The evaluation methods of planarization capability of copper slurry are investigated.Planarization capability and material removal rate are the most essential properties of slurry.The goal of chemical mechanical polis...The evaluation methods of planarization capability of copper slurry are investigated.Planarization capability and material removal rate are the most essential properties of slurry.The goal of chemical mechanical polishing(CMP) is to achieve a flat and smooth surface.Planarization capability is the elimination capability of the step height on the copper pattern wafer surface,and reflects the passivation capability of the slurry to a certain extent.Through analyzing the planarization mechanism of the CMP process and experimental results,the planarization capability of the slurry can be evaluated by the following five aspects:pressure sensitivity,temperature sensitivity,static etch rate,planarization efficiency and saturation properties.展开更多
This work presents the saturable absorption(SA) properties of CsPbBr_3 perovskite quantum dots(QDs). The perovskite QDs show excellent SA performance with a nonlinear absorption coefficient of-35 × 10^(-2) cm∕GW...This work presents the saturable absorption(SA) properties of CsPbBr_3 perovskite quantum dots(QDs). The perovskite QDs show excellent SA performance with a nonlinear absorption coefficient of-35 × 10^(-2) cm∕GW and a figure of merit of 3.7 × 10^(-14) esu cm. Further, their use as saturable absorbers in a passively Q-switched visible solid-state laser for the generation of soliton pulses is demonstrated. These results demonstrate thepotential for the perovskite QDs to act as saturable absorbers.展开更多
The structural,morphological,optical,and nonlinear optical properties of a lead sulfde(PbS) thin film grown by chemical bath deposition(CBD) are investigated by X-ray difraction(XRD),scanning electron microscope(SEM),...The structural,morphological,optical,and nonlinear optical properties of a lead sulfde(PbS) thin film grown by chemical bath deposition(CBD) are investigated by X-ray difraction(XRD),scanning electron microscope(SEM),ultraviolet-visible(UV-Vis),and open aperture Z-scan experiments.The band gap energy of the PbS nanocrystalline film is 1.82 eV,higher than that of bulk PbS at 300 K.The nonlinear absorption properties of the film are investigated using the open aperture Z-scan technique at 1064 nm and pulse durations of 4 ns and 65 ps.Intensity-dependent switching of the film from nonlinear absorption to saturable absorption is observed.The nonlinear absorption coefficient increases monotonically with increasing pulse duration from 65 ps to 4 ns.展开更多
基金supported by the Special Project Items No.2 in National Long-term Technology Development Plan,China(No.2009ZX02308)
文摘The evaluation methods of planarization capability of copper slurry are investigated.Planarization capability and material removal rate are the most essential properties of slurry.The goal of chemical mechanical polishing(CMP) is to achieve a flat and smooth surface.Planarization capability is the elimination capability of the step height on the copper pattern wafer surface,and reflects the passivation capability of the slurry to a certain extent.Through analyzing the planarization mechanism of the CMP process and experimental results,the planarization capability of the slurry can be evaluated by the following five aspects:pressure sensitivity,temperature sensitivity,static etch rate,planarization efficiency and saturation properties.
基金National Natural Science Foundation of China(NSFC)(61378074,61475173)Youth Innovation Promotion Association Chinese Academy of Sciences(CAS)
文摘This work presents the saturable absorption(SA) properties of CsPbBr_3 perovskite quantum dots(QDs). The perovskite QDs show excellent SA performance with a nonlinear absorption coefficient of-35 × 10^(-2) cm∕GW and a figure of merit of 3.7 × 10^(-14) esu cm. Further, their use as saturable absorbers in a passively Q-switched visible solid-state laser for the generation of soliton pulses is demonstrated. These results demonstrate thepotential for the perovskite QDs to act as saturable absorbers.
文摘The structural,morphological,optical,and nonlinear optical properties of a lead sulfde(PbS) thin film grown by chemical bath deposition(CBD) are investigated by X-ray difraction(XRD),scanning electron microscope(SEM),ultraviolet-visible(UV-Vis),and open aperture Z-scan experiments.The band gap energy of the PbS nanocrystalline film is 1.82 eV,higher than that of bulk PbS at 300 K.The nonlinear absorption properties of the film are investigated using the open aperture Z-scan technique at 1064 nm and pulse durations of 4 ns and 65 ps.Intensity-dependent switching of the film from nonlinear absorption to saturable absorption is observed.The nonlinear absorption coefficient increases monotonically with increasing pulse duration from 65 ps to 4 ns.
