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可调谐探针起振系统设计
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作者 温阳 陈纵横 +2 位作者 冯婕 舒鹏丽 马宗敏 《国外电子测量技术》 北大核心 2023年第4期80-85,共6页
为了兼顾非接触式原子力显微镜(noncontact atomic force microscope,NC-AFM)更高谐振频率探针的使用需求,并通过提高控制器精度进而提高NC-AFM分辨率,提出了一种基于探针-样品间原子作用力变化的全数字可调谐NC-AFM高分辨率探针起振系... 为了兼顾非接触式原子力显微镜(noncontact atomic force microscope,NC-AFM)更高谐振频率探针的使用需求,并通过提高控制器精度进而提高NC-AFM分辨率,提出了一种基于探针-样品间原子作用力变化的全数字可调谐NC-AFM高分辨率探针起振系统。在Simulink环境下对探针起振系统的控制部分进行了设计,通过现场可编程门阵列(FPGA)实现了鉴相,滤波,锁频等功能;采用压电陶瓷片驱动探针振动,设计了操作便捷的探针座。将不同频率正弦信号提供给设计的起振系统进行功能性验证,实验结果表明,系统可以在20 kHz~50 MHz频率范围内跟踪探针谐振频率;最后使用起振系统成功使商用探针在谐振频率处振动,准确测出了探针的谐振频率及振动幅值,系统频率分辨率达到了0.1 Hz。 展开更多
关键词 非接触式原子力显微镜(nc-afm) 起振 谐振频率 数字锁相环 压电陶瓷
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工艺条件对硼掺杂纳米硅薄膜微结构及力学性能的影响 被引量:5
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作者 丁建宁 祁宏山 +6 位作者 袁宁一 何宇亮 程广贵 范真 潘海彬 王君雄 王秀琴 《真空科学与技术学报》 EI CAS CSCD 北大核心 2009年第2期188-193,共6页
采用射频和直流偏压(RF+DC)双重激励源,在等离子体增强化学气相沉积(PECVD)系统中成功制备了掺硼纳米硅薄膜。改变衬底温度、射频功率和退火温度几个关键工艺参数,利用拉曼(Raman)谱仪、薄膜测厚仪和原子力显微镜(AFM)对掺硼纳米硅薄膜... 采用射频和直流偏压(RF+DC)双重激励源,在等离子体增强化学气相沉积(PECVD)系统中成功制备了掺硼纳米硅薄膜。改变衬底温度、射频功率和退火温度几个关键工艺参数,利用拉曼(Raman)谱仪、薄膜测厚仪和原子力显微镜(AFM)对掺硼纳米硅薄膜的微结构进行了分析;应用纳米压痕法研究了工艺条件对薄膜弹性模量及硬度等力学性能的影响关系。结果表明:薄膜晶态比、平均晶粒大小随着衬底温度的升高均有增大趋势;射频功率对提高薄膜生长速率存在最优值条件;退火对本征和掺硼薄膜表面形貌特征有较大影响,退火后掺硼薄膜表面粗糙度增大明显。薄膜弹性模量及硬度很大程度上受射频功率和后序处理条件的影响,退火使薄膜的力学性能有所提高。针对实验现象,从薄膜结构方面进行了相关的理论阐释。 展开更多
关键词 纳米硅薄膜 掺硼 弹性模量 退火 AFM
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微纳沟道技术研究DNA分子性质研究
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作者 王凯歌 许桂雯 +5 位作者 李冀 牛憨笨 金爱子 岳双林 顾长志 陈大鹏 《纳米科技》 2007年第1期47-51,共5页
利用精细加工聚焦离子柬技术在氮化硅绝缘晶体上研制了形状不同的微纳米沟道,并结合非接触模式原子力显微技术观察了缓冲液和DNA溶液在沟道内运动的各自形貌。对沟道内溶液的形貌特性,尤其是一种表面有纳米沟槽的DNA溶液形貌进行了分... 利用精细加工聚焦离子柬技术在氮化硅绝缘晶体上研制了形状不同的微纳米沟道,并结合非接触模式原子力显微技术观察了缓冲液和DNA溶液在沟道内运动的各自形貌。对沟道内溶液的形貌特性,尤其是一种表面有纳米沟槽的DNA溶液形貌进行了分析讨论。微纳孔道与原子力显微镜成像技术相结合,有助于更多地理解生物单分子动力学和静力学等方面的性质。 展开更多
关键词 微纳米沟道 纳米孔 纳米沟槽 原子力显微镜
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低噪声原子力显微镜测量单元设计 被引量:9
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作者 许军 金晨 +8 位作者 牛刘敏 董诚 王慧云 王旭东 董震 孔融智 秦丽 温焕飞 马宗敏 《电子显微学报》 CAS CSCD 北大核心 2021年第2期138-143,共6页
为进一步提高大气下非接触式原子力显微镜(NC-AFM)表征样品形貌的分辨率及纵向检测灵敏度,本文提出了一种基于光偏转检测方法的新型非接触式噪声溯源抑制模型及多级隔振的机械振动噪声主动隔振装置。通过多源噪声抑制系统的设计,实现了... 为进一步提高大气下非接触式原子力显微镜(NC-AFM)表征样品形貌的分辨率及纵向检测灵敏度,本文提出了一种基于光偏转检测方法的新型非接触式噪声溯源抑制模型及多级隔振的机械振动噪声主动隔振装置。通过多源噪声抑制系统的设计,实现了实验环境下传递到实验装置的高低频振动由69 nm有效的衰减至0.03 nm以下。结合光偏转理论,系统在大气下的探针检测灵敏度为156.4 mV·nm^(-1)、电压偏转噪声密度为2.24μV/√Hz、偏转噪声密度达到了17.72 fm/√Hz。系统噪声得到有效的抑制,为进一步实验奠定了基础。 展开更多
关键词 非接触式原子力显微镜(nc-afm) 光偏转检测 噪声溯源抑制 主动隔振 低噪声
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高灵敏低噪声光束偏转检测系统设计 被引量:6
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作者 曲章 武兴盛 +1 位作者 魏久焱 马宗敏 《微纳电子技术》 北大核心 2018年第5期359-365,370,共8页
为了进一步提高自制超高真空室温非接触式原子力显微镜(NC-AFM)的检测灵敏度和获得材料表面更高分辨率的原子图像,在比较了原子力显微镜探针振动位移检测的三种方法的基础上,重点研究了光束偏转检测方法,理论上分析了这种方法的偏转... 为了进一步提高自制超高真空室温非接触式原子力显微镜(NC-AFM)的检测灵敏度和获得材料表面更高分辨率的原子图像,在比较了原子力显微镜探针振动位移检测的三种方法的基础上,重点研究了光束偏转检测方法,理论上分析了这种方法的偏转检测灵敏度与噪声。设计了一个高灵敏度、低噪声的光束偏转检测系统,该系统的激光光斑能够高精度地聚焦在悬臂上,能容易、直观地对准激光光路,并高效地检测到悬臂的振动和探针的共振频率。通过实验,验证了准直激光的质量及光路的对准,并利用该系统在超高真空非接触式原子力显微系统中进行探针振动实验,得到了探针的共振频率为161.736 8 kHz,通过计算得到探针共振的品质因数为12 939,说明系统具有高灵敏度和低噪声的性能。有望在进一步提高原子力显微镜分辨率方面得到应用。 展开更多
关键词 光学测量 非接触式原子力显微镜(nc-afm) 光束偏转检测 高灵敏度 低噪声 共振频率
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大气环境非接触调频AFM检测与控制平台设计及测试 被引量:3
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作者 许军 金晨 +3 位作者 王旭东 秦丽 温焕飞 马宗敏 《电子测量技术》 北大核心 2021年第11期163-168,共6页
为进一步提高大气环境调频非接触模式原子力显微镜(frequency modulated non-contact atomic force microscope)样品表面形貌表征能力。本文基于大气环境光路调节系统设计了高精度驱动位移调节装置,采用多块堆叠的切向压电陶瓷实现了sti... 为进一步提高大气环境调频非接触模式原子力显微镜(frequency modulated non-contact atomic force microscope)样品表面形貌表征能力。本文基于大气环境光路调节系统设计了高精度驱动位移调节装置,采用多块堆叠的切向压电陶瓷实现了stick-slip高精度驱动方式,调节精度达到了2.6nm/V,其精度高于常规步进电机,使得悬臂反射率达到26%。基于该高精度位移调节装置设计,系统实现了谐振频率检测与反馈,其中共振频率f0=158.73kHz,半高宽ω=373.2Hz,品质因数Q=564,系统最小检测灵敏度达到80mHz,系统电压噪声密度约为2.32μV/Hz,系统整体噪声为253.3fm/Hz。为表征样品形貌奠定了基础。 展开更多
关键词 调频非接触模式原子力显微镜(FM-nc-afm) 光路调节 粘滑驱动 高精度位移调节 谐振频率检测
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氧化铝薄膜的制备与结构缺陷研究
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作者 尚璐瑶 杨晓峰 《传感器与微系统》 CSCD 北大核心 2022年第9期4-7,15,共5页
阐述了氧化铝(AlO)薄膜4层结构与台阶结构,同时提出了薄膜中含有的2种缺陷结构。通过Ar~+溅射和退火获得氧化铝薄膜,基于超高真空非接触式调频原子力显微镜(UHV-NC-FM-AFM)测试技术,对所制作的氧化铝薄膜进行表征研究。通过对氧化铝薄... 阐述了氧化铝(AlO)薄膜4层结构与台阶结构,同时提出了薄膜中含有的2种缺陷结构。通过Ar~+溅射和退火获得氧化铝薄膜,基于超高真空非接触式调频原子力显微镜(UHV-NC-FM-AFM)测试技术,对所制作的氧化铝薄膜进行表征研究。通过对氧化铝薄膜构造与缺陷建模,结合实验分析,验证了薄膜结构和缺陷理论。缺陷结构高度为(50±20)pm,氧化铝薄膜台阶的高度约200 pm,薄膜周期结构与DFT计算理论模型中单元的大小基本一致,实验结果与理论值基本吻合,为后期蒸镀钯(Pd)实验奠定了基础。 展开更多
关键词 氧化铝薄膜 超高真空非接触式调频原子力显微镜 缺陷理论
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On-surface synthesis and edge states of NBN-doped zigzag graphene nanoribbons
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作者 Xiao Chang Li Huang +9 位作者 Yixuan Gao Yubin Fu Ji Ma Huan Yang Junzhi Liu Xiaoshuai Fu Xiao Lin Xinliang Feng Shixuan Du Hong-Jun Gao 《Nano Research》 SCIE EI CSCD 2023年第7期10436-10442,共7页
Zigzag graphene nanoribbons(ZGNRs)with spin-polarized edge states have potential applications in carbon-based spintronics.The electronic structure of ZGNRs can be effectively tuned by different widths or dopants,which... Zigzag graphene nanoribbons(ZGNRs)with spin-polarized edge states have potential applications in carbon-based spintronics.The electronic structure of ZGNRs can be effectively tuned by different widths or dopants,which requires delicately designed monomers.Here,we report the successful synthesis of ZGNR with a width of eight carbon zigzag lines and nitrogen-boronnitrogen(NBN)motifs decorated along the zigzag edges(NBN-8-ZGNR)on Au(111)surface,which starts from a specially designed U-shaped monomer with preinstalled NBN units at the zigzag edge.Chemical-bond-resolved non-contact atomic force microscopy(nc-AFM)imaging confirms the zigzag-terminated edges and the existence of NBN dopants.The electronic states distributed along the zigzag edges have been revealed after a silicon-layer intercalation at the interface of NBN-8-ZGNR and Au(111).Our work enriches the ZGNR family with a new dopant and larger width,which provides more candidates for future carbonbased nanoelectronic and spintronic applications. 展开更多
关键词 zigzag graphene nanoribbons nitrogen-boron-nitrogen(NBN)dopant edge states scanning tunneling microscopy(STM) non-contact atomic force microscopy(nc-afm) density functional theory(DFT)calculations
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奥氏体不锈钢溅射纳米晶薄膜的点蚀行为研究 被引量:2
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作者 刘莉 李瑛 王福会 《腐蚀科学与防护技术》 CAS CSCD 北大核心 2010年第4期283-288,共6页
利用统计分析和原子力显微镜(AFM)原位观测方法,研究了一种轧制粗晶的奥氏体不锈钢和它的溅射纳米晶薄膜在3.5%NaC l溶液中的点蚀行为.结果表明,溅射纳米晶薄膜的耐点蚀能力显著高于同成分的轧制粗晶材料;纳米晶薄膜的亚稳态点蚀过程被... 利用统计分析和原子力显微镜(AFM)原位观测方法,研究了一种轧制粗晶的奥氏体不锈钢和它的溅射纳米晶薄膜在3.5%NaC l溶液中的点蚀行为.结果表明,溅射纳米晶薄膜的耐点蚀能力显著高于同成分的轧制粗晶材料;纳米晶薄膜的亚稳态点蚀过程被促进而稳态点蚀生长过程被抑制;电化学原子力显微镜(AFM)的原位观察可见,亚稳态点蚀在溅射薄膜表面的粒子团簇间产生,稳态点蚀为浅碟形点蚀坑生长. 展开更多
关键词 纳米晶薄膜 点蚀 统计分析 原子力显微镜(AFM)
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Hole-doping of mechanically exfoliated graphene by confined hydration layers 被引量:1
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作者 Tjeerd R. J. Bollmann Liubov Yu. Antipina +2 位作者 Matthias Temmen Michael Reichling Pavel B. Sorokin 《Nano Research》 SCIE EI CAS CSCD 2015年第9期3020-3026,共7页
By the use of non-contact atomic force microscopy (NC-AFM) and Kelvin probe force microscopy (KPFM), we measure the local surface potential of mechanically exfoliated graphene on the prototypical insulating hydrop... By the use of non-contact atomic force microscopy (NC-AFM) and Kelvin probe force microscopy (KPFM), we measure the local surface potential of mechanically exfoliated graphene on the prototypical insulating hydrophilic substrate of CAF2(111). Hydration layers confined between the graphene and the CaF2 substrate, resulting from the graphene's preparation under ambient conditions on the hydrophilic substrate surface, are found to electronically modify the graphene as the material's electron density transfers from graphene to the hydration layer. Density functional theory (DFT) calculations predict that the first 2 to 3 water layers adjacent to the graphene hole-dope the graphene by several percent of a unit charge per unit cell. 展开更多
关键词 graphene non-contact ATOMIC forcemicroscopy (nc-afm KPFM) liquid-solid interfacestructure electronic TRANSPORT innanoscale materials andstructuresgraphene non-contact ATOMIC forcemicroscopy (nc-afm KPFM) liquid-solid interfacestructure electronic TRANSPORT innanoscale materials andstructures
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Unusually high electron density in an intermolecular non-bonding region:Role of metal substrate 被引量:1
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作者 Chen-Guang Wang Zhi-Hai Cheng +1 位作者 Xiao-Hui Qiu Wei Ji 《Chinese Chemical Letters》 SCIE CAS CSCD 2017年第4期759-764,共6页
It has been demonstrated that intermolecular interaction,crucial in a plenty of chemical and physical processes,may vary in the presence of metal surface.However,such modification is yet to be quantitatively revealed.... It has been demonstrated that intermolecular interaction,crucial in a plenty of chemical and physical processes,may vary in the presence of metal surface.However,such modification is yet to be quantitatively revealed.Here,we present a systematical density functional theory study on adsorbed bis(para-pyridyl)acetylene(BPPA) tetramer on Au(111) surface.We observed unusually high electron density between two head-to-head N atoms,an intermolecular "non-bonded" region,in adsorbed BPPA tetramer.This exceptional electron density originates from the wavefunction hybridization of the two compressed N lone-electron-pair states of two BPPA,as squeezed by a newly revealed N-Au-N threecenter bonding.This bond,together with the minor contribution from N...H-C intermolecular hydrogen bonding,shortens the N-N distance from over 4 A to 3.30 A and offers an attractive lateral interacting energy of 0.60 eV,effectively to a surface-confined in-plane pressure.The overlapped non-bonding vvavefunction hybridization arising from the effective pressure induced by the N-Au-N three-center bonding,as not been fully recognized in earlier studies,was manifested in non-contact Atomic Force Microscopy. 展开更多
关键词 Density functional theory Lone electron pairs hybridization N-Au-N three-center bonding In-plane pressure nc-afm
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Molecular heterostructure by fusing graphene nanoribbons of different lengths through a pentagon ring junction
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作者 Qiang Sun Hao Jiang +2 位作者 Yuyi Yan Roman Fasel Pascal Ruffieux 《Nano Research》 SCIE EI CSCD 2022年第9期8465-8469,共5页
Graphene nanoribbons(GNRs)have attracted great research interest because of their widely tunable and unique electronic properties.The required atomic precision of GNRs can be realized via on-surface synthesis method.I... Graphene nanoribbons(GNRs)have attracted great research interest because of their widely tunable and unique electronic properties.The required atomic precision of GNRs can be realized via on-surface synthesis method.In this work,through a surface assisted reaction we have longitudinally fused the pyrene-based graphene nanoribbons(pGNR)of different lengths by a pentagon ring junction,and built a molecular junction structure on Au(111).The electronic properties of the structure are studied by scanning tunneling spectroscopy(STS)combined with tight binding(TB)calculations.The pentagon ring junction shows a weak electronic coupling effect on graphene nanoribbons,which makes the electronic properties of the two different graphene nanoribbons connected by a pentagon ring junction analogous to type I semiconductor heterojunctions. 展开更多
关键词 graphene nanoribbons(GNRs) scanning tunneling spectroscopy(STS) non-contact atomic force microscopy(nc-afm) tight-binding(TB)calculations junction structure
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Energy band engineering via“Bite”defect located on N=8 armchair graphene nanoribbons
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作者 Shijie Sun Yurou Guan +6 位作者 Zhenliang Hao Zilin Ruan Hui Zhang Jianchen Lu Lei Gao Xiaoqing Zuo Jinming Cai 《Nano Research》 SCIE EI CSCD 2022年第1期653-658,共6页
Graphene nanoribbons(GNRs)not only share many superlative properties of graphene but also display an exceptional degree of tunability of their electronic properties.The bandgaps of GNRs depend greatly on their widths,... Graphene nanoribbons(GNRs)not only share many superlative properties of graphene but also display an exceptional degree of tunability of their electronic properties.The bandgaps of GNRs depend greatly on their widths,edges,etc.Herein,we report the synthesis path and the physical properties of atomic accuracy staggered narrow N=8 armchair graphene nanoribbons(sn-8AGNR)with alternating"Bite"defects on the opposite side.The intermediate structures in the surface physicochemical reactions from the precursors to the sn-8AGNR are characterized by scanning tunneling microscopy.The electronic properties of the sn-8AGNR are characterized by scanning tunneling spectroscopies and 6//6V mappings.Compared with the perfect N=8 armchair graphene nanoribbons(8AGNR),the sn-8AGNR has a larger bandgap,indicating that the liB\Xen edges can effectively regulate the electronic structures of GNRs. 展开更多
关键词 graphene nanoribbons(GNRs) scanning tunneling spectroscopy(STS) non-contact atomic force microscopy(nc-afm) density functional theory(DFT) energy band regulation
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Atomic resolution in noncontact AFM by probing cantilever frequency shifts
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作者 Hong Yong Xie 《China Particuology》 SCIE EI CAS CSCD 2007年第3期242-246,共5页
Rutile TiO2 (001) quantum dots (or nano-marks) in different shapes were used to imitate uncleaved material surfaces or materials with rough surfaces. By numerical integration of the equation of motion of cantileve... Rutile TiO2 (001) quantum dots (or nano-marks) in different shapes were used to imitate uncleaved material surfaces or materials with rough surfaces. By numerical integration of the equation of motion of cantilever for silicon tip scanning along the [110] direction over the rutile TiO2 (001) quantum dots in ultra high vacuum (UHV), scanning routes were explored to achieve atomic resolution from frequency shift image. The tip-surface interaction forces were calculated from Lennard-Jones (12-6) potential by the Hamaker summation method. The calculated results showed that atomic resolution could be achieved by frequency shift image for TiO2 (001) surfaces of rhombohedral quantum dot scanning in a vertical route, and spherical cap quantum dot scanning in a superposition route.2007 Chinese Society of Particuology and Institute of Process Engineering, Chinese Academy of Sciences. Published by Elsevier B.V. 展开更多
关键词 nc-afm Frequency shift image Atomic resolution Quantum dots Uncleaved material surface
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