To improve the energy resolution（？E） of Nb/Al superconducting tunnel junctions（STJs）, an ozone（O3） oxidation process has been developed to fabricate a thin defect-free tunnel barrier that simultaneously shows h...To improve the energy resolution（？E） of Nb/Al superconducting tunnel junctions（STJs）, an ozone（O3） oxidation process has been developed to fabricate a thin defect-free tunnel barrier that simultaneously shows high critical current JC〉 1000 A/cm^2 and high normalized dynamic resistance RDA 〉 100 MΩ·μm^2, where A is the size of the STJ. The 50-μm^2 STJs produced by O3 exposure of 0.26 Pa·min with an indirect spray of O3 gas, which is a much lower level of exposure than the O2 exposure used in a conventional O2 oxidation process, exhibit a maximum JC= 800 A/cm^2 and a high RDA = 372 MΩ ·μm^2. The 100-pixel array of the 100-μm^2STJs produced using the same O3 oxidation conditions exhibits a constant leak current I leak= 14.9 ± 3.2 n A at a bias point around △ /e（where e is half the energy gap of an STJ）,and a high fabrication yield of 87%. Although the I leak values are slightly larger than those of STJs produced using the conventional O2 oxidation process, the STJ produced using O3 oxidation shows a ？E = 10 eV for the C-Kα line, which is the best value of our Nb/Al STJ x-ray detectors.展开更多
Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrat...Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks： Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density （jc） and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.展开更多
文摘To improve the energy resolution（？E） of Nb/Al superconducting tunnel junctions（STJs）, an ozone（O3） oxidation process has been developed to fabricate a thin defect-free tunnel barrier that simultaneously shows high critical current JC〉 1000 A/cm^2 and high normalized dynamic resistance RDA 〉 100 MΩ·μm^2, where A is the size of the STJ. The 50-μm^2 STJs produced by O3 exposure of 0.26 Pa·min with an indirect spray of O3 gas, which is a much lower level of exposure than the O2 exposure used in a conventional O2 oxidation process, exhibit a maximum JC= 800 A/cm^2 and a high RDA = 372 MΩ ·μm^2. The 100-pixel array of the 100-μm^2STJs produced using the same O3 oxidation conditions exhibits a constant leak current I leak= 14.9 ± 3.2 n A at a bias point around △ /e（where e is half the energy gap of an STJ）,and a high fabrication yield of 87%. Although the I leak values are slightly larger than those of STJs produced using the conventional O2 oxidation process, the STJ produced using O3 oxidation shows a ？E = 10 eV for the C-Kα line, which is the best value of our Nb/Al STJ x-ray detectors.
基金supported by the Science Foundation of the Ministry of Science and Technology of China (Grant Nos. 2011CBA00106 and 2009CB929102)the National Natural Science Foundation of China (Grant Nos. 11104333,10974243,and 11161130519)the Knowledge Innovation Program of the Chinese Academy of Sciences
文摘Besides serving as promising candidates for realizing quantum computing, superconducting quantum circuits are one of a few macroscopic physical systems in which fundamental quantum phenomena can be directly demonstrated and tested, giving rise to a vast field of intensive research work both theoretically and experimentally. In this paper we report our work on the fabrication of superconducting quantum circuits, starting from its building blocks： Al/AlOx/Al Josephson junctions. By using electron beam lithography patterning and shadow evaporation, we have fabricated aluminum Josephson junctions with a controllable critical current density （jc） and wide range of junction sizes from 0.01 μm2 up to 1 μm2. We have carried out systematical studies on the oxidation process in fabricating Al/AlOx/Al Josephson junctions suitable for superconducting flux qubits. Furthermore, we have also fabricated superconducting quantum circuits such as superconducting flux qubits and charge-flux qubits.
