ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central...ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central points are determined automatically according to their distribution rules. However, for the measurement of their phases, fringes should be recognized and processed with different calculating algorithms and least square optimization methods depending on the scanning modulation mode. When this technique is used for measurement of surface roughness, the measurement uncertainty is better than 5nm and the repeatability is less than 5%.展开更多
A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performa...A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems.展开更多
Multiple-beam fringes of equal chromatic order interferometry is a powerful technique to extract optical properties over a continuous range of spectrum. In this paper we develop a theory for the spectral shape of the ...Multiple-beam fringes of equal chromatic order interferometry is a powerful technique to extract optical properties over a continuous range of spectrum. In this paper we develop a theory for the spectral shape of the fringes of equal chromatic order (FECO) that are formed across a double-clad fiber. The modified single term Sellmeier dispersion formula is used to construct the refractive index dispersion curves for the liquid, claddings, and core. Expressions for the paraxial optical path length for several rays passing through the fiber and the liquid are developed. The condition of bright fringe is applied to get an analytical expression for the spectral shape of the FECO across a double-clad fiber with an elliptical/circular inner cladding. A potential application of this theory is to determine the dispersion of Kerr constant of the claddings and the core of the fiber. To illustrate the theory and its application, simulation examples are provided and discussed.展开更多
长波红外差分干涉仪在低温工况下会因光学元件受到非均匀应力作用产生干涉条纹的畸变,从而降低干涉仪系统性能。本文为解决低温工况干涉条纹弯曲畸变问题,基于长波红外差分干涉仪光机系统进行了干涉条纹畸变影响因素分析,结合光-机-热...长波红外差分干涉仪在低温工况下会因光学元件受到非均匀应力作用产生干涉条纹的畸变,从而降低干涉仪系统性能。本文为解决低温工况干涉条纹弯曲畸变问题,基于长波红外差分干涉仪光机系统进行了干涉条纹畸变影响因素分析,结合光-机-热耦合分析方法,对干涉仪系统低温工作状态进行仿真。随后设计了针对影响条纹畸变的关键元件——光栅元件的低温微应力动态稳定支撑安装结构,结构优化后的光栅表面面形均方根(Root Mean Square,RMS)值为3.89×10^(-2) nm,面形峰谷值(Peak to Valley,PV)值为2.21×10^(-1) nm,分别较优化前初始系统的分析结果减小了5个数量级,系统仿真干涉条纹畸变小于1个探测器像元。全系统低温验证试验表明,优化结构可有效抑制干涉条纹畸变,畸变量小于2个探测器像元,试验与仿真计算结果一致性较好,验证了优化分析方法的有效性。该优化方案对提升反射式光学系统结构低温稳定性,提高系统工作能力有较大意义和价值。展开更多
文摘ion technique of interference fringes used in phase modulation and phase scanning modulation interferometer is presented. For the measurement of amplitudes of interference fringes, fringes are fitted and their central points are determined automatically according to their distribution rules. However, for the measurement of their phases, fringes should be recognized and processed with different calculating algorithms and least square optimization methods depending on the scanning modulation mode. When this technique is used for measurement of surface roughness, the measurement uncertainty is better than 5nm and the repeatability is less than 5%.
基金Sponsored by the National Natural Science Foundation of China(Grant No.52175491).
文摘A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems.
文摘Multiple-beam fringes of equal chromatic order interferometry is a powerful technique to extract optical properties over a continuous range of spectrum. In this paper we develop a theory for the spectral shape of the fringes of equal chromatic order (FECO) that are formed across a double-clad fiber. The modified single term Sellmeier dispersion formula is used to construct the refractive index dispersion curves for the liquid, claddings, and core. Expressions for the paraxial optical path length for several rays passing through the fiber and the liquid are developed. The condition of bright fringe is applied to get an analytical expression for the spectral shape of the FECO across a double-clad fiber with an elliptical/circular inner cladding. A potential application of this theory is to determine the dispersion of Kerr constant of the claddings and the core of the fiber. To illustrate the theory and its application, simulation examples are provided and discussed.
文摘长波红外差分干涉仪在低温工况下会因光学元件受到非均匀应力作用产生干涉条纹的畸变,从而降低干涉仪系统性能。本文为解决低温工况干涉条纹弯曲畸变问题,基于长波红外差分干涉仪光机系统进行了干涉条纹畸变影响因素分析,结合光-机-热耦合分析方法,对干涉仪系统低温工作状态进行仿真。随后设计了针对影响条纹畸变的关键元件——光栅元件的低温微应力动态稳定支撑安装结构,结构优化后的光栅表面面形均方根(Root Mean Square,RMS)值为3.89×10^(-2) nm,面形峰谷值(Peak to Valley,PV)值为2.21×10^(-1) nm,分别较优化前初始系统的分析结果减小了5个数量级,系统仿真干涉条纹畸变小于1个探测器像元。全系统低温验证试验表明,优化结构可有效抑制干涉条纹畸变,畸变量小于2个探测器像元,试验与仿真计算结果一致性较好,验证了优化分析方法的有效性。该优化方案对提升反射式光学系统结构低温稳定性,提高系统工作能力有较大意义和价值。
