Polarization-Insensitive Silica on Silicon Arrayed Waveguide Grating Design

A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer.

A 32-channel 100 GHz wavelength division multiplexer by interleaving two silicon arrayed waveguide gratings

A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB.

Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.

Design and Analysis of 4×4 Arrayed Waveguide Grating Multiplexer

The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring arrayed waveguide distance ΔL, the channel frequency interval Δf, and the free spectral range. The structure of 4×4 AWG is designed and the result of stimulated test is also given. Analysis shows that the 4×4 AWG is characterized by a wide dynamic range, low crosstalk, better spectrum properties, and a compact structure.

Improved Performance of a Wavelength-Tunable Arrayed Waveguide Grating in Silicon on Insulator

The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication process on the AWG is achieved by the design of bi-level tapers. The wavelength tuning of the AWG is achieved according to the thermo-optic effect of silicon, and uniform heating of the silicon waveguide layer is achieved by optimizing the heater design. The fabricated AWG shows a minimum crosstalk of 16 dB, a maximum insertion loss of 3.91 dB and a wavelength tuning efficiency of 8.92 nm/W, exhibiting a ～8 dB improvement of crosstalk, ～2.1 dB improvement of insertion loss and ～5 nm/W improvement of wavelength tuning efficiency, compared to our previous reported results.

Novel wavelength-accurate InP-based arrayed waveguide grating

A 13-channel, InP-based arrayed waveguide grating （AWG） is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail.

Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response

A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results.

Fluorinated polymer with high thermal stability for fabrication of 32-channel arrayed waveguide grating multiplexer on silicon

A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than-20 dB. The wavelength channel spacing and the center wavelength are 0.8nm and 1548nm, respectively.

Influence of Crosstalk on Signal Power Based on Arrayed-waveguide Grating as N × N Optical Router

The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the random distributions of optical path phase errors in twomultiplexers with channel numbers of 10 and 160. It is shown that the crosstalk must be less than―28 dB for a power penalty below 1 dB at a bit error rate of 1X10^(-9). It is found that when N =100, crosstalk power value is ? 20 dB with compensation power of 2―3 dB, so the compensation poweris not ignored.

Ultralow cross talk arrayed waveguide grating integrated with tunable microring filter array

The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced.

Polymer Arrayed Waveguide Grating with Box-Like Spectral Response

An efficient technique is used to flatten the spectral response of an arrayed waveguide grating （AWG） multiplexer. By subtracting an increment from the core width of odd arrayed waveguides and by adding the same increment to that of even arrayed waveguides,a box-like spectral response can be obtained. A 17 × 17 polymer AWG multiplexer with box- like spectral response has been made using FPE polymer materials. Measured result for the AWG shows that the box-like spectral response has a 3dB bandwidth of 0. 476nm, the crosstalk is about or less than - 21dB for every output channel,and the insertion loss is 13-15dB.

Design and Fabrication of Polymer Arrayed Waveguide Grating

In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Then, a 9 X 9 polymer AWG is designed and thefabricating process are described . The cladding material is poly-methyl-methacrylate-co-glyciclylmethacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. Inorder to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen,an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabricationprocess. The measuring results indicate that the fabricated optical waveguide achieves single-modetransmission.

Characterization of Birefringence and Dispersion Properties in an Arrayed Waveguide Grating

We have characterized polarization dependent loss(PDL), differential group delay(DGD), and chromatic dispersion of an AWG and a simple method was proposed to estimate the chromatic dispersion from the measured DGD of the device.

16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides

A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of 5-8 dB, central channel＇s insertion loss of 2.2 dB, flee spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically.

Analysis of fabrication results for 17×17 polymer arrayed waveguide grating multiplexers with flat spectral responses

Based on transmission theory, a 17 x 17 polymer arrayed waveguide grating （AWG） multiplexer para meter optimization is performed, and the influence of the fabrication results on the transmission characteristics are analyzed. In this paper, we mainly discuss three of the main errors in the fabrication of polymer AWG devices. One is 3n 1, which is caused by the tuning of the core refractive index n 1, the second is 8b, which results from the rotating-coating of the core thickness b, and the other is the non-ideal core cross-section, which is caused by steam redissolution. The effects of the above fabrication errors on the transmission characteristics of the AWG device are investigated, and compensation techniques are proposed. By comparing the theoretical simulation and experimental results, the shift in the transmission spectrum is reduced by 0.028 nm, the 3 dB bandwidth is increased by about 0.036 nm, the insertion loss is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 1.5 dB.

降低AWG插入损耗和串扰设计新方法(英文)

在AWG器件的设计中引入了抛物线型的楔形波导结构,根据过渡区理论优化了引入的抛物线型楔形结构的形状和尺寸.采用抛物线型楔形结构代替直线型楔形结构,AWG的插入损耗降低了2 dB左右.在优化参数时使输出/输入波导间距与阵列波导间距取不同的值,并使输出/输入波导间距适当增大,而阵列波导间距取较小值,这样使得串扰降至-30 dB以下且插入损耗保持在低水平.运用光束传播方法给出器件的输出光谱并证实了理论上预想的结果.

Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique

Arrayed waveguide grating（AWG） is a key device in the wavelength-division multiplexing（WDM） system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is about-22 dB.The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels,and the crosstalk is reduced by 2.5 dB after the steam-redissolution.

基于AWG的多通道光纤光栅传感解调系统

设计开发了一种基于陈列波导光栅（AWG）的多通道光纤光栅解调系统. 该系统由宽带光源、隔离器、耦合器、光环路器、光纤布拉格光栅（FBG）传感器、AWG、光电探测电路、调理放大电路、低通滤波电路和ARM控制电路等组成,采用光强法解调技术,对FBG 传感器的温度进行精确测量. 实验结果表明：该解调系统测量误差不大于±0.1 ℃,FBG 中心波长解调范围为1 545.30-1 560.50 nm, 可实现对4 通道的32 个FBG 传感器同时测量.

Triplexers Based on SOI Flattop AWGs

Triplexers are designed based on SOl flattop arrayed waveguide gratings （AWGs）. Three wavelengths （1310, 1490,and 1550nm） operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosstalk, and loss are 6nm,less than -40dB, and 5dB, respectively. The output optical fields of the device fabricated in our laboratory are clear and show a good triplexing function.

基于AWG的波分/时分复用FBG传感器网络研究

为了充分利用传感器网络在频域和时域上的丰富资源,提出了一种采用WDM/TDM的网络复用技术的新型分布式FBG传感器网络设计方案。将FBG传感器利用阵列波导光栅(AWG)进行波分复用,并利用程控光开关对波分复用信道中的每一个FBG传感器进行时分复用。网络中的传感器数量可达几百只。以可调法布里—珀罗(F-P)滤波器和数字信号处理器为核心的解调模块,通过布设的参考FBG能够对F-P滤波器特征曲线进行实时校正,提高了解调准确度。传感过程实现了自动化。该传感器网络可以对矿井、地下隧道等危险环境进行实时温度测量、预警,具有很好的应用前景。