In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O2 radio frequency（RF） inductively coupled plasma discharges. The emphasis of this work has been put on the influence ...In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O2 radio frequency（RF） inductively coupled plasma discharges. The emphasis of this work has been put on the influence of the external parameters（i.e., the RF power, the pressure, and the Ar/O2 gas ratio） on the plasma properties. The numerical results show that the RF power has a significant influence on the amplitude of the plasma density rather than on the spatial distribution.However, the pressure and the Ar/O2 gas ratio affect not only the amplitude of the plasma density, but also the spatial uniformity. Finally, the comparison between the simulation results and the experimental data has been made at different gas pressures and oxygen contents, and a good agreement has been achieved.展开更多
Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational ...Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.展开更多
基金The project was supported by the National Key Basic Research Program of China(973)(2012CB720100)National Natural Science Foundation of China(20973124)~~
基金Project supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China(Grant No.2011ZX02403-001)the National Natural Science Foundation of China(Grant No.11205025)
文摘In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O2 radio frequency（RF） inductively coupled plasma discharges. The emphasis of this work has been put on the influence of the external parameters（i.e., the RF power, the pressure, and the Ar/O2 gas ratio） on the plasma properties. The numerical results show that the RF power has a significant influence on the amplitude of the plasma density rather than on the spatial distribution.However, the pressure and the Ar/O2 gas ratio affect not only the amplitude of the plasma density, but also the spatial uniformity. Finally, the comparison between the simulation results and the experimental data has been made at different gas pressures and oxygen contents, and a good agreement has been achieved.
基金supported by the Beijing Municipal Education Commission of China(No.KM201010015005)Beijing Key Laboratory of Printing & Packaging Materials and Technology of Beijing Institute of Graphic Communication of China(No.KF201005)
文摘Measurement of the oxygen dissociation fraction in RF low pressure oxygen/argon plasma using optical emission spectrometry is presented. The oxygen dissociation fraction and its evolutions as functions of operational parameters were determined using argon as the actinometer. At a pressure of 30 Pa, the oxygen dissociation fraction decreased from 13.4% to 9.5% as the input power increased from 10 W to 70 W. At an input power of 50 W, the oxygen dissociation fraction decreased from 12.3% to 7.7% when the gas pressure increased from 10 Pa to 40 Pa. The influences of operational parameters on the generation of atomic oxygen were also discussed.
