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Synthesis of Branched Chains with Actuation Redundancy for Eliminating Interior Singularities of 3T1R Parallel Mechanisms 被引量:12
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作者 LI Shihua LIU Yanmin +2 位作者 CUI Hongliu NIU Yunzhan ZHAO Yanzhi 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2016年第2期250-259,共10页
Although it is common to eliminate the singularity of parallel mechanism by adding the branched chain with actuation redundancy, there is no theory and method for the configuration synthesis of the branched chain with... Although it is common to eliminate the singularity of parallel mechanism by adding the branched chain with actuation redundancy, there is no theory and method for the configuration synthesis of the branched chain with actuation redundancy in parallel mechanism. Branched chains with actuation redundancy are synthesized for eliminating interior singularity of 3-translational and 1-rotational(3T1R) parallel mechanisms. Guided by the discriminance method of hybrid screw group according to Grassmann line geometry, all the possibilities are listed for the occurrence of interior singularities in 3T1R parallel mechanism. Based on the linear relevance of screw system and the principles of eliminating parallel mechanism singularity with actuation redundancy, different types of branched chains with actuation redundancy are synthesized systematically to indicate the layout and the number of the branched chainsinterior with actuation redundancy. A general method is proposed for the configuration synthesis of the branched chains with actuation redundancy of the redundant parallel mechanism, and it builds a solid foundation for the subsequent performance optimization of the redundant actuation parallel mechanism. 展开更多
关键词 parallel mechanism interior singularity hybrid screw group branched chain with actuation redundancy
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Workspace Analysis of the 4RRR Planar Parallel Manipulator with Actuation Redundancy 被引量:5
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作者 徐博强 李铁民 +1 位作者 刘辛军 吴军 《Tsinghua Science and Technology》 SCIE EI CAS 2010年第5期509-516,共8页
In order to overcome the drawbacks of 3RRR non-redundant parallel manipulators,a redundantly actuated planar parallel manipulator,the 4RRR manipulator,was examined.In the current study,three types of workspace were an... In order to overcome the drawbacks of 3RRR non-redundant parallel manipulators,a redundantly actuated planar parallel manipulator,the 4RRR manipulator,was examined.In the current study,three types of workspace were analyzed.In the analysis of the reachable workspace,the shape of the workspace of 4RRR PMs was illustrated,and the relationship between the parameters of parallel mechanisms(PMs) and this kind of workspace was discussed.In the analysis of the m-orientation workspace,a procedure for calculating this type of workspace was presented,and the relationship between this type of workspace and the requirement of rotational displacement was revealed.In the analysis of the nonsingular workspace,the singularity of 4RRR PMs was discussed,the boundary of the singularity was illustrated,and a scheme to maximize the nonsingular workspace was presented.Depicting the properties of 4RRR PMs from different perspectives,the analyses of these three kinds of workspace can serve as helpful references for the structure design and mechanism control of 4RRR PMs. 展开更多
关键词 4RRR parallel manipulator actuation redundancy SINGULARITY WORKSPACE
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Dynamics and Control of a Novel 3-DOF Parallel Manipulator with Actuation Redundancy 被引量:8
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作者 Xue-Mei Niu Guo-Qin Gao +1 位作者 Xin-Jun Liu Zhi-Da Bao 《International Journal of Automation and computing》 EI CSCD 2013年第6期552-562,共11页
This paper deals with the dynamics and control of a novel 3-degrees-of-freedom (DOF) parallel manipulator with actuation redundancy. According to the kinematics of the redundant manipulator, the inverse dynamic equa... This paper deals with the dynamics and control of a novel 3-degrees-of-freedom (DOF) parallel manipulator with actuation redundancy. According to the kinematics of the redundant manipulator, the inverse dynamic equation is formulated in the task space by using the Lagrangian formalism, and the driving force is optimized by utilizing the minimal 2-norm method. Based on the dynamic model, a synchronized sliding mode control scheme based on contour error is proposed to implement accurate motion tracking control. Additionally, an adaptive method is introduced to approximate the lumped uncertainty of the system and provide a chattering-free control. The simulation results indicate the effectiveness of the proposed approaches and demonstrate the satisfactory tracking performance compared to the conventional controller in the presence of the parameter uncertainties and un-modelled dynamics for the motion control of manipulators. 展开更多
关键词 Parallel manipulator redundant actuation dynamics modelling sliding mode control weighed integral gain reachinglaw.
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Bio-inspired Backstepping Adaptive Sliding Mode Control for Parallel Mechanism with Actuation Redundancy
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作者 Xue-Mei Niu Guo-Qin Gao +1 位作者 Xin-Jun Liu Zhi-Ming Fang 《International Journal of Automation and computing》 EI CSCD 2014年第5期555-564,共10页
This paper presents a bio-inspired backstepping adaptive sliding mode control strategy for a novel 3 degree of freedom(3-DOF) parallel mechanism with actuation redundancy. Based on the kinematic model and the dynamic ... This paper presents a bio-inspired backstepping adaptive sliding mode control strategy for a novel 3 degree of freedom(3-DOF) parallel mechanism with actuation redundancy. Based on the kinematic model and the dynamic model, a sliding mode controller is designed to assure the tracking performance, and an adaptive law is introduced to approximate the system uncertainty including parameters variation, external disturbances and un-modeled part. Furthermore, a bio-inspired model is introduced to solve the inherent chattering problem of sliding mode control and provide a chattering free control. The simulation and experimental results testify that the proposed bio-inspired backstepping adaptive sliding mode control can achieve better performance(the tracking accuracy,robustness, response speed, etc.) than the conventional slide mode control. 展开更多
关键词 Parallel mechanism redundant actuation kinematics analysis dynamics analysis adaptive sliding mode control bioinspired model
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A framework for dynamic modelling of railway track switches considering the switch blades,actuators and control systems
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作者 Saikat Dutta Tim Harrison +2 位作者 Christopher Ward Roger Dixon Phil Winship 《Railway Engineering Science》 EI 2024年第2期162-176,共15页
The main contribution of this paper is the development and demonstration of a novel methodology that can be followed to develop a simulation twin of a railway track switch system to test the functionality in a digital... The main contribution of this paper is the development and demonstration of a novel methodology that can be followed to develop a simulation twin of a railway track switch system to test the functionality in a digital environment.This is important because,globally,railway track switches are used to allow trains to change routes;they are a key part of all railway networks.However,because track switches are single points of failure and safety-critical,their inability to operate correctly can cause significant delays and concomitant costs.In order to better understand the dynamic behaviour of switches during operation,this paper has developed a full simulation twin of a complete track switch system.The approach fuses finite element for the rail bending and motion,with physics-based models of the electromechanical actuator system and the control system.Hence,it provides researchers and engineers the opportunity to explore and understand the design space around the dynamic operation of new switches and switch machines before they are built.This is useful for looking at the modification or monitoring of existing switches,and it becomes even more important when new switch concepts are being considered and evaluated.The simulation is capable of running in real time or faster meaning designs can be iterated and checked interactively.The paper describes the modelling approach,demonstrates the methodology by developing the system model for a novel“REPOINT”switch system,and evaluates the system level performance against the dynamic performance requirements for the switch.In the context of that case study,it is found that the proposed new actuation system as designed can meet(and exceed)the system performance requirements,and that the fault tolerance built into the actuation ensures continued operation after a single actuator failure. 展开更多
关键词 Railway track switch Mathematical modelling Redundant actuation Finite element analysis
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Design of a Servo Mechanical Press with Redundant Actuation 被引量:7
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作者 GUO Weizhong GAO Feng 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2009年第4期574-579,共6页
A servo press is a new type of mechanical press that is driven by programmable motors and offers superior performance such as low noise, excellent efficiency and high precision for metal forming operations. Similar to... A servo press is a new type of mechanical press that is driven by programmable motors and offers superior performance such as low noise, excellent efficiency and high precision for metal forming operations. Similar to multi-link mechanical presses, a servo mechanical press tends to grow in size as the tonnage increases that calls for larger, heavy duty servo motors, which could be expensive and may not even be available. In this paper, a new concept of servo mechanical press with redundant actuation is proposed firstly using two servo motors driving one input shaft, i.e. one-point-two-motor mode that makes it possible to produce a larger press with available servomotors. Then the punching mechanism design is detailed. The performance indices are set up including mechanical advantage reciprocal and link force ratios. A bounded feasible solution space is constructed for dimensional synthesis based on non-dimensional link lengths and assembly conditions. The performance atlases are depicted over the bounded feasible solution space that lead to a visual solution of the punching mechanism with global optimization. Finally, case studies are given to illustrate the design method with visual global optimization, and a prototype with 200 t punching force is being developed in our laboratory to demonstrate efficacy of the new concept for servo mechanical press. The presented research provides a feasible solution to the development of heavy-duty servo mechanical presses and finds potential applications in the development of other types of heavy equipments with electric drive. 展开更多
关键词 servo mechanical press redundant actuation mechanism design visual global optimization PROTOTYPE
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Design and Analysis for a Three-Rotational-DOF Flight Simulator of Fighter-Aircraft
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作者 Chang-Chun Zhou Yue-Fa Fang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2018年第3期48-59,共12页
Most of researchers focused on traditional six degrees of freedom(DOF) Stewart flight simulator,which can not be adaptive in fighter?aircraft flight simulator. A three rotational DOF flight simulator of fighter?aircra... Most of researchers focused on traditional six degrees of freedom(DOF) Stewart flight simulator,which can not be adaptive in fighter?aircraft flight simulator. A three rotational DOF flight simulator of fighter?aircraft based on dou?ble parallel manipulator and hybrid structure is presented. The flight simulator is composed of two identical 3?RRS(revolute?revolute?spherical) spherical parallel manipulators and one cabin,called Twins. The cabin has an additional independent DOF for 360° continuous rotation,so it can be applied as a flight simulator for a fighter?aircraft to achieve spin maneuvering. Because of the introduction of the hybrid structure and double parallel manipulator of themechanism,the redundancy exists with respect to both kinematics and actuation. Kinematics is carried out and Jaco?bian matrix is established by means of screw theory. The inverse kinematics is given out by the analytical method. 64 groups inverse solutions are showed in a table by permutation. Forward kinematics is solved by an e ectively numeri?cal method. The forward numerical method is realized based on the analytically inverse kinematics and Jacobian matrix. The numerical examples show that the forward numerical method can be used in real?time control. The rollingmotion is considered in forward kinematics and a numerical example is given out. The proposed flight simulator can spin and there are three rotational DOF with a hybrid structure so that the novel flight simulator can be used in the field of the fighter?aircraft for pilots to train. 展开更多
关键词 Parallel manipulator Hybrid mechanisms actuation redundancy Flight simulator KINEMATICS Screw theory Jacobian matrix
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A New Method for Type Synthesis of 2R1T and 2T1R 3-DOF Redundant Actuated Parallel Mechanisms with Closed Loop Units 被引量:2
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作者 Yongquan Li Yang Zhang Lijie Zhang 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2020年第6期134-157,共24页
The current type synthesis of the redundant actuated parallel mechanisms is adding active-actuated kinematic branches on the basis of the traditional parallel mechanisms,or using screw theory to perform multiple getti... The current type synthesis of the redundant actuated parallel mechanisms is adding active-actuated kinematic branches on the basis of the traditional parallel mechanisms,or using screw theory to perform multiple getting intersection and union to complete type synthesis.The number of redundant parallel mechanisms obtained by these two methods is limited.In this paper,based on Grassmann line geometry and Atlas method,a novel and effective method for type synthesis of redundant actuated parallel mechanisms(PMs)with closed-loop units is proposed.Firstly,the degree of freedom(DOF)and constraint line graph of the moving platform are determined successively,and redundant lines are added in constraint line graph to obtain the redundant constraint line graph and their equivalent line graph,and a branch constraint allocation scheme is formulated based on the allocation criteria.Secondly,a scheme is selected and redundant lines are added in the branch chains DOF graph to construct the redundant actuated branch chains with closed-loop units.Finally,the branch chains that meet the requirements of branch chains configuration criteria and F&C(degree of freedom&constraint)line graph are assembled.In this paper,two types of 2 rotational and 1 translational(2R1T)redundant actuated parallel mechanisms and one type of 2 translational and 1 rotational(2T1R)redundant actuated parallel mechanisms with few branches and closed-loop units were taken as examples,and 238,92 and 15 new configurations were synthesized.All the mechanisms contain closed-loop units,and the mechanisms and the actuators both have good symmetry.Therefore,all the mechanisms have excellent comprehensive performance,in which the two rotational DOFs of the moving platform of 2R1T redundant actuated parallel mechanism can be independently controlled.The instantaneous analysis shows that all mechanisms are not instantaneous,which proves the feasibility and practicability of the method. 展开更多
关键词 Redundant actuated Parallel mechanisms Type synthesis Atlas method Instantaneous analysis
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Optimum Seeking of Redundant Actuators for M-RCM 3-UPU Parallel Mechanism 被引量:1
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作者 Chen Zhao Jingke Song +2 位作者 Xuechan Chen Ziming Chen Huafeng Ding 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2021年第6期373-384,共12页
The singularity problem brings troubles to the design and application for the parallel mechanism.Currently,redun-dant actuation is one of the useful methods to solve this singularity problem.However,faced to the numer... The singularity problem brings troubles to the design and application for the parallel mechanism.Currently,redun-dant actuation is one of the useful methods to solve this singularity problem.However,faced to the numerous joints in a parallel mechanism,how to make a quantitative criterion of seeking the most efficient joints added actuators for letting the mechanism passes through singularity is a necessarily open issue.This paper focuses on a 2R1T 3-UPU(U for universal joint and P for prismatic joint)parallel mechanism(PM)with two rotational and one translational(2R1T)degrees of freedom(DOFs)and the ability of multiple remote centers of motion(M-RCM).The singularity analysis based on the indexes of motion/force transmissibility and constraint shows that this PM has transmission singular-ity,constraint singularity,mixed singularity and limb singularity.To solve these singular problems,the quantifiable redundancy transmission index(RTI)and the redundancy constraint index(RCI)are proposed for optimum seeking of redundant actuators for this PM.Then the appropriate redundant actuators are selected and the working scheme for redundant actuators near the corresponding singular configuration are given to help the PM passes through the singularity.This research proposes a quantitative criterion to optimum seeking of redundant actuators for the parallel mechanism to solve its singularity. 展开更多
关键词 Parallel mechanism 2R1T RCM SINGULARITY Redundant actuation
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NUMERICAL MODELING OF MULTI-CYLINDER ELECTRO-HYDRAULIC SYSTEM AND CONTROLLER DESIGN FOR SHOCK TEST MACHINE
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作者 CHU Deying ZHANG Zhiyi WANG Gongxian HUA Hongxing 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2007年第2期109-114,共6页
A high fidelity dynamic model of a high-energy hydraulically-actuated shock test machine for heavy weight devices is presented to satisfy the newly-built shock resistance standard and simulate the actual underwater ex... A high fidelity dynamic model of a high-energy hydraulically-actuated shock test machine for heavy weight devices is presented to satisfy the newly-built shock resistance standard and simulate the actual underwater explosion environments in laboratory as well as increase the testing capability of shock test machine. In order to produce the required negative shock pulse in the given time duration, four hydraulic actuators are utilized. The model is then used to formulate an advanced feedforward controller for the system to produce the required negative waveform and to address the motion synchronization of the four cylinders. The model provides a safe and easily controllable way to perform a "virtual testing" before starting potentially destructive tests on specimen and to predict performance of the system. Simulation results have demonstrated the effectiveness of the controller. 展开更多
关键词 Shock test machine Negative shock pulse Actuator redundancy Feedforward controller Virtual testing
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Active fault tolerant control for vertical tail damaged aircraft with dissimilar redundant actuation system 被引量:5
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作者 Wang Jun Wang Shaoping +2 位作者 Wang Xingjian Shi Cun Mileta M.Tomovic 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2016年第5期1313-1325,共13页
This paper proposes an active fault-tolerant control strategy for an aircraft with dissimilar redundant actuation system (DRAS) that has suffered from vertical tail damage. A damage degree coefficient based on the e... This paper proposes an active fault-tolerant control strategy for an aircraft with dissimilar redundant actuation system (DRAS) that has suffered from vertical tail damage. A damage degree coefficient based on the effective vertical tail area is introduced to parameterize the damaged flight dynamic model. The nonlinear relationship between the damage degree coefficient and the corresponding stability derivatives is considered. Furthermore, the performance degradation of new input channel with electro-hydrostatic actuator (EHA) is also taken into account in the damaged flight dynamic model. Based on the accurate damaged flight dynamic model, a composite method of linear quadratic regulator (LQR) integrating model reference adaptive control (MRAC) is proposed to reconfigure the fault-tolerant control law. The numerical simulation results validate the effectiveness of the proposed fault-tolerant control strategy with accurate flight dynamic model. The results also indicate that aircraft with DRAS has better fault-tolerant control ability than the traditional ones when the vertical tail suffers from serious damage. 展开更多
关键词 Dissimilar redundant actuation system Electro-hydrostatic actuator Fault-tolerant control Linear quadratic regulator Model reference adaptivecontrol Nonlinear aircraft model Vertical tail loss
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Fault mode probability factor based fault-tolerant control for dissimilar redundant actuation system 被引量:1
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作者 Jun WANG Shaoping WANG +2 位作者 Xingjian WANG Mileta M.TOMOVIC Cun SHI 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2018年第5期965-975,共11页
This paper presents a Fault Mode Probability Factor(FMPF) based Fault-Tolerant Control(FTC) strategy for multiple faults of Dissimilar Redundant Actuation System(DRAS)composed of Hydraulic Actuator(HA) and Ele... This paper presents a Fault Mode Probability Factor(FMPF) based Fault-Tolerant Control(FTC) strategy for multiple faults of Dissimilar Redundant Actuation System(DRAS)composed of Hydraulic Actuator(HA) and Electro-Hydrostatic Actuator(EHA). The long-term service and severe working conditions can result in multiple gradual faults which can ultimately degrade the system performance, resulting in the system model drift into the fault state characterized with parameter uncertainty. The paper proposes to address this problem by using the historical statistics of the multiple gradual faults and the proposed FMPF to amend the system model with parameter uncertainty. To balance the system model precision and computation time, a Moving Window(MW) method is used to determine the applied historical statistics. The FMPF based FTC strategy is developed for the amended system model where the system estimation and Linear Quadratic Regulator(LQR) are updated at the end of system sampling period. The simulations of DRAS system subjected to multiple faults have been performed and the results indicate the effectiveness of the proposed approach. 展开更多
关键词 Dissimilar redundant actuation system Fault mode probability factor Fault-tolerant control Linear quadratic regulator Monte Carlo simulation Moving window
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Redundancy in Biology and Robotics:Potential of Kinematic Redundancy and its Interplay with Elasticity
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作者 Tom Verstraten Christian Schumacher +2 位作者 Rapha(e)l Furnémont Andre Seyfarth Philipp Beckerle 《Journal of Bionic Engineering》 SCIE EI CSCD 2020年第4期695-707,共13页
Redundancy facilitates some of the most remarkable capabilities of humans,and is therefore omni-present in our physiology.The relationship between redundancy in robotics and biology is investigated in detail on the Se... Redundancy facilitates some of the most remarkable capabilities of humans,and is therefore omni-present in our physiology.The relationship between redundancy in robotics and biology is investigated in detail on the Series Elastic Dual-Motor Actuator(SEDMA),an actuator inspired by the kinematic redundancy exhibited by myofibrils.The actuator consists of two motors coupled to a single spring at the output.Such a system has a redundant degree of freedom,which can be exploited to optimize aspects such as accuracy,impedance,fault-tolerance and energy efficiency.To test its potential for human-like motions,the SEDMA actuator is implemented in a hopping robot.Experiments on a physical demonstrator show that the robot's movement patterns resemble human squat jumps.We conclude that robots with bio-inspired actuator designs facilitate human-like movement,although current technical limitations may prevent them from reaching the same dynamic and energetic performance. 展开更多
关键词 BIOINSPIRED redundant actuation series elastic actuation hopping robots energy efficiency human physiology
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Closed-loop dynamic control allocation for aircraft with multiple actuators 被引量:5
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作者 Gai Wendong Wang Honglun 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2013年第3期676-686,共11页
A closed-loop control allocation method is proposed for a class of aircraft with multiple actuators. Nonlinear dynamic inversion is used to design the baseline attitude controller and derive the desired moment increme... A closed-loop control allocation method is proposed for a class of aircraft with multiple actuators. Nonlinear dynamic inversion is used to design the baseline attitude controller and derive the desired moment increment. And a feedback loop for the moment increment produced by the deflections of actuators is added to the angular rate loop, then the error between the desired and actual moment increment is the input of the dynamic control allocation. Subsequently, the stability of the closed-loop dynamic control allocation system is analyzed in detail. Especially, the closedloop system stability is also analyzed in the presence of two types of actuator failures: loss of effectiveness and lock-in-place actuator failures, where a fault detection subsystem to identify the actuator failures is absent. Finally, the proposed method is applied to a canard rotor/wing (CRW) aircraft model in fixed-wing mode, which has multiple actuators for flight control. The nonlinear simulation demonstrates that this method can guarantee the stability and tracking performance whether the actuators are healthy or fail. 展开更多
关键词 Canard rotor/wing aircraft Closed-loop control allocation Dynamic inversion Flight control systems Redundant actuators
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Motion synchronization in a dual redundant HA/EHA system by using a hybrid integrated intelligent control design 被引量:4
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作者 Waheed Ur Rehman Wang Shaoping +2 位作者 Wang Xingjian Fan Lei Kamran Ali Shah 《Chinese Journal of Aeronautics》 SCIE EI CAS CSCD 2016年第3期789-798,共10页
This paper presents an integrated fuzzy controller design approach to synchronize a dis- similar redundant actuation system of a hydraulic actuator (HA) and an electro-hydrostatic actu- ator (EHA) with system unce... This paper presents an integrated fuzzy controller design approach to synchronize a dis- similar redundant actuation system of a hydraulic actuator (HA) and an electro-hydrostatic actu- ator (EHA) with system uncertainties and disturbances. The motion synchronous control system consists of a trajectory generator, an individual position controller for each actuator, and a fuzzy force tracking controller (FFTC) for both actuators. The trajectory generator provides the desired motion dynamics and designing parameters of the trajectory which are taken according to the dynamic characteristics of the EHA. The position controller consists of a feed-forward controller and a fuzzy position tracking controller (FPTC) and acts as a decoupled controller, improving posi- tion tracking performance with the help of the feed-forward controller and the FPTC. The FFTC acts as a coupled controller and takes into account the inherent coupling effect. The simulation results show that the proposed controller not only eliminates initial force fighting by synchronizing the two actuators, but also improves disturbance rejection performance. 展开更多
关键词 Dissimilar redundant:Electro-hydrostatic actuator Fuzzy control:Hydraulic actuator Motion synchronization Redundant systems
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Novel homodyne frequency-shifting interference pattern locking system 被引量:4
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作者 朱煜 王磊杰 +3 位作者 张鸣 鲁森 杨开明 胡楚雄 《Chinese Optics Letters》 SCIE EI CAS CSCD 2016年第6期41-46,共6页
We present a novel homodyne frequency-shifting interference pattern locking system to enhance the exposure contrast of interference lithography and scanning beam interference lithography(SBIL). The novel interferenc... We present a novel homodyne frequency-shifting interference pattern locking system to enhance the exposure contrast of interference lithography and scanning beam interference lithography(SBIL). The novel interference pattern locking system employs a special homodyne redundant phase measurement interferometer(HRPMI) as the sensor and an acousto-opto modulator(AOM) as the actuator. The HRPMI offers the highly accurate value as well as the direction recognition of the interference pattern drift from four quadrature interference signals. The AOM provides a very fine resolution with a high speed for phase modulation. A compact and concise system with a short optical path can be achieved with this new scheme and a small power laser head in tens of microwatts is sufficient for exposure and phase locking, which results in a relatively low-cost system compared with the heterodyne system. More importantly, the accuracy of the system is at a high level as well as having robustness to environmental fluctuation. The experiment results show that the short-time(4 s) accuracy of the system is 0.0481 rad e3σT at present. Moreover, the phase of the interference pattern can also be set arbitrarily to any value with a high accuracy in a relatively large range, which indicates that the system can also be extended to the SBIL application. 展开更多
关键词 locking lithography drift robustness quadrature interferometer modulator fluctuation actuator redundant
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