A micro-spectrometer with phase modulation array is investigated in this paper. The vital component of this micro-spectrometer is a micro-interferometer array, which is built on a charge-coupled device (CCD) or a co...A micro-spectrometer with phase modulation array is investigated in this paper. The vital component of this micro-spectrometer is a micro-interferometer array, which is built on a charge-coupled device (CCD) or a complementary metal oxide semiconductor (CMOS). Each element of micro-interferometer array is formed by polymethyl methacrylate (PMMA) grooves with different depth. When we illuminate the surface of the interferom- eter array, different interference intensity distribution would be formed at the bottom of each micro-interferom- eter. Optical power of this by the pixels of CCD substituted into a linear interferometer can be measured or CMOS. The data can be system. By solving the linear system with Tikhonov regularization method, spectrum of the incident beam can be reconstructed. Simulation results prove that the detection range of the spectrometer is a wide wavelength range covering from 300 to 1100 nm. Furthermore, the wavelength resolution of the device reaches picometer level. In comparison with conventional spectrometers, the novel spectrometer has distinct advan- tages of small size, low cost, high resolution, wide spectral measurement range, real-time measurement, and so on.展开更多
Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple exter...Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.展开更多
The existing methods for detection of the cloud scenes are applied at relatively small spectral range within shortwave upwelling radiative wavelength flux. We have reported a new method for detection of the cloud scen...The existing methods for detection of the cloud scenes are applied at relatively small spectral range within shortwave upwelling radiative wavelength flux. We have reported a new method for detection of the cloud scenes based on the Radiance Enhancement (RE). This method can be used to cover a significantly wider spectral range from 1100 nm to 1700 nm by using datasets from the space-orbiting micro-spectrometer Argus 1000. Due to high sunlight reflection of the smoke originated from the forest or field fires the proposed RE method can also be implemented for detection of combustion aerosols. This approach can be a promising technique for efficient detection and continuous monitor of the seasonal forest and field fires. To the best of our knowledge this is the first report showing how a cloud method can be generalized for efficient detection of the forest fires due to combustion-originated reflectance.展开更多
Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development ...Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.展开更多
基金Acknowledgements This work was supported by the National Natural Science Foundation of China (Grant Nos. 6110611, 51172110, 651372119 and 61377019), the National Basic Research Program of China (Nos. 2012CB933301 and 2009CB930600), the Research Fund of National Laboratory of Solid State Microstructure (No. M25008).
文摘A micro-spectrometer with phase modulation array is investigated in this paper. The vital component of this micro-spectrometer is a micro-interferometer array, which is built on a charge-coupled device (CCD) or a complementary metal oxide semiconductor (CMOS). Each element of micro-interferometer array is formed by polymethyl methacrylate (PMMA) grooves with different depth. When we illuminate the surface of the interferom- eter array, different interference intensity distribution would be formed at the bottom of each micro-interferom- eter. Optical power of this by the pixels of CCD substituted into a linear interferometer can be measured or CMOS. The data can be system. By solving the linear system with Tikhonov regularization method, spectrum of the incident beam can be reconstructed. Simulation results prove that the detection range of the spectrometer is a wide wavelength range covering from 300 to 1100 nm. Furthermore, the wavelength resolution of the device reaches picometer level. In comparison with conventional spectrometers, the novel spectrometer has distinct advan- tages of small size, low cost, high resolution, wide spectral measurement range, real-time measurement, and so on.
基金supported by the National Natural Science Foundation of China under Grant No.61975016the Science and Technology Project of Guangdong(2020B010190001)+2 种基金Natural Science Foundation of Beijing Municipality(1212013 and Z190006)Beijing Municipal Science&Technology Commission,Administrative Commission of Zhongguancun Science Park No.Z211100004821009Cultivation Project for Basic Research and Innovation of Yanshan University No.2021LGQN021.
文摘Micro-optical electromechanical systems(MOEMS)combine the merits of micro-electromechanical systems(MEMS)and micro-optics to enable unique optical functions for a wide range of advanced applications.Using simple external electromechanical control methods,such as electrostatic,magnetic or thermal effects,Si-based MOEMS can achieve precise dynamic optical modulation.In this paper,we will briefly review the technologies and applications of Si-based MOEMS.Their basic working principles,advantages,general materials and micromachining fabrication technologies are introduced concisely,followed by research progress of advanced Si-based MOEMS devices,including micromirrors/micromirror arrays,micro-spectrometers,and optical/photonic switches.Owing to the unique advantages of Si-based MOEMS in spatial light modulation and high-speed signal processing,they have several promising applications in optical communications,digital light processing,and optical sensing.Finally,future research and development prospects of Si-based MOEMS are discussed.
文摘The existing methods for detection of the cloud scenes are applied at relatively small spectral range within shortwave upwelling radiative wavelength flux. We have reported a new method for detection of the cloud scenes based on the Radiance Enhancement (RE). This method can be used to cover a significantly wider spectral range from 1100 nm to 1700 nm by using datasets from the space-orbiting micro-spectrometer Argus 1000. Due to high sunlight reflection of the smoke originated from the forest or field fires the proposed RE method can also be implemented for detection of combustion aerosols. This approach can be a promising technique for efficient detection and continuous monitor of the seasonal forest and field fires. To the best of our knowledge this is the first report showing how a cloud method can be generalized for efficient detection of the forest fires due to combustion-originated reflectance.
文摘Spectrometer is an essential and necessary optical element used for measuring the chemical components and content of the matter. The development of miniature spectrometers can be traced back to 1980s. The development state and different manufacturing methods of micro-spectrometers are presented. Finally, we analyze the miniaturization trend of spectrometers. Some groundwork for the scientific research is offered by introducing micro-spectrometers development.