Flip chip die-to-wafer bonding faces challenges for industry adoption due to a variety of technical gaps or process integration factors that are not fully developed to high volume manufacturing(HVM)maturity.In this pa...Flip chip die-to-wafer bonding faces challenges for industry adoption due to a variety of technical gaps or process integration factors that are not fully developed to high volume manufacturing(HVM)maturity.In this paper,flip-chip and wire bonding are compared,then flip-chip bonding techniques are compared to examine advantages for scaling and speed.Specific recent 3-year trends in flip-chip die-to-wafer bonding are reviewed to address the key gaps and challenges to HVM adoption.Finally,some thoughts on the care needed by the packaging technology for successful HVM introduction are reviewed.展开更多
System-in-packaging(Si P) can realize the integration and miniaturization of electronic devices and it is significant to continue Moore’s law.Through-X-via(TXV) technology is the cornerstone of 3 D-SiP,which enables ...System-in-packaging(Si P) can realize the integration and miniaturization of electronic devices and it is significant to continue Moore’s law.Through-X-via(TXV) technology is the cornerstone of 3 D-SiP,which enables the vertical stacking and electrical interconnection of electronic devices.TXV originated from through-hole(TH) in PCB substrates and evolved in different substrate materials,such as silicon,glass,ceramic,and polymer.This work provides a comprehensive review of four distinguishing TXV technologies(through silicon via(TSV),through glass via(TGV),through ceramic via(TCV),and through mold via(TMV)),including the fabrication mechanisms,processes,and applications.Every TXV technology has unique characteristics and owns particular processes and functions.The process methods,key technologies,application fields,and advantages and disadvantages of each TXV technology were discussed.The cutting-edge through-hole process and development direction were reviewed.展开更多
文摘Flip chip die-to-wafer bonding faces challenges for industry adoption due to a variety of technical gaps or process integration factors that are not fully developed to high volume manufacturing(HVM)maturity.In this paper,flip-chip and wire bonding are compared,then flip-chip bonding techniques are compared to examine advantages for scaling and speed.Specific recent 3-year trends in flip-chip die-to-wafer bonding are reviewed to address the key gaps and challenges to HVM adoption.Finally,some thoughts on the care needed by the packaging technology for successful HVM introduction are reviewed.
基金supported by the Aerospace S&T Group Application Innovation Program Project(No:09428ADA)the Key Research and Development Project of Hubei Province(Grant Nos.2020BAB068 and 2021BAA071)。
文摘System-in-packaging(Si P) can realize the integration and miniaturization of electronic devices and it is significant to continue Moore’s law.Through-X-via(TXV) technology is the cornerstone of 3 D-SiP,which enables the vertical stacking and electrical interconnection of electronic devices.TXV originated from through-hole(TH) in PCB substrates and evolved in different substrate materials,such as silicon,glass,ceramic,and polymer.This work provides a comprehensive review of four distinguishing TXV technologies(through silicon via(TSV),through glass via(TGV),through ceramic via(TCV),and through mold via(TMV)),including the fabrication mechanisms,processes,and applications.Every TXV technology has unique characteristics and owns particular processes and functions.The process methods,key technologies,application fields,and advantages and disadvantages of each TXV technology were discussed.The cutting-edge through-hole process and development direction were reviewed.
