A new comprehensive empirical large signal model for 4H-SiC MESFETs is proposed. An enhanced drain current model,along with an improved charge conservation capacitance model,is presented by the improvement of the chan...A new comprehensive empirical large signal model for 4H-SiC MESFETs is proposed. An enhanced drain current model,along with an improved charge conservation capacitance model,is presented by the improvement of the channel length modulation and the hyperbolic tangent function coefficient based on the Materka model. The Levenberg-Marquardt method is used to optimize the parameter extraction. A comparison of simulation resuits with experimental data is made,and good agreements of I-V curves, Pout （output power）, PAE （power added efficiency） ,and gain at the bias of Vos = 20V, Ips = 80mA as well as the operational frequency of 1.8GHz are obtained.展开更多
在4H-SiC MESFET微波功率器件制造技术中干法刻蚀是一个很重要的工艺,而对SiC外延片的RIE、ICP等干法刻蚀来说,有光刻胶、Ni、Al和NiSi化合物等多种掩膜方法,其中用光刻胶做掩膜时刻蚀形成的台阶角度缓,不垂直,而Ni、Al等金属掩膜在干...在4H-SiC MESFET微波功率器件制造技术中干法刻蚀是一个很重要的工艺,而对SiC外延片的RIE、ICP等干法刻蚀来说,有光刻胶、Ni、Al和NiSi化合物等多种掩膜方法,其中用光刻胶做掩膜时刻蚀形成的台阶角度缓,不垂直,而Ni、Al等金属掩膜在干法刻蚀后易形成接近垂直的台阶。通过对Ni、Al、NiSi化合物等多种金属掩膜的研究,得到了干法刻蚀台阶垂直且表面状况良好的Ni金属掩膜条件,最终成功制备出9mm SiC MESFET微波功率器件,在2GHz脉冲输出功率超过38W,功率增益9dB。展开更多
This paper reports that a 4H-SiC MESFET （Metal Semiconductor Field Effect Transistor） large signal drain current model based on physical expressions has been developed to be used in CAD tools. The form of drain curr...This paper reports that a 4H-SiC MESFET （Metal Semiconductor Field Effect Transistor） large signal drain current model based on physical expressions has been developed to be used in CAD tools. The form of drain current model is based on semi-empirical MESFET model, and all parameters in this model are determined by physical parameters of 4H-SiC MESFET. The verification of the present model embedded in CAD tools is made, which shows a good agreement with measured data of large signal DC I-V characteristics, PAE （power added efficiency）, output power and gain.展开更多
A modified drain source current suitable for simulation program with integrated circuit emphasis （SPICE） simulations of SiC MESFETS is presented in this paper. Accurate modeling of SiC MESFET is achieved by introduc...A modified drain source current suitable for simulation program with integrated circuit emphasis （SPICE） simulations of SiC MESFETS is presented in this paper. Accurate modeling of SiC MESFET is achieved by introducing three parameters in Triquint＇s own model （TOM）. The model, which is single piece and continuously differentiable, is verified by measured direct current （DC） I-V curves and scattering parameters （up to 20 GHz）.展开更多
文摘A new comprehensive empirical large signal model for 4H-SiC MESFETs is proposed. An enhanced drain current model,along with an improved charge conservation capacitance model,is presented by the improvement of the channel length modulation and the hyperbolic tangent function coefficient based on the Materka model. The Levenberg-Marquardt method is used to optimize the parameter extraction. A comparison of simulation resuits with experimental data is made,and good agreements of I-V curves, Pout （output power）, PAE （power added efficiency） ,and gain at the bias of Vos = 20V, Ips = 80mA as well as the operational frequency of 1.8GHz are obtained.
文摘在4H-SiC MESFET微波功率器件制造技术中干法刻蚀是一个很重要的工艺,而对SiC外延片的RIE、ICP等干法刻蚀来说,有光刻胶、Ni、Al和NiSi化合物等多种掩膜方法,其中用光刻胶做掩膜时刻蚀形成的台阶角度缓,不垂直,而Ni、Al等金属掩膜在干法刻蚀后易形成接近垂直的台阶。通过对Ni、Al、NiSi化合物等多种金属掩膜的研究,得到了干法刻蚀台阶垂直且表面状况良好的Ni金属掩膜条件,最终成功制备出9mm SiC MESFET微波功率器件,在2GHz脉冲输出功率超过38W,功率增益9dB。
文摘This paper reports that a 4H-SiC MESFET （Metal Semiconductor Field Effect Transistor） large signal drain current model based on physical expressions has been developed to be used in CAD tools. The form of drain current model is based on semi-empirical MESFET model, and all parameters in this model are determined by physical parameters of 4H-SiC MESFET. The verification of the present model embedded in CAD tools is made, which shows a good agreement with measured data of large signal DC I-V characteristics, PAE （power added efficiency）, output power and gain.
文摘A modified drain source current suitable for simulation program with integrated circuit emphasis （SPICE） simulations of SiC MESFETS is presented in this paper. Accurate modeling of SiC MESFET is achieved by introducing three parameters in Triquint＇s own model （TOM）. The model, which is single piece and continuously differentiable, is verified by measured direct current （DC） I-V curves and scattering parameters （up to 20 GHz）.
