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Correlating the Interfacial Polar-Phase Structure to the Local Chemistry in Ferroelectric Polymer Nanocomposites by Combined Scanning Probe Microscopy
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作者 Jiajie Liang Shaojie Wang +4 位作者 Zhen Luo Jing Fu Jun Hu Jinliang He Qi Li 《Nano-Micro Letters》 SCIE EI CAS CSCD 2023年第1期80-93,共14页
Ferroelectric polymer nanocomposites possess exceptional electric properties with respect to the two otherwise uniform phases,which is commonly attributed to the critical role of the matrix-particle interfacial region... Ferroelectric polymer nanocomposites possess exceptional electric properties with respect to the two otherwise uniform phases,which is commonly attributed to the critical role of the matrix-particle interfacial region.However,the structure-property correlation of the interface remains unestablished,and thus,the design of ferroelectric polymer nanocompos-ite has largely relied on the trial-and-error method.Here,a strategy that combines multi-mode scanning probe microscopy-based electrical charac-terization and nano-infrared spectroscopy is developed to unveil the local structure-property correlation of the interface in ferroelectric polymer nano-composites.The results show that the type of surface modifiers decorated on the nanoparticles can significantly influence the local polar-phase content and the piezoelectric effect of the polymer matrix surrounding the nano-particles.The strongly coupled polar-phase content and piezoelectric effect measured directly in the interfacial region as well as the computed bonding energy suggest that the property enhancement originates from the formation of hydrogen bond between the surface modifiers and the ferroelectric polymer.It is also directly detected that the local domain size of the ferroelectric polymer can impact the energy level and distribution of charge traps in the interfacial region and eventually influence the local dielectric strength. 展开更多
关键词 INTERFACES Ferroelectric polymers NANOCOMPOSITES scanning probe microscopy Nano-infrared spectroscopy
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扫描探针显微术SPM标准化现状研究
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作者 蔡潇雨 吴俊杰 魏佳斯 《实验与分析》 2024年第2期18-24,共7页
本文结合扫描探针显微术(Scanning Probe Microscopy,SPM)的专业性与多样性和标准化工作的要求,初步构建了符合领域发展的三维架构的SPM标准体系。接着,研究了SPM通用基础、关键部件/产品与应用检测方面的相关国家标准技术内容,说明当前... 本文结合扫描探针显微术(Scanning Probe Microscopy,SPM)的专业性与多样性和标准化工作的要求,初步构建了符合领域发展的三维架构的SPM标准体系。接着,研究了SPM通用基础、关键部件/产品与应用检测方面的相关国家标准技术内容,说明当前SPM标准化与标准体系的建设情况。最后,在当前技术与产业状态下,提出以实现量值统一、接口兼容、质量可评价、结果可比较为目标,宜重点开展SPM性能指标检验标准、SPM成像质量的调整与评价方法标准、共性的SPM应用标准或指南标准等三方面的工作,完善我国SPM标准体系。 展开更多
关键词 扫描探针显微术 标准化 标准体系 基础标准 产品标准
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Multi-objective Optimal Design of High Frequency Probe for Scanning Ion Conductance Microscopy 被引量:2
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作者 GUO Renfei ZHUANG Jian +2 位作者 MA Li LI Fei YU Dehong 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2016年第1期195-203,共9页
Scanning ion conductance microscopy(SICM) is an emerging non-destructive surface topography characterization apparatus with nanoscale resolution. However, the low regulating frequency of probe in most existing modul... Scanning ion conductance microscopy(SICM) is an emerging non-destructive surface topography characterization apparatus with nanoscale resolution. However, the low regulating frequency of probe in most existing modulated current based SICM systems increases the system noise, and has difficulty in imaging sample surface with steep height changes. In order to enable SICM to have the capability of imaging surfaces with steep height changes, a novel probe that can be used in the modulated current based bopping mode is designed. The design relies on two piezoelectric ceramics with different travels to separate position adjustment and probe frequency regulation in the Z direction. To fiarther improve the resonant frequency of the probe, the material and the key dimensions for each component of the probe are optimized based on the multi-objective optimization method and the finite element analysis. The optimal design has a resonant frequency of above 10 kHz. To validate the rationality of the designed probe, microstructured grating samples are imaged using the homebuilt modulated current based SICM system. The experimental results indicate that the designed high frequency probe can effectively reduce the spike noise by 26% in the average number of spike noise. The proposed design provides a feasible solution for improving the imaging quality of the existing SICM systems which normally use ordinary probes with relatively low regulating frequency. 展开更多
关键词 scanning ion conductance microscopy(SICM) multi-objective optimization high frequency probe finite element analysis imaging quality
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Real-space observation on standing configurations of phenylacetylene on Cu(111) by scanning probe microscopy
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作者 戚竞 高艺璇 +4 位作者 黄立 林晓 董佳家 杜世萱 高鸿钧 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第6期338-342,共5页
The adsorption configurations of molecules adsorbed on substrates can significantly affect their physical and chemical properties. A standing configuration can be difficult to determine by traditional techniques, such... The adsorption configurations of molecules adsorbed on substrates can significantly affect their physical and chemical properties. A standing configuration can be difficult to determine by traditional techniques, such as scanning tunneling microscopy(STM) due to the superposition of electronic states. In this paper, we report the real-space observation of the standing adsorption configuration of phenylacetylene on Cu(111) by non-contact atomic force microscopy(nc-AFM).Deposition of phenylacetylene at 25 K shows featureless bright spots in STM images. Using nc-AFM, the line features representing the C–H and C–C bonds in benzene rings are evident, which implies a standing adsorption configuration. Further density functional theory(DFT) calculations reveal multiple optimized adsorption configurations with phenylacetylene breaking its acetylenic bond and forming C–Cu bond(s) with the underlying copper atoms, and hence stand on the substrate.By comparing the nc-AFM simulations with the experimental observation, we identify the standing adsorption configuration of phenylacetylene on Cu(111). Our work demonstrates an application of combining nc-AFM measurements and DFT calculations to the study of standing molecules on substrates, which enriches our knowledge of the adsorption behaviors of small molecules on solid surfaces at low temperatures. 展开更多
关键词 PHENYLACETYLENE adsorption configuration scanning probe microscopy density functional theory
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Combination of Instrumented Nanoindentation and Scanning Probe Microscopy for Adequate Mechanical Surface Testing
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作者 Enrico Tam Mikhail Petrzhik +1 位作者 Dmitry Shtansky Marie-Paule Delplancke-Ogletree 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2009年第1期63-68,共6页
The elastic indentation modulus and hardness of standard bulk materials and advanced thin films were determined by using the nanoindentation technique followed by the Oliver- Pharr post-treatment. After measurements w... The elastic indentation modulus and hardness of standard bulk materials and advanced thin films were determined by using the nanoindentation technique followed by the Oliver- Pharr post-treatment. After measurements with different loading/unloading schemes on chemically polished bulk titanium a substantial decrease of both modulus and hardness vs an increasing loading time was found. Then, hard nanostructured TiBN and TiCrBN thin films deposited by magnetron sputtering (using multiphase targets) on substrates of high roughness (sintered hard metal) and low roughness (silicon) were studied. Experimental modulus and hardness characterized by using two different nanoindenter tools were within the limits of standard deviation. However, a strong effect of roughness on the spread of the experimental values was observed and it was found that hardness and elastic indentation modulus obeyed a Gaussian distribution. The experimental data were discussed together with scanning probe microscopy (SPM) images of typical imprints taken after the nanoindentation tests and the local topographyls strong correlation with the results of nanoindentation was described. 展开更多
关键词 NANOINDENTATION Thin films COATINGS scanning probe microscopy
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Surface Properties of Cement Paste Evaluated by Scanning Probe Microscopy
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作者 Yuya Sakai 《Open Journal of Civil Engineering》 2016年第4期643-652,共10页
The microscopic physical properties of Hardened Cement Paste (HCP) surfaces were evaluated by using Scanning Probe Microscopy (SPM). The cement pastes were cured under a hydrostatic pressure of 400 MPa and the contact... The microscopic physical properties of Hardened Cement Paste (HCP) surfaces were evaluated by using Scanning Probe Microscopy (SPM). The cement pastes were cured under a hydrostatic pressure of 400 MPa and the contacting surfaces with a slide glass during the curing were studied. Scanning Electron Microscope (SEM) observation at a magnification of 7000 revealed smooth surfaces with no holes. The surface roughness calculated from the SPM measurement was 4 nm. The surface potential and the frictional force measured by SPM were uniform throughout the measured area 24 h after the curing. However, spots of low surface potential and stains of low frictional force and low viscoelasticity were observed one month after curing. This change was attributed to the carbonation of hydrates. 展开更多
关键词 Cement Paste scanning probe microscopy Surface Potential Frictional Resistance VISCOELASTICITY
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Effect of SPM Scanning Range on the Micromorphology Parameters
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作者 Libing Liao Suozai Li (School of materials Science and engineering, China University of Geosciences, Beijing 100083, China) 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 1998年第1期36-38,共3页
The surface of a compact disk is analyzed by using SPM and the quantitative micromorphology analysissoftware SPMIAS developed by the author. Images at the same position but with different scanning ranges areobtained ... The surface of a compact disk is analyzed by using SPM and the quantitative micromorphology analysissoftware SPMIAS developed by the author. Images at the same position but with different scanning ranges areobtained under the same experimental conditions. Micromorphology parameters are calculated and compared, andthe relationship between the changing of the scanning range and the changing of micromorphology parameters issummarized. 展开更多
关键词 scanning probe Microscope(spm) MICROMORPHOLOGY micromorphology parameters
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A First Principles Simulation Framework for the Interactions between a Si(001) Surface and a Scanning Probe
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作者 Dung Q. Ly Charalampos Makatsoris 《Journal of Surface Engineered Materials and Advanced Technology》 2012年第3期194-202,共9页
By means of total energy calculations within the framework of the local density approximation (LDA), the interactions between a silicon Si(001) surface and a scanning probe are investigated. The tip of the probe, comp... By means of total energy calculations within the framework of the local density approximation (LDA), the interactions between a silicon Si(001) surface and a scanning probe are investigated. The tip of the probe, comprising 4 Si atoms scans along the dimer lines above an asymmetric p(2 × 1) surface, at a distance where the chemical interaction between tip-surface is dominant and responsible for image resolution. At that distance, the tip causes the dimer to toggle when it scans above the lower atom of a dimer. The toggled dimers create an alternating pattern, where the immediately adjacent neighbours of a toggled dimer remain unchanged. After the tip has fully scanned across the p(2 × 1) surface, causes the dimers to arrange in a p(2 × 2) reconstruction, reproducing the images obtained in scanning probe experiments. Our modelling methodology includes simulations that reveal the energy input required to overcome the barrier to the onset of dimer toggling. The results show that the energy input to overcome this barrier is lower for the p(2 × 1) surface than that for the p(2 × 2) or c(4 × 2) surfaces. 展开更多
关键词 DFT Si(001)-p(2 × 1) p(2 × 2) c(4 × 2) scanning probe microscopy Phase TRANSITIONS DIMER Toggling
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EXPERIMENTAL RESEARCH OF NANO-CUTTING BY USING SCANNING PROBE MICROCOPE
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作者 Fu Huinan (Institute of Manufacturing Technology,Guangdong University of Technology) Xu Xipeng (Huaqiao University) 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2001年第4期297-299,304,共4页
An experimental study on cutting amorphous alloy at nanometer scale is conducted by applying the principle and technology of scanning probe microscope(SPM) It is revealed from the experiments that cutting inside SPM... An experimental study on cutting amorphous alloy at nanometer scale is conducted by applying the principle and technology of scanning probe microscope(SPM) It is revealed from the experiments that cutting inside SPM is an excellent and direct way to research the material removal process at small size Based on the experimental results,the chip formation mechanism for the cutting of amorphous alloy is discussed It is found that the deformation along the direction of chip flow occurs ahead of the appearance of localized shear,and a simplified geometrical model is proposed to illustrate the deformation. 展开更多
关键词 scanning probe microscope(spm) Nanotechnology Cutting mechanism
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Influence of the probe-sample interaction on scanning near-field optical microscopic images in the far field
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作者 李智 张家森 +1 位作者 杨景 龚旗煌 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第11期2558-2563,共6页
We have studied the influence of probe-sample interaction in a scanning near-field optical microscopy (SNOM) in the far field by using samples with a step structure. For a sample with a step height of - λ/4, the SN... We have studied the influence of probe-sample interaction in a scanning near-field optical microscopy (SNOM) in the far field by using samples with a step structure. For a sample with a step height of - λ/4, the SNOM image contrast between the two sides of the step changes periodically at different scan heights. For a step height of-λ/2, the image contrast remains approximately the same. The probe-sample interaction determines the SNOM image contrast here. The influence of different refractive indices of the sample has been also analysed by using a simple theoretical model. 展开更多
关键词 SNOM probe-sample interaction near-field scanning optical microscopy
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Accelerating the Feedback Loop in Scanning Probe Microscopes without Loss of Height Measurement Accuracy by Using Pixel Forecast Methods
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作者 Robert Kö hn +1 位作者 Boris Braun Kai-Felix Braun 《Journal of Applied Mathematics and Physics》 2022年第4期1325-1334,共10页
Scanning probe microscopes (SPM) are limited in their speed of data acquisition by the mechanical stability of the scanner. Therefore many types of scanners have been developed to achieve a rigid setup while maintaini... Scanning probe microscopes (SPM) are limited in their speed of data acquisition by the mechanical stability of the scanner. Therefore many types of scanners have been developed to achieve a rigid setup while maintaining an acceptable image size. We have followed here a different path to accelerate data acquisition by improving the feedback loop to achieve the same SPM image quality in a shorter time. While the feedback loop in a scanning probe microscope typically starts to probe a new pixel starting from the previous position, we have reduced the total control time by using an improved starting point for the feedback loop at each pixel. By exploiting the information of the already scanned pixels a forecast for the new pixel is created. We have successfully used several simple methods for a prognosis in MATLAB simulations like one dimensional linear or cubic extrapolation and others. Only scanning tunnelling microscope data from real experiments were used to test the forecasts. A doubling of the speed was achieved in the most favourable cases. 展开更多
关键词 scanning probe microscopy Feedback Loop Controller Simulation
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基于扫描探针显微镜(SPM)的高密度信息存储 被引量:3
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作者 姜桂元 元文芳 +2 位作者 温永强 高鸿钧 宋延林 《化学进展》 SCIE CAS CSCD 北大核心 2007年第6期1034-1040,共7页
随着信息技术的飞速发展,高密度信息存储的研究成为国际上备受关注的研究领域。扫描探针显微技术(SPM)通过改变材料的光、电、磁等局域特性可以实现纳米尺度的信息存储,成为提高信息存储密度的最有效手段之一。本文从信息存储材料和技... 随着信息技术的飞速发展,高密度信息存储的研究成为国际上备受关注的研究领域。扫描探针显微技术(SPM)通过改变材料的光、电、磁等局域特性可以实现纳米尺度的信息存储,成为提高信息存储密度的最有效手段之一。本文从信息存储材料和技术角度综述了基于SPM的高密度信息存储最近的研究进展,并讨论了其将来的研究与发展方向。 展开更多
关键词 高密度信息存储 扫描探针显微镜 存储材料
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AlSc15中间合金中Al_(3)Sc金属间化合物的电化学行为及对局部腐蚀的影响
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作者 蒋伟 高坤元 +6 位作者 胡秀华 文胜平 黄晖 吴晓蓝 魏午 聂祚仁 启世亮 《轻合金加工技术》 CAS 2024年第2期54-58,共5页
将过共晶AlSc15合金加热至液态,以10℃/h速率冷却得到毫米级尺寸的Al_(3)Sc金属间化合物。利用微区电化学和扫描开尔文探针力显微镜(SKPFM)研究了Al_(3)Sc金属间化合物在不同pH值的0.1 mol/L NaCl溶液中的电化学特征及对局部腐蚀敏感性... 将过共晶AlSc15合金加热至液态,以10℃/h速率冷却得到毫米级尺寸的Al_(3)Sc金属间化合物。利用微区电化学和扫描开尔文探针力显微镜(SKPFM)研究了Al_(3)Sc金属间化合物在不同pH值的0.1 mol/L NaCl溶液中的电化学特征及对局部腐蚀敏感性的影响。结果表明,Al_(3)Sc金属间化合物存在自钝化现象,且在碱性环境中有明显的维钝区域;随着pH值的增加,Al_(3)Sc腐蚀电位逐渐降低,在中性和碱性条件下的腐蚀速率明显低于酸性条件下的;Al_(3)Sc金属间化合物与周围铝基体之间的伏打电位差约为40 mV,在铝合金中可能作为较弱的局部阴极,对电偶腐蚀的影响不大。 展开更多
关键词 Al_(3)Sc金属间化合物 微电化学技术 扫描开尔文 局部腐蚀
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基于DSP的SPM反馈控制器设计 被引量:1
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作者 丁喜冬 冯天恩 张进修 《计算机工程》 CAS CSCD 北大核心 2007年第3期275-277,共3页
反馈是扫描探针显微镜控制的核心技术,但目前SPM通常使用基于模拟电路的反馈,因而基于数字信号处理器的数字反馈控制器具有较高的实用价值。该文设计了一种基于DSP的SPM数字反馈控制器,并介绍了其软硬件的设计及算法的改进。测试表明,... 反馈是扫描探针显微镜控制的核心技术,但目前SPM通常使用基于模拟电路的反馈,因而基于数字信号处理器的数字反馈控制器具有较高的实用价值。该文设计了一种基于DSP的SPM数字反馈控制器,并介绍了其软硬件的设计及算法的改进。测试表明,该反馈控制器功能正常,稳定性和灵活性比模拟反馈控制器有较大的提高。 展开更多
关键词 扫描探针显微镜 反馈 控制器 数字信号处理
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SPM用于超精加工领域的重要性及特殊性 被引量:1
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作者 赵清亮 李旦 董申 《制造技术与机床》 CSCD 北大核心 1999年第8期8-10,19,共4页
讨论了扫描探针显微镜( S P M) 作为一种显微工具的优势和不足。介绍了把 S P M 应用于超精密加工检测领域所要注意的问题,指出纳米级加工机理的研究将依赖于 S P M 的复合化及多功能化,只有实现了加工与检测的一体化才能... 讨论了扫描探针显微镜( S P M) 作为一种显微工具的优势和不足。介绍了把 S P M 应用于超精密加工检测领域所要注意的问题,指出纳米级加工机理的研究将依赖于 S P M 的复合化及多功能化,只有实现了加工与检测的一体化才能正确评价加工方法及工艺参数的优化选择。 展开更多
关键词 扫描隧道显微镜 超精加工 检测
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基于SPM技术的纳米信息存储薄膜的研究进展 被引量:1
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作者 王志 巴德纯 蔺增 《真空》 CAS 北大核心 2003年第2期7-10,共4页
扫描探针显微技术SPM可以在原子或分子尺度上对表面进行表征和修饰,应用SPM技术可以在薄膜表面形成纳米级的信息点阵,特别适合发展超高密度的信息存储,是一种非常有希望代替传统磁存储、光存储的纳米级存储技术。本文介绍了纳米信息存... 扫描探针显微技术SPM可以在原子或分子尺度上对表面进行表征和修饰,应用SPM技术可以在薄膜表面形成纳米级的信息点阵,特别适合发展超高密度的信息存储,是一种非常有希望代替传统磁存储、光存储的纳米级存储技术。本文介绍了纳米信息存储薄膜的研究进展,并对其制备技术和读写机制进行了初步的探讨。 展开更多
关键词 扫描探针显微技术 纳米信息存储 薄膜
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振动与扫描速率综合影响SPM图像的实验研究
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作者 陈津平 胡晓东 +2 位作者 陈峰 郭彤 胡小唐 《电子显微学报》 CAS CSCD 北大核心 2003年第3期242-246,共5页
探讨了外界激振对扫描探针显微镜 (SPM)图像的影响。针对DI扫描探针显微镜MultiModeTM SPM ,以Tektronix任意波形发生器AWG2 0 2 1驱动PC扬声器作为激振源 ,以SIOS微型激光干涉测振仪SP S为测振系统 ,研究了 0~ 7kHz频带内SPM机体的简... 探讨了外界激振对扫描探针显微镜 (SPM)图像的影响。针对DI扫描探针显微镜MultiModeTM SPM ,以Tektronix任意波形发生器AWG2 0 2 1驱动PC扬声器作为激振源 ,以SIOS微型激光干涉测振仪SP S为测振系统 ,研究了 0~ 7kHz频带内SPM机体的简谐迫振对扫描图像的影响。实验表明 ,针尖 -样品副所受激振影响不同于SPM机体 ;0~ 1kHz频带内的激振影响显著 ,再高频段则影响甚微 ;外界激振与SPM扫描的综合作用影响成像的结果 ;针尖 展开更多
关键词 扫描探针显微镜 spm图像 扫描速率 外界激振 粘弹性模型 扫描频率 固有频率 针尖-样品副
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SPM微悬臂弹性常数校准技术
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作者 闫永达 尹大勇 +2 位作者 孙涛 费维栋 董申 《微纳电子技术》 CAS 北大核心 2009年第3期174-180,185,共8页
综述了扫描探针显微镜(SPM)的微悬臂梁弹性常数Kn的校准方法,主要包括物理尺寸法、动态测量法和静态测量法。物理尺寸法计算方便,可给出任何方向、任意形状的弹性常数表达式,但测量精度不高,适用于精度要求不高的场合;动态测量方法适用... 综述了扫描探针显微镜(SPM)的微悬臂梁弹性常数Kn的校准方法,主要包括物理尺寸法、动态测量法和静态测量法。物理尺寸法计算方便,可给出任何方向、任意形状的弹性常数表达式,但测量精度不高,适用于精度要求不高的场合;动态测量方法适用于任意形状悬臂,校准过程简单快捷,不易损坏悬臂;静态测量法采用外加设备如标准悬臂或者标准加压设备,操作过程麻烦,易损坏悬臂。但动态和静态测量法的精度较高,因此适用于要求提供精确力信号的场合。目前,静态测量法中采用标准弹簧校准的测量精度可达2%~5%,校准过程方便快捷,具有一定的发展潜力。 展开更多
关键词 扫描探针显微镜 微悬臂 弹性常数 校准 动态测量 静态测量
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大气状态下SPM纳米加工系统的开发
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作者 郭彤 胡晓东 胡小唐 《中国机械工程》 EI CAS CSCD 北大核心 2003年第1期22-23,共2页
对现有的商业化 SPM进行了一些必要的改造 ,使其适合于扫描探针加工的要求。讨论了在 DI公司多功能 SPM基础上开发纳米加工系统的可能性 ,并提供了一套完整的信号施加、过程监测和环境控制的方法 ,实现了矢量式的纳米氧化加工 ,得到了 3... 对现有的商业化 SPM进行了一些必要的改造 ,使其适合于扫描探针加工的要求。讨论了在 DI公司多功能 SPM基础上开发纳米加工系统的可能性 ,并提供了一套完整的信号施加、过程监测和环境控制的方法 ,实现了矢量式的纳米氧化加工 ,得到了 30 nm宽的氧化结构 。 展开更多
关键词 扫描探针显微镜 纳米加工 矢量式 环境控制
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SPM抑振系数的理论与实验研究
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作者 陈津平 胡小唐 +1 位作者 胡晓东 郭彤 《纳米技术与精密工程》 EI CAS CSCD 2006年第4期256-260,共5页
为分析外界振动对扫描探针显微镜(SPM)针尖-样品副的影响,提出“抑振系数”的概念.围绕SPM针尖-样品副的动态力学模型,对抑振系数的物理含义、影响因素等进行了理论分析.搭建了SPM激振、测振的实验系统,对不同的SPM扫描器、探针、样品... 为分析外界振动对扫描探针显微镜(SPM)针尖-样品副的影响,提出“抑振系数”的概念.围绕SPM针尖-样品副的动态力学模型,对抑振系数的物理含义、影响因素等进行了理论分析.搭建了SPM激振、测振的实验系统,对不同的SPM扫描器、探针、样品、针尖预应力以及针尖-样品副开/闭环对SPM抑振系数的影响进行了实验研究.在理论分析上和实验研究中,都证实SPM抑振系数与悬臂梁的有效质量、弹性系数、空气阻尼系数、针尖与样品的接触弹性系数和接触阻尼系数等相关,反映在实际SPM部件参数上,则较短的扫描器、较长的悬臂探针、较软的样品表面、较大的探针预应力、闭环控制的针尖-样品副等都是提高SPM抑振性的途经. 展开更多
关键词 振动 扫描探针显微镜 针尖-样品副 抑振系数 悬臂梁
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