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基于喷墨打印方法锌锡氧化物薄膜晶体管制备与性能研究
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作者 沈兆伟 杨小天 +2 位作者 陆璐 王超 周路 《吉林建筑大学学报》 2019年第6期81-85,共5页
通过在乙二醇甲醚中溶解二水合乙酸锌(Zn(CH3COO)2·2H 2O)和二水合氯化亚锡(SnCl2·2H2O)制备了锌锡氧化物(ZnSnO)前驱体溶液,采用喷墨打印技术制备了锌锡氧化物薄膜晶体管(ZTO-TFT),研究了不同退火温度对ZnSnO薄膜光透过率和... 通过在乙二醇甲醚中溶解二水合乙酸锌(Zn(CH3COO)2·2H 2O)和二水合氯化亚锡(SnCl2·2H2O)制备了锌锡氧化物(ZnSnO)前驱体溶液,采用喷墨打印技术制备了锌锡氧化物薄膜晶体管(ZTO-TFT),研究了不同退火温度对ZnSnO薄膜光透过率和TFT器件电学性能的影响.结果表明,不同退火温度对薄膜的可见光区透过率有一定影响,退火温度低于400℃时,随着退火温度的升高,薄膜的可见光区透过率有所上升,当退火温度达到400℃以上时,薄膜的可见光区透过率基本不受影响,且平均透过率大于80%;随着退火温度的升高,打印制备的TFT器件的载流子迁移率和电流开关比随之增大,当退火温度达到500℃时,打印制备的TFT器件电流开关比达到104.因此,合理较高的退火温度有利于打印方法制备的ZTO-TFT器件性能的改善. 展开更多
关键词 溶液法 喷墨打印 锌锡氧化物(zto) 退火温度 薄膜晶体管(tft)
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Full-solution-processed high mobility zinc-tin-oxide thin-film-transistors 被引量:2
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作者 ZHANG YunGe HUANG GenMao +3 位作者 DUAN Lian DONG GuiFang ZHANG DeQiang QIU Yong 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2016年第9期1407-1412,共6页
The full solution-processed oxide thin-film-transistors(TFTs) have the advantages of transparency, ease of large-area fabrication, and low cost, offering great potential applications in switching and driving fields, a... The full solution-processed oxide thin-film-transistors(TFTs) have the advantages of transparency, ease of large-area fabrication, and low cost, offering great potential applications in switching and driving fields, and attracting extensive research interest. However, the performance of the solution-processed TFTs is generally lower than that of the vacuum-deposited ones. In this article, the full-solution processed TFTs with zinc-tin-oxide(ZTO) semiconductor and aluminium(Al_2O_3) dielectrics were fabricated, and their mobilities in the saturation region are high. Besides, the effect of the Al_2O_3 dielectrics' preparation technology on ZTO TFTs' performance was studied. Comparing the ZTO TFTs using the spin-coated Al_2O_3 dielectrics of 1–4 layers, the ZTO TFT with 3-layer Al_2O_3 dielectrics achieved the optimal performance as its field-effect carrier mobility in the saturation region is 112 cm^2/V s, its threshold voltage is 2.4 V, and its on-to-off current ratio is 2.8×105. This is also the highest reported carrier mobility of the solution-processed ZTO TFTs. 展开更多
关键词 场效应迁移率 薄膜晶体管 溶液处理 锡氧化物 氧化锌 载流子迁移率 制备技术 tft
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