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Electrical and deep levels characteristics of ZnO/Si heterostructure by MOCVD deposition 被引量:5
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作者 刘磁辉 刘秉策 付竹西 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第6期2292-2296,共5页
ZnO films have been prepared on p-type Si substrates by metal-organic chemical vapour deposition (MOCVD) at different total gas flow rates. The current versus voltage and temperature (I - V - T) characteristics, t... ZnO films have been prepared on p-type Si substrates by metal-organic chemical vapour deposition (MOCVD) at different total gas flow rates. The current versus voltage and temperature (I - V - T) characteristics, the deep-level transient spectroscopy (DLTS) and the photoluminescence (PL) spectra of the samples were measured. DLTS shows two deep-level centres of E1 (Ec-0.13±0.02eV) and E2 (Ec-0.43±0.05eV) in sample 1202a, which has a ZnO/p-Si heterostructure. A deep level at Ec-0.13±0.01 eV was also obtained from the I -T characteristics. It was considered to be the same as E1 obtained from DLTS measurement. The emission related to this deep level center was detected by PL spectra. In addition, the energy location and the relative trap density of E1 was varied when the total gas flow rate was changed. 展开更多
关键词 MOCVD ZnO/si heterostructure PL spectra deep-level emission
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Resistive Switching Behavior of Ag/Mg0.2Zn0.8O/ZnMn2O4/p^+-Si Heterostructure Devices for Nonvolatile Memory Applications 被引量:1
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作者 韦长成 王华 +3 位作者 XU Jiwen ZHANG Yupei ZHANG Xiaowen YANG Ling 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第1期29-32,共4页
The Ag/Mg0.2Zn0.8O/ZnMn2O4/p^+-Si heterostructure devices were fabricated by sol-gel spin coating technique and the resistive switching behavior,conduction mechanism,endurance characteristic,and retention properties ... The Ag/Mg0.2Zn0.8O/ZnMn2O4/p^+-Si heterostructure devices were fabricated by sol-gel spin coating technique and the resistive switching behavior,conduction mechanism,endurance characteristic,and retention properties were investigated.A distinct bipolar resistive switching behavior of the devices was observed at room temperature.The resistance ratio R_(HRS)/RLRS of high resistance state and low resistance state is as large as four orders of magnitude with a readout voltage of 2.0 V.The dominant conduction mechanism of the device is trap-controlled space charge limited current(SCLC).The devices exhibit good durability under 1×10^3cycles and the degradation is invisible for more than 10^6 s. 展开更多
关键词 heterostructure Ag/Mg0.2Zn0.8O/ZnMn2O4/p^+-si DEVICES resistive switching properties
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Rectifying and photovoltaic properties of ZnCo_2O_4/Si heterostructure grown by pulsed laser deposition
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作者 陈钊 温晓莉 +4 位作者 牛利伟 段萌萌 张云捷 董祥雷 陈长乐 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第5期465-469,共5页
ZnCo2O4/Si heterostructures have been fabricated by a pulsed laser deposition method, and their transport behaviors and photovoltaic properties have been characterized. The ZnCo2O4/Si heterostructures show a good rect... ZnCo2O4/Si heterostructures have been fabricated by a pulsed laser deposition method, and their transport behaviors and photovoltaic properties have been characterized. The ZnCo2O4/Si heterostructures show a good rectifying behavior at five different temperatures ranging from 50 K to 290 K. The measurements of the photovoltaic response reveals that a photovoltage of 33 mV is generated when the heterostructures are illuminated by a 532 nm laser of 250 mW/cm^2 and mechanically chopped at 2500 Hz. Both the photocurrent and the photovoltage clearly increase with the increase of the laser intensity at room temperature. However, the heterostructures' photovoltage peak decreases with the increase of the temperature. This work may open new perspectives for ZnCo2O4/Si heterostructure-based devices. 展开更多
关键词 ZnCo204/si heterostructure rectifying behavior photovoltaic properties pusled laser deposition
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Si and Mg pair-doped interlayers for improving performance of AlGaN/GaN heterostructure field effect transistors grown on Si substrate
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作者 倪毅强 贺致远 +8 位作者 姚尧 杨帆 周德秋 周桂林 沈震 钟健 郑越 张佰君 刘扬 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第5期529-534,共6页
We report a novel structure of A1GaN/GaN heterostructure field effect transistors (HFETs) with a Si and Mg pair- doped interlayer grown on Si substrate. By optimizing the doping concentrations of the pair-doped inte... We report a novel structure of A1GaN/GaN heterostructure field effect transistors (HFETs) with a Si and Mg pair- doped interlayer grown on Si substrate. By optimizing the doping concentrations of the pair-doped interlayers, the mobility of 2DEG increases by twice for the conventional structure under 5 K due to the improved crystalline quality of the conduction channel. The proposed HFET shows a four orders lower off-state leakage current, resulting in a much higher on/off ratio ( - 10^9). Further temperature-dependent performance of Schottky diodes revealed that the inhibition of shallow surface traps in proposed HFETs should be the main reason for the suppression of leakage current. 展开更多
关键词 heterostructure field effect transistor (HFET) GaN on si INTERLAYERS high on/off ratio
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Current transport in ZnO/Si heterostructure grown by laser molecular beam epitaxy
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作者 滕晓云 吴艳华 +2 位作者 于威 高卫 傅广生 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第9期440-444,共5页
The n-ZnO/p-Si heterojunction was fabricated by depositing high quality single crystalline aluminium-doped n-type ZnO film on p-type Si using the laser molecular beam epitaxy technique. The heterojunction exhibited a ... The n-ZnO/p-Si heterojunction was fabricated by depositing high quality single crystalline aluminium-doped n-type ZnO film on p-type Si using the laser molecular beam epitaxy technique. The heterojunction exhibited a good rectifying behavior. The electrical properties of the heterojunction were investigated by means of temperature dependence current density-voltage measurements. The mechanism of the current transport was proposed based on the band structure of the heterojunction. When the applied bias V is lower than 0.15 V, the current follows the Ohmic behavior. When 0.15 V ~ V 〈 0.6 V, the transport property is dominated by diffusion or recombination in the junction space charge region, while at higher voltages (V 〉 0.6 V), the space charge limited effect becomes the main transport mechanism. The current-voltage characteristic under illumination was also investigated. The photovoltage and the short circuit current density of the heterojunction aproached 270 mV and 2.10 mA/cm^2, respectively. 展开更多
关键词 ZnO/si heterostructure current transport laser molecular beam epitaxy
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High Hole Mobility Si/Si_(l-x)Ge_(x)/Si Heterostructure
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作者 JIANG Ruolian LIU Jianlin +3 位作者 ZHENG Youdou ZHENG Guozhen WEI Yayi SHEN Xuechu 《Chinese Physics Letters》 SCIE CAS CSCD 1994年第2期116-118,共3页
High mobility Si/Si_(l-x)Ge_(x)/Si p-type modulation-doped double heterostructures have been grown by RRH/VLP-CVD(rapid radiant heating/very low pressure-CVD).Hole Hall mobilities as high as about 300cm^(2)/V.s(293 K)... High mobility Si/Si_(l-x)Ge_(x)/Si p-type modulation-doped double heterostructures have been grown by RRH/VLP-CVD(rapid radiant heating/very low pressure-CVD).Hole Hall mobilities as high as about 300cm^(2)/V.s(293 K)and 7500cm^(2)/V.s(77K)have been obtained for heterostructures with x=0.3.The variation of hole mobility with temperature and the influence of Ge fraction on hole mobility were investigated. 展开更多
关键词 si/si MOBILITY heterostructure
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Interfacial dynamics of GaP/Si(100) heterostructure grown by molecular beam epitaxy
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作者 Tieshi Wei Xuefei Li +4 位作者 Zhiyun Li Wenxian Yang Yuanyuan Wu Zhiwei Xing Shulong Lu 《Journal of Semiconductors》 EI CAS CSCD 2022年第12期32-38,共7页
The atomic structure and surface chemistry of GaP/Si(100)heterostructure with different pre-layers grown by molecu-lar beam epitaxy are studied.It is found that GaP epilayer with Ga-riched pre-layers on Si(100)substra... The atomic structure and surface chemistry of GaP/Si(100)heterostructure with different pre-layers grown by molecu-lar beam epitaxy are studied.It is found that GaP epilayer with Ga-riched pre-layers on Si(100)substrate has regular surface mor-phology and stoichiometric abrupt heterointerfaces from atomic force microscopes(AFMs)and spherical aberration-corrected transmission electron microscopes(ACTEMs).The interfacial dynamics of GaP/Si(100)heterostructure is investigated by X-ray photoelectron spectroscopy(XPS)equipped with an Ar gas cluster ion beam,indicating that Ga pre-layers can lower the inter-face formation energy and the bond that is formed is more stable.These results suggest that Ga-riched pre-layers are more con-ducive to the GaP nucleation as well as the epitaxial growth of GaP material on Si(100)substrate. 展开更多
关键词 XPS interfacial dynamics GaP/si(100)heterostructure MBE
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Research of Current Mode Atomic Force Microscopy (C-AFM) for Si/SiC Heterostructures on 6H-SiC(0001)
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作者 Song Feng Lixun Song +2 位作者 Yuan Zang Zheyan Tu Lianbi Li 《Journal of Beijing Institute of Technology》 EI CAS 2020年第2期184-189,共6页
Si/SiC heterostructures with different growth temperatures were prepared on 6 HSiC(0001)by LPCVD.Current mode atomic force microscopy and transmission electron microscopy were employed to investigate the electrical pr... Si/SiC heterostructures with different growth temperatures were prepared on 6 HSiC(0001)by LPCVD.Current mode atomic force microscopy and transmission electron microscopy were employed to investigate the electrical properties and crystalline structure of Si/SiC heterostructures.Face-centered cubic(FCC)on hexagonal close-packing(HCP)epitaxy of the Si(111)/SiC(0001)heterostructure was realized at 900°C.As the growth temperature increases to1050°C,the<110>preferred orientation of the Si film is observed.The Si films on 6 H-SiC(0001)with different growth orientations consist of different distinctive crystalline grains:quasi-spherical grains with a general size of 20μm,and columnar grains with a typical size of 7μm×20μm.The electrical properties are greatly influenced by the grain structures.The Si film with<110>orientation on SiC(0001)consists of columnar grains,which is more suitable for the fabrication of Si/SiC devices due to its low current fluctuation and relatively uniform current distribution. 展开更多
关键词 si/6H-siC heterostructure electrical properties current mode AFM chemical vapor deposition
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The property of Si/SiGe/Si heterostructure during thermal budget characterized by HRXRD
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作者 CHENChang-Chun LIUZhi-Hong +4 位作者 HUANGWen-Tao DOUWei-Zhi ZHANGWei TSIENPei-Hsin ZHUDe-Zhang 《Nuclear Science and Techniques》 SCIE CAS CSCD 2003年第4期238-241,共4页
Si/SiGe/Si heterostructures grown by ultra-high-vacuum chemical vapor deposition (UHVCVD) werecharacterized by Rutherford backscattering/Channeling (RBS/C) together with high resolution X ray diffraction(HRXRD). High ... Si/SiGe/Si heterostructures grown by ultra-high-vacuum chemical vapor deposition (UHVCVD) werecharacterized by Rutherford backscattering/Channeling (RBS/C) together with high resolution X ray diffraction(HRXRD). High quality SiGe base layer was obtained. The Si/SiGe/Si heterostructures were subject to conventionalfurnace annealing and rapid thermal annealing with temperature between 750 ℃ and 910 ℃. Both strain and its re-laxation degree in SiGe layer are calculated by HRXRD combined with elastic theory, which are never reported inother literatures. The rapid thermal annealing at elevated temperature between 880 ℃ and 910 ℃ for very short timehad almost no influence on the strain in Si0.84Ge0. 16 epilayer. However, high temperature (900℃) furnace annealingfor 1h prompted the strain in Si0.84Ge0.16 layer to relax. 展开更多
关键词 si/siGe/si异质结构 热平衡 HRXRD 超高真空化学气相沉积 UHVCVD X射线衍射
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Fabrication and Properties of Ag/Mg0.2Zn0.8O/La0.67Ca0.33MnO/p^+-Si Resistive Switching Heterostructure Devices
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作者 韦长成 王华 +2 位作者 XU Jiwen ZHANG Yupei CHEN Qisong 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2017年第3期547-551,共5页
Mg0.2Zn0.8OMZO/La0.67Ca0.33MnOLCMO heterostructure was deposited on p-^+-Si substrates by sol-gel spin coating technique. The Ag/MZO/LCMO/p-^+-Si devices exhibit a bipolar, reversible, and remarkable current-voltage... Mg0.2Zn0.8OMZO/La0.67Ca0.33MnOLCMO heterostructure was deposited on p-^+-Si substrates by sol-gel spin coating technique. The Ag/MZO/LCMO/p-^+-Si devices exhibit a bipolar, reversible, and remarkable current-voltage characteristic at room temperature. An obvious multilevel resistive switching effect is observed in the devices. The dominant conduction mechanism of the devices is trap-controlled space charge limited current. The resistance ratio of high resistance state and low resistance state of the devices is about six orders of magnitude, and the degradation is invisible in the devices after 250 successive switching cycles. The present results suggest that the Ag/MZO/LCMO/p-^+-Si devices may be a potential and multilevel candidate for nonvolatile memory application. 展开更多
关键词 heterostructure Ag/MZO/LCMO/p^+-si sol-gel resistive switching
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退火温度对纳米PtSi/Si异质结形成的影响
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作者 殷景华 蔡伟 +4 位作者 王培林 郑玉峰 王中 李美成 赵连城 《功能材料》 EI CAS CSCD 北大核心 2001年第5期504-505,共2页
采用XPS、XRD、AFM测试技术 ,研究退火温度对PtSi/Si异质结薄膜硅化物形成、分布及硅化物薄膜表面形貌的影响。测试结果表明 ,低温退火 ,薄膜中相分布顺序为Pt→Pt2 Si→PtSi→Si;高温退火 ,相分布顺序为Pt→Pt2 Si +PtSi→PtSi→Si或Pt... 采用XPS、XRD、AFM测试技术 ,研究退火温度对PtSi/Si异质结薄膜硅化物形成、分布及硅化物薄膜表面形貌的影响。测试结果表明 ,低温退火 ,薄膜中相分布顺序为Pt→Pt2 Si→PtSi→Si;高温退火 ,相分布顺序为Pt→Pt2 Si +PtSi→PtSi→Si或Pt +Pt2 Si+PtSi→PtSi→Si。退火温度高 ,薄膜中晶粒尺寸大 。 展开更多
关键词 退火温度 ptsi/si异质结 硅化物 薄膜 表面形貌 红外探测器
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PVD A1膜制备及其在PtSi SBIR-CCD中的应用 被引量:1
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作者 石明金 《半导体光电》 CAS 1987年第2期-,共5页
本文重点讨论PVD高纯Al膜制备工艺参数的选择和特性,接着介绍其应用和存在的问题及解决的方法。
关键词 Al si AI PVD A1 ptsi SBIR-CCD 膜制备
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氧离子束辅助激光淀积生长ZnO/Si的XPS研究 被引量:6
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作者 李庚伟 吴正龙 +3 位作者 杨锡震 杨少延 张建辉 刘志凯 《北京师范大学学报(自然科学版)》 CAS CSCD 北大核心 2001年第2期174-179,共6页
利用X射线光电子能谱深度剖析方法对ZnO/Si异质结构进行了分析 .用该法可生长出正化学比的ZnO ,不过生长的ZnO薄膜存在孔隙 ,工艺还有待进一步改进 .
关键词 ZnO/si异质结构 X射线光电子能谱 氧离子束辅助 薄膜 激光器
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SiGe/Si异质结光电器件 被引量:2
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作者 刘国军 叶志镇 +3 位作者 吴贵斌 孙伟峰 赵星 赵炳辉 《材料导报》 EI CAS CSCD 北大核心 2006年第1期116-119,共4页
SiGe/Si异质结光电器件及其光电集成(OEIC)是硅基光电研究的一个非常引人注目的领域。综述了SiGe/Si异质结材料的基本性质,SiGe/Si异质结光电器件的结构、性能、应用及其光电集成。重点介绍了SiGe/Si光电探测器及其与其他相关器件... SiGe/Si异质结光电器件及其光电集成(OEIC)是硅基光电研究的一个非常引人注目的领域。综述了SiGe/Si异质结材料的基本性质,SiGe/Si异质结光电器件的结构、性能、应用及其光电集成。重点介绍了SiGe/Si光电探测器及其与其他相关器件的集成。 展开更多
关键词 siGE/si异质结 光电器件 光电集成
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Si/SiGe异质结构的硅盖层中应变对Raman谱特征的影响 被引量:3
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作者 肖清华 屠海令 《光谱学与光谱分析》 SCIE EI CAS CSCD 北大核心 2005年第5期719-722,共4页
应变Si/SiGe异质结构通过大剂量Ge离子注入并结合高温快速热退火制备而成。325nm波长的紫外激光被用于调查应变Si盖层的Raman谱特征。实验发现,硅盖层中的张应变导致硅的520cm-1的一级拉曼散射峰向低频方向偏移,峰的偏移程度反映硅盖层... 应变Si/SiGe异质结构通过大剂量Ge离子注入并结合高温快速热退火制备而成。325nm波长的紫外激光被用于调查应变Si盖层的Raman谱特征。实验发现,硅盖层中的张应变导致硅的520cm-1的一级拉曼散射峰向低频方向偏移,峰的偏移程度反映硅盖层中横向张应力的大小约为12.5×108N·m-2。硅盖层中的张应变并未导致1555和2330cm-1的次级拉曼散射峰的变化。 展开更多
关键词 si siCE 异质结构 应变 RAMAN谱
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Si/SiGe-OI应变异质结构的高分辨电子显微分析 被引量:2
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作者 马通达 屠海令 +2 位作者 邵贝羚 陈长春 黄文韬 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第9期1123-1127,共5页
为了研究失配应变的弛豫机理 ,利用高分辨电子显微镜 (HREM)对超高真空化学气相沉积 (U HVCVD) Si/Si Ge- OI材料横截面的完整形貌和不同层及各层之间界面区的高分辨晶格像进行观察 .发现此多层结构中存在 6 0°位错和堆垛层错 .结... 为了研究失配应变的弛豫机理 ,利用高分辨电子显微镜 (HREM)对超高真空化学气相沉积 (U HVCVD) Si/Si Ge- OI材料横截面的完整形貌和不同层及各层之间界面区的高分辨晶格像进行观察 .发现此多层结构中存在 6 0°位错和堆垛层错 .结合 Matthews和 Blakeslee提出的临界厚度的模型和相关的研究结果对 6 0°位错组态的形成和存在原因进行了分析 .在具有帽层结构的 Si1 - x Gex 应变层靠近基体一侧的界面中仅存在单一位错 ,验证了 展开更多
关键词 si/siGe—OI应变异质结构 高分辨显微结构 失配位错 弛豫机理
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HgCdTe/CdTe/Si(211)异质结构的应变和应力分布计算 被引量:1
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作者 王元樟 朱文章 +1 位作者 张小英 许英朝 《红外与激光工程》 EI CSCD 北大核心 2012年第10期2594-2599,共6页
计算了HgCdTe/CdTe/Si(211)异质结构的应变和应力分布,发现对于生长方向为不具有对称特性的[211]晶向,由于弹性模量的各向异性,平行表面的两个晶向方向[1-1-1]和[01-1]的应变和应力分布存在差异,并且二者的曲率半径也具有相应特性。对... 计算了HgCdTe/CdTe/Si(211)异质结构的应变和应力分布,发现对于生长方向为不具有对称特性的[211]晶向,由于弹性模量的各向异性,平行表面的两个晶向方向[1-1-1]和[01-1]的应变和应力分布存在差异,并且二者的曲率半径也具有相应特性。对于Si衬底厚度为500μm,CdTe缓冲层厚度为10μm,HgCdTe层厚度为10μm的异质结构,液氮温度77 K时衬底与外延层的应变均为负值,外延层和衬底的最大应力值均在界面处,外延层中均为张应力,Si衬底在靠近界面处为压应力,远离界面逐渐过渡为张应力,存在一个应力为零的中性轴位置。 展开更多
关键词 HGCDTE si 异质结构 应变 应力分布
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磁控溅射的Ge/Si异质结构在退火过程中的Raman光谱研究 被引量:1
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作者 周湘萍 毛旭 +1 位作者 张树波 杨宇 《红外技术》 CSCD 北大核心 2002年第2期34-36,40,共4页
用Raman光散射的方法 ,研究了磁控溅射技术制备的Ge/Si系列异质材料在退火过程中的再生长情况 ,对不同的样品进行结构变化分析。实验结果显示 :Ge/Si异质材料在退火过程中的再生长受生长态条件限制 。
关键词 Ge/si异质材料 RAMAN光谱 退火过程 磁控溅射
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Ge^+注入Si_(1-x)Ge_x/Si异质结的退火行为 被引量:1
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作者 罗益民 陈振华 黄培云 《中南大学学报(自然科学版)》 EI CAS CSCD 北大核心 2005年第4期560-565,共6页
在注入能量为100keV时,将注入剂量为5.3×1016/cm2的Ge+注入(001)SIMOX硅膜中制备Si1-xGex/Si异质结;然后,对样品进行碘钨灯快速热退火,退火温度为700~1050℃,退火时间为5~30min。对样品的(004)和(113)面X射线衍射数据进行计算和分... 在注入能量为100keV时,将注入剂量为5.3×1016/cm2的Ge+注入(001)SIMOX硅膜中制备Si1-xGex/Si异质结;然后,对样品进行碘钨灯快速热退火,退火温度为700~1050℃,退火时间为5~30min。对样品的(004)和(113)面X射线衍射数据进行计算和分析,得出退火温度为1000℃、退火时间为30min为最佳退火条件。在此退火条件下,假设固相外延生长为赝晶生长,90%的注入Ge+位于替代位置,若同时考虑应变弛豫,则位于替代位置的Ge+达到理论最大值的82%,共格因子为0.438。由于高剂量Ge+注入引起表面晶格损伤严重以及应变弛豫释放的位错和缺陷,因此,表面结晶质量不太理想。 展开更多
关键词 离子注入 si1-xGe/si异质结 退火行为 X射线衍射
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氧离子束辅助激光淀积生长ZnO/Si薄膜深度剖析 被引量:1
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作者 李庚伟 吴正龙 +1 位作者 邵素珍 刘志凯 《材料科学与工艺》 EI CAS CSCD 北大核心 2007年第5期685-688,共4页
对于在Si(111)上用氧离子束辅助(O+-assisted)脉冲激光淀积(PLD)生长的ZnO薄膜,用X射线光电子能谱(XPS)深度剖析方法对长成的样品进行了异位测试,分析了导致各峰峰位能移的因素;通过异位与原位XPS谱图的比较,指出O+-assistedPLD法生成的... 对于在Si(111)上用氧离子束辅助(O+-assisted)脉冲激光淀积(PLD)生长的ZnO薄膜,用X射线光电子能谱(XPS)深度剖析方法对长成的样品进行了异位测试,分析了导致各峰峰位能移的因素;通过异位与原位XPS谱图的比较,指出O+-assistedPLD法生成的ZnO薄膜中存在孔隙;指出生长出的ZnO薄膜中含Si成分的厚度不超过18nm;同时探讨了在长成的ZnO/Si上继续生长GaN薄膜的可行性. 展开更多
关键词 ZnO/si异质结构 氧离子柬辅助(O^+-assisted)PLD X射线光电子能谱(XPS) 深度剖析
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