎黎 吴锋民 《Communications in Theoretical Physics》 SCIE CAS CSCD 2011年第12期1130-1134,共5页
A kinetic Monte Carlo simulation is performed in order to study the effect of Sb as a surfactant on the growth of Ge/Si(111).In our model the exchange mechanism between Ge and Sb atoms and the re-exchange mechanism in... A kinetic Monte Carlo simulation is performed in order to study the effect of Sb as a surfactant on the growth of Ge/Si(111).In our model the exchange mechanism between Ge and Sb atoms and the re-exchange mechanism in which the exchanged Ge adatom re-exchange with the lifted Sb atom to return to the surfactant layer,are considered. Our simulation shows the re-exchange process plays an important role on the growth mode transition in Ge/Sb/Si(111) system.The influences of the substrate temperature and the deposition rate on the growth of Ge/Sb/Si(111) system is discussed. 展开更多
关键词 growth mode SURFACTANT re-exchange Monte Carlo simulation
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First-Principles Calculations of Atomic and Electronic Properties of Tl and In on Si(111)
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作者 戴宪起 赵建华 +2 位作者 孙永灿 危书义 卫国红 《Communications in Theoretical Physics》 SCIE CAS CSCD 2010年第9期545-550,共6页
The atomic and electronic structures of T1 and In on Si(111) surfaces are investigated using the firstprinciples total energy calculations. Total energy optimizations show that the energetically favored structure is... The atomic and electronic structures of T1 and In on Si(111) surfaces are investigated using the firstprinciples total energy calculations. Total energy optimizations show that the energetically favored structure is 1/3 ML T1 adsorbed at the T4 sites on Si(111) surfaces. The adsorption energy difference of one T1 adatom between (√3 × √3) and (1 × 1) is less than that of each In adatom. The DOS indicates that TI 6p and Si 3p electrons play a very important role in the formation of the surface states. It is concluded that the bonding of TI adatoms on Si(111) surfaces is mainly polar covalent, which is weaker than that of In on Si(111). So T1 atom is more easy to be migrated than In atom in the same external electric field and the structures of T1 on Si(111) is prone to switch between (√3 × √3) and (1 × 1). 展开更多
关键词 THALLIUM INDIUM silicon charge density adsorption first principles
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Hole effective mass in strained Si (111)
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作者 HU HuiYon ZHANG HeMing +2 位作者 SONG JianJun XUAN RongXi DAI XianYing 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2011年第3期450-452,共3页
The directional, averaged, and density-of-states effective masses of holes have been calculated for strained Si/(111)Si1-xGex. The results for the directional effective mass show that the effect of strain makes the co... The directional, averaged, and density-of-states effective masses of holes have been calculated for strained Si/(111)Si1-xGex. The results for the directional effective mass show that the effect of strain makes the constant energy surface of "heavy" holes more obvious warping than that in relaxed Si. The [111] and [110] directional effective masses of "heavy" holes decrease significantly under strain. It is found that the averaged effective mass of "heavy" holes decreases with increasing Ge fraction, while that of "light" holes increases. The traditional concepts of heavy and light holes become insignificant when Ge fraction is close to 0.4. The strain effect monotonically reduces the density-of-states effective mass at 218, 300 and 393 K, respectively. 展开更多
关键词 strained Si hole effective mass
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Nanoscale superconductivity of ?-Ga islands grown by molecular beam epitaxy
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作者 ZHANG HuiMin PENG JunPing +6 位作者 GUAN JiaQi LI Zhi SONG CanLi WANG LiLi HE Ke MA XuCun XUE QiKun 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2015年第10期89-93,共5页
We report on the preparation and superconductivity of metastable γ-Ga islands on Si(111) substrate. The Ga grows in a typical Volmer-Weber mode at a low temperature of 110 K, resulting in formation of Ga nanoislands ... We report on the preparation and superconductivity of metastable γ-Ga islands on Si(111) substrate. The Ga grows in a typical Volmer-Weber mode at a low temperature of 110 K, resulting in formation of Ga nanoislands at various sizes with the identical γ-phase. In-situ low temperature scanning tunneling spectra reveal quantized electronic states in ultrathin Ga islands. It is found that both the lateral size and thickness of the Ga islands strongly suppress the superconductivity. Due to substantial surface energy contribution, the transition temperature Tc scales inversely with the island thickness and the minimum thickness for the occurrence of superconductivity is calculated to be two monolayers. 展开更多
关键词 γ-Ga SUPERCONDUCTIVITY size effects molecular beam epitaxy
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