磁控溅射镀膜技术在(Cr,Ti,Al)N涂层上的应用

过渡金属氮化物硬质涂层在切削刀具、精密模具和机械零部件等领域有着广泛的应用。随着切削技术的进步和难加工材料的增多,硬质涂层已由传统的二元涂层向着三元、四元涂层不断发展。(Cr,Ti,Al)N四元涂层因其优异的综合性能而备受研究人员的关注。本文从磁控溅射镀膜的基本原理和技术特点出发,介绍了制备(Cr,Ti,Al)N涂层常见的磁控溅射镀膜技术,分析了采用单质靶与合金靶沉积镀膜的效果及其各自的优缺点,研究了磁控溅射工艺参数对(Cr,Ti,Al)N涂层机械性能的影响,最后讨论了(Cr,Ti,Al)N梯度涂层的作用及其制备方法。本文可为设计(Cr,Ti,Al)N涂层制备工艺、改善(Cr,Ti,Al)N涂层性能提供理论参考与指导。

制备Si-Cr-Y高温抗氧化涂层适用于低密度Nb-Ti-Al合金

针对低密度Nb-Ti-Al合金抗氧化性能需求,开展了Si-Cr-Y抗氧化涂层研究,利用SEM、EDS、电阻内热法等手段分析了制备的硅系涂层高温抗氧化性能和微观结构在氧化前后的变化。结果表明,1200℃下涂层抗氧化寿命达到133 h,室温~1200℃空冷热震大于15000次;涂层与基体之间形成一层扩散阻氧层,保证了涂层与基体之间的结合强度;在高温大气环境下,涂层表面形成一层隔绝氧气的SiO2保护层,从而表现出Si-Cr-Y涂层具有良好的抗氧化性能。

High temperature oxidation behavior of Ti(Al,Si)_3 diffusion coating on γ-TiAl by cold spray

A Ti(Al,Si)3 diffusion coating was prepared on γ-TiAl alloy by cold sprayed Al?20Si alloy coating, followed by a heat-treatment. The isothermal and cyclic oxidation tests were conducted at 900 °C for 1000 h and 120 cycles to check the oxidation resistance of the coating. The microstructure and phase transformation of the coating before and after the oxidation were studied by SEM, XRD and EPMA. The results indicate that the diffusion coating shows good oxidation resistance. The mass gain of the diffusion coating is only a quarter of that of bare alloy. After oxidation, the diffusion coating is degraded into three layers: an inner TiAl2 layer, a two-phase intermediate layer composed of a Ti(Al,Si)3 matrix and Si-rich precipitates, and a porous layer because of the inter-diffusion between the coating and substrate.

Zr-Ti-B-N刀具涂层在600℃恒温过程的演变研究

评估Zr-Ti-B-N刀具涂层在600℃下的耐热能力,研究不同热处理时间对涂层结构和性能的影响规律。采用高功率脉冲磁控溅射和脉冲直流磁控溅射复合技术制备Zr-Ti-B-N涂层,利用高温马弗炉对涂层进行热处理,借助纳米压痕仪、高温摩擦磨损试验机测试热处理后Zr-Ti-B-N涂层的力学性能、摩擦学性能。采用X射线衍射仪(XRD)和扫描电子显微镜(SEM)对热处理前后Zr-Ti-B-N涂层的微观结构进行表征,在高温环境下,不同热处理时间对涂层的力学性能、摩擦学性能和微观结构有显著影响。结果证明,在600℃的大气环境下,经1h热处理后,涂层的综合性能稳定,涂层硬度为23.7GPa,临界载荷为31.7N;经2h热处理后,晶粒尺寸逐渐增大,柱状晶结构变得明显,涂层硬度开始下降;经3h热处理后,涂层表面出现明显的氧化膜,晶粒尺寸增大了27.0%,摩擦系数降到最低,为0.66,临界载荷未发生明显变化。

磁控溅射Ti-Al-N复合膜的摩擦磨损性能分析

采用真空磁控溅射技术的方法制备了不同Al质量分数的Ti-Al-N薄膜,分别研究了室温及高温下不同Al质量分数的Ti-Al-N薄膜的摩擦磨损性能.研究结果表明,Al质量分数和温度都对薄膜的摩擦磨损性能产生较大的影响.室温时,当Al质量分数为49.97%时,薄膜的平均摩擦系数最小,为0.772 3;高温条件下,薄膜的摩擦系数显著低于室温条件下,当Al质量分数为39.51%时,平均摩擦系数最小,为0.379 2.

偏压梯度TiAlN涂层对TC4钛合金振动与拉伸疲劳性能的影响与机理

目的 探究偏压梯度TiAlN涂层对基体疲劳性能的影响规律和疲劳损伤机理。方法 利用磁过滤阴极真空弧技术和连续改变偏压的沉积工艺,在TC4钛合金表面沉积了偏压梯度TiAlN涂层,并采用扫描电镜、轮廓仪、纳米压痕和划痕仪表征测试了TiAlN涂层的微观结构和内应力、表面硬度、膜基结合力等基本力学性能。对TiAlN涂层试件的振动和拉伸疲劳性能分别进行了考核,通过观察试件疲劳断口形貌,探究了偏压梯度TiAlN涂层/基体的疲劳损伤机理。结果 TiAlN涂层中Al元素含量沿深度方向一直在降低,偏压工艺成功制备出梯度结构涂层。偏压梯度TiAlN涂层的内应力为压缩状态,数值为(2.66±0.23) GPa,显著低于对应恒压涂层(-200V)。偏压梯度TiAlN涂层试件平均振动强度和拉伸疲劳强度分别为370.90、377.90 MPa,前者相对于TC4基体提高了47.7%,后者几乎保持不变。结论 TiAlN涂层内部存在残余压应力,具有一定抗裂纹萌生能力,TC4钛合金表面制备偏压梯度TiAlN涂层后,两种受载类型下的疲劳裂纹源均位于涂层与基体界面处。振动受载时,涂层中梯度结构抑制了裂纹的扩展,疲劳强度提高;拉伸受载时,TiAlN涂层部分发生破碎,抑制裂纹萌生与促进裂纹扩展两种机制同时存在,疲劳强度几乎不变。

激光熔覆Ti-Al-N复合涂层高温氧化及摩擦磨损性能

采用激光熔覆于TC4合金表面原位合成Ti-Al-N复合涂层,对比研究复合涂层及TC4基体的高温氧化行为及宽温域下的摩擦磨损性能。结果表明:复合涂层在800℃以下生成以TiO_(2)为主的多层膜,在900和1000℃下涂层氧化产物为TiO_(2)和Al_(2)O_(3)的混合氧化层,涂层表现出较好的抗高温氧化性能;由于氧化膜增厚及涂层中分布的Ti_2AlN自润滑相的作用,800℃时涂层摩擦因数降至0.2091,磨损率降至0.025×10^(-4)mm^3·N^(-1)·m^(-1)是TC4钛合金基体的1.43%。复合涂层在测试温度区间以磨粒磨损为主,高温条件下氧化物具有明显的润滑作用。

Structural characteristics and high-temperature tribological behaviors of laser cladded NiCoCrAlY−B_(4)C composite coatings on Ti6Al4V alloy

In order to improve the hardness and tribological performance of Ti6Al4V alloy,NiCoCrAlY-B_(4)C composite coatings with B_(4)C of 5%,10%and 15%(mass fraction)were fabricated on its surface by laser cladding(LC).The morphologies,chemical compositions and phases of obtained coatings were analyzed using scanning electronic microscope(SEM),energy dispersive spectrometer(EDS),and X-ray diffraction(XRD),respectively.The effects of B_(4)C mass fraction on the coefficient of friction(COF)and wear rate of NiCoCrAlY-B_(4)C coatings were investigated using a ball-on-disc wear tester.The results show that the NiCoCrAlY-B_(4)C coatings with different B_(4)C mass fractions are mainly composed of NiTi,NiTi_(2),α-Ti,CoO,AlB_(2),TiC,TiB and TiB_(2)phases.The COFs and wear rates of NiCoCrAlY-B_(4)C coatings decrease with the increase of B_(4)C content,which are contributed to the improvement of coating hardness by the B_(4)C addition.The wear mechanisms of NiCoCrAlY-B_(4)C coatings are changed from adhesive wear and oxidation wear to fatigue wear with the increase of B_(4)C content.

Microstructures and properties of PVD TiAlN coating deposited on cermets with different Ti(C,N)grain size

In the present work,TiAlN coatings were deposited on Ti(C,N)-based cermet substrates by physical vapor deposition method.Emphasis was focused on the influence of grain size of cermet substrates on the microstructure,growth behavior,mechanical properties,adhesion strength and wear behavior of the coatings.The results show that finer Ti(C,N)grain size leads to higher nucleation density and lower growth rate of coatings,indicating the crystallite size of the TiAlN coatings decreases with decreasing Ti(C,N)grain size.Nanoindentation tests show that the coatings deposited on cermets of the finest grain size exhibit the highest hardness(H),elastic modulus(E),H/E and H3/E2 of 34.5 GPa,433.2 GPa,0.080 and 0.22,respectively.The adhesion strength between coating and substrate is also enhanced with decreasing Ti(C,N)grain size by scratch test,which corresponds to the grain size and H/E and H3/E2 of the coating.Besides,the lower surface roughness and better mechanical properties of the coating deposited on finer grained cermet contribute to the better wear resistance of the coating.

Pulsed DC plasma enhanced chemical vapor deposited TiN/Ti(C,N) multilayer coatings

TiN single coatings and TiN/Ti(C,N) multilayer coatings deposited on Cr12MoV substrate have been completed by pulsed DC plasma enhanced chemical vapor deposition(PCVD) process. The SEM, XRD and microvicker’s hardness as well as the indentation test were used to study the microstructure and mechanical properties of TiN/Ti(C,N) multilayer coatings. The results show that TiN/Ti(C,N) coatings are fine and have free column structure, and carbon atoms take the place of some nitrogen atoms in Ti(C,N) coatings when lower flow ratio of CH 4 is used. The microvicker’s hardness and interfacial adhesion between TiN/Ti(C,N) coatings and Cr12MoV substrate increases more obviously than that of TiN single hard coatings due to the more dense and free column structure when process is optimized.

Effect of N-ion implantation and diamond-like carbon coating on fretting wear behaviors of Ti6Al7Nb in artificial saliva

The tribology behaviors of Ti6Al7Nb,its alloy with N-ion implantation,and its alloy with diamond-like carbon(DLC)coating were investigated in artificial saliva.Fretting wear tests of untreated,N-ion implanted and DLC coated Ti6Al7Nb alloys plate against a Si3N4ball were carried out on a reciprocating sliding fretting wear test rig.Based on the analysis of X-ray diffraction,Raman spectroscopy,3-D profiler,SEM morphologies and frictional kinetics behavior analysis,the damage behavior of surface modification layer was discussed in detail.The results indicated that the fretting wear behavior of Ti6Al7Nb alloy with N-ion implantation was increased with the dose increase of the implanted nitrogen ions.Moreover,the DLC-coated Ti6Al7Nb alloy with low ion implantation could improve the fretting wear behavior greatly.In addition,the Ti6Al7Nb with DLC coating had better ncorrosion resistance due to the special compact structure.All results suggested that the Ti6Al7Nb with DLC coating had better wear resistance than that with N-ion implantation in artificial saliva.

Microstructure evolution and mechanical properties of Ti-B-N coatings deposited by plasma-enhanced chemical vapor deposition

Ternary Ti-B-N coatings were synthesized on AISI 304 and Si wafer by plasma-enhanced chemical vapor deposition (PECVD) technique using a gaseous mixture of TiCl4,BCl3,H2,N2,and Ar.By virtue of X-ray diffraction analysis,X-ray photoelectron spectroscopy,scanning electron microscope,and high-resolution transmission electron microscope,the influences of B content on the microstructure and properties of Ti B N coatings were investigated systematically.The results indicated that the microstructure and mechanical properties of Ti-B-N coatings largely depend on the transformation from FCC-TiN phase to HCP-TiB2 phase.With increasing B content and decreasing N content in the coatings,the coating microstructure evolves gradually from FCC-TiN/a-BN to HCP-TiB2 /a-BN via FCC-TiN+HCP-TiB2/a-BN.The highest microhardness of about 34 GPa is achieved,which corresponds to the nanocomposite Ti-63%B-N (mole fraction) coating consisting of the HCP-TiB2 nano-crystallites and amorphous BN phase.The lowest friction-coefficient was observed for the nanocomposite Ti-41%B-N (mole fraction) coating consisting of the FCC-TiN nanocrystallites and amorphous BN

Improvement on the Oxidation Resistance of a Ti_3Al Based Alloy by Cr1-xAl_xN (0≤x≤0.47) Coatings

Cr1-xAlxN coatings have been deposited on a Ti3Al based alloy by reactive sputtering method. The results of the isothermal oxidation test at 800-900℃ showed that Cr1-xAlxN coatings could remarkably reduce the oxidation rate of the alloy owing to the formation of Al2O3＋Cr2O3 mixture oxide scale on the surface of the coatings. No spallation of the coatings or oxide scales took place during the cyclic oxidation at 800℃. Ti was observed to diffuse into the coatings, the diffusion distance of which was very short, and the diffusion ability of it was proportional to the AI content in the coatings. Compared to Ti, Nb can diffuse much more easily through the whole coatings and oxide scales.

High temperature oxidation behavior of (Ti, Al)N coating deposited by arc ion plating

(Ti, Al)N gradient nano-coating was deposited on the surface of 1Cr11Ni2W2MoV stainless steel by the MTP-8-800 arc ion plating equipment. And the oxidation performance at high temperature for 500h was tested under the condition of the surrounding air temperature 700℃. The test results show that, because of the structural features of the （Ti, Al）N coating, the coating becomes the compact and continuous Al2O3 film, which can protect the basis material effectively in the process of the high temperature oxidizing. The oxidation kinetics of the coating accord with parabolic law.

Si-Al-Y Co-deposition Coatings Prepared on Ti-Al Alloy for Enhanced High Temperature Oxidation Resistance

Si-Al-Y co-deposition coatings were prepared on Ti-Al alloy by pack cementation processes at 1 050 ℃ for 4 h with different halide activators in the packs for enhancing the high temperature oxidation resistance of Ti-Al alloy. The structure, constituent phases, formation process and oxidation behavior of the coatings were investigated. The experimental results showed that the coatings prepared respectively with NaF and NH_4Cl as activators were composed of a（Ti, X）_5Si_4,（Ti, X）_5Si_3（X represents Nb and Cr）, and TiSi_2 outer layer, a TiAl_2 inner layer and an Al-rich interdiffusion zone. However, the constituent phases changed into TiSi_2 in the outer layer and（Ti, X）_5Si_4 and（Ti, X）_5Si_3 phases were observed in the middle layer of the coating prepared with AlCl_3·6H_2O activator. Among the halide activators studied, the coating prepared with AlCl_3·6H_2O was thicker and denser, which is the only suitable activator for pack Si-Al-Y co-deposition coatings on a Ti-Al alloy. The oxidation results show that the coating can protect the Ti-Al alloy from oxidation at 1000 ℃ in air for at least 80 h. The excellent oxidation resistance of the coating is attributed to the formation of a dense scale mainly consisted of TiO_2, SiO_2 and Al_2O_3.

Fabrication and its characteristics of hard coating Ti-Al-N system prepared by DC magnetron sputtering

Pseudobinary Ti 1 x Al x N films were synthesized on Si (100) wafer by DC magnetron sputtering method using Ti 1 x Al x alloy targets with different Al contents. The composition of the Ti 1 x Al x N films was determined by electron probe microanalysis (EPMA). Structural characteristic was performed by X-ray diffraction (XRD), transmission electron microscopy (TEM), and high-resolution TEM (HRTEM). First principles virtual crystal calculations for the Ti 1 x Al x N disordered alloys were used for the XRD simulations. The crystalline structure of the Ti 0.61 Al 0.39 N film was found to be a metastable single phase with NaCl (B1) structure. Its lattice constant, determined by XRD, was less than that of pure TiN. With the increase of Al content, the lattice constant of B1 phase was continually decreased, while würtzite (B4) structure was observed in the Ti 0.40 Al 0.60 N film. When x reached 0.75, the B1 phase disappeared, and only B4 phase was remained. The critical Al content for the phase transition from NaCl to würtzite structure in this paper was about 0.60, which could be explained by both the thermodynamic model and the electron theory. As-deposited Ti 1 x Al x N films exhibited excellent mechanical properties. Hardness measurements of Ti 1 x Al x N films showed a high value of 45GPa for x=0.39 and was decreased to value of 27 GPa with increasing Al at x=0.60.

Microstructure and physical properties of PVD TiN/(Ti, Al)N multilayer coatings

Magnetron sputtered (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings grown on cemented carbide substrates were studied by using energy dispersive X-ray spectroscopy (EDX), scanning electron microscopy(SEM), nanoindentation, Rockwell A indentation test, strength measurements and cutting tests. The results show that the (Ti, Al)N monolayer and TiN/(Ti, Al)N multilayer coatings perform good affinity to substrate, and the TiN/(Ti, Al)N multilayer coating exhibits higher hardness, higher toughness and better cutting performance compared with the (Ti, Al)N monolayer coating. Moreover, the strength measurement indicates that the physical vapour deposition (PVD) coating has no effect on the substrate strength.

Effect of Sputtered TiAlCr Coatings on Oxidation and Hot Corrosion Resistance of Ti-24Al-14Nb-3V

The effect of sputtered Ti-50Al-10Cr and Ti-50A1-20Cr coatings on both isothermal and cyclic oxidation resistance at 800-900℃ and hot corrosion resistance at 850℃ of Ti-24Al-14Nb-3V was investigated. Results indicated that Ti-24Al-14Nb-3V alloys exhibited poor oxidation resistance due to the formation of Al2O3+TiO2+AlNbO4 mixed scales in air at 800-900℃ and poor hot corrosion resistance due to the spoliation of scales formed in Na2SO4+K2SO4 melts at 850℃. Both Ti-50Al-10Cr and Ti-50Al-20Cr coatings remarkably improved the oxidation and hot corrosion resistance of Ti-24Al-14Nb-3V alloy.

CHEMICAL COMPOSITION AND MICROSTRUCTURE OF Ti(C,-N)-TiN COATING

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Preparation of Hydroxyapatite-titanium Dioxide Coating on Ti6Al4V Substrates using Hydrothermal-electrochemical Method

Ti6Al4V substrates were anodized in a 0.5 mol/L H_2SO_4 solution at applied voltages of 90-140 V.A hydroxyapatite-titanium oxide（HA-TiO2）coating was then deposited on the anodized Ti6Al4 V substrates via a hydrothermal-electrochemicalmethod at a constant current.The obtained films and coatings were characterized by X-ray diffraction,scanning electron microscopy,energy-dispersive X-ray spectroscopy,and Fourier-transform infrared spectrometry.The microstructures of the porous films on the Ti6Al4 V substrates were studied to investigate the effect of the anodizing voltage on the phase and morphology of the HATiO_2 coating.The results indicated that both the phase composition and the morphology of the coatings were significantly influenced by changes in the anodizing voltage.HA-TiO_2 was directly precipitated onto the surface of the substrate when the applied voltage was between 110 and 140 V.The coatings had a gradient structure and the HA exhibited both needle-like and cotton-like structures.The amount of cotton-like HA structures decreased with an increase in voltage from 90 to 120 V,and then increased slightly when the voltage was higher than 120 V.The orientation index of the（002）plane of the coating was at a minimum when the Ti6Al4 V substrate was pretreated at 120 V.