Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating

We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W.

A 32-channel 100 GHz wavelength division multiplexer by interleaving two silicon arrayed waveguide gratings

A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB.

Improved Performance of a Wavelength-Tunable Arrayed Waveguide Grating in Silicon on Insulator

The improved performance of a wavelength-tunable arrayed waveguide grating (AWG) is demonstrated, including the crosstalk, insertion loss and the wavelength tuning efficiency. A reduced impact of the fabrication process on the AWG is achieved by the design of bi-level tapers. The wavelength tuning of the AWG is achieved according to the thermo-optic effect of silicon, and uniform heating of the silicon waveguide layer is achieved by optimizing the heater design. The fabricated AWG shows a minimum crosstalk of 16 dB, a maximum insertion loss of 3.91 dB and a wavelength tuning efficiency of 8.92 nm/W, exhibiting a ～8 dB improvement of crosstalk, ～2.1 dB improvement of insertion loss and ～5 nm/W improvement of wavelength tuning efficiency, compared to our previous reported results.

Novel wavelength-accurate InP-based arrayed waveguide grating

A 13-channel, InP-based arrayed waveguide grating （AWG） is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail.

Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response

A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results.

Ultralow cross talk arrayed waveguide grating integrated with tunable microring filter array

The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced.

降低AWG插入损耗和串扰设计新方法(英文)

在AWG器件的设计中引入了抛物线型的楔形波导结构,根据过渡区理论优化了引入的抛物线型楔形结构的形状和尺寸.采用抛物线型楔形结构代替直线型楔形结构,AWG的插入损耗降低了2 dB左右.在优化参数时使输出/输入波导间距与阵列波导间距取不同的值,并使输出/输入波导间距适当增大,而阵列波导间距取较小值,这样使得串扰降至-30 dB以下且插入损耗保持在低水平.运用光束传播方法给出器件的输出光谱并证实了理论上预想的结果.

基于AWG的多通道光纤光栅传感解调系统

设计开发了一种基于陈列波导光栅（AWG）的多通道光纤光栅解调系统. 该系统由宽带光源、隔离器、耦合器、光环路器、光纤布拉格光栅（FBG）传感器、AWG、光电探测电路、调理放大电路、低通滤波电路和ARM控制电路等组成,采用光强法解调技术,对FBG 传感器的温度进行精确测量. 实验结果表明：该解调系统测量误差不大于±0.1 ℃,FBG 中心波长解调范围为1 545.30-1 560.50 nm, 可实现对4 通道的32 个FBG 传感器同时测量.

基于AWG的波分/时分复用FBG传感器网络研究

为了充分利用传感器网络在频域和时域上的丰富资源,提出了一种采用WDM/TDM的网络复用技术的新型分布式FBG传感器网络设计方案。将FBG传感器利用阵列波导光栅(AWG)进行波分复用,并利用程控光开关对波分复用信道中的每一个FBG传感器进行时分复用。网络中的传感器数量可达几百只。以可调法布里—珀罗(F-P)滤波器和数字信号处理器为核心的解调模块,通过布设的参考FBG能够对F-P滤波器特征曲线进行实时校正,提高了解调准确度。传感过程实现了自动化。该传感器网络可以对矿井、地下隧道等危险环境进行实时温度测量、预警,具有很好的应用前景。

用于阵列波导光栅(AWG)的材料及其特性分析

AWG器件是目前光通信元器件中重要的研究课题,而材料是决定AWG性能的基础。本文主要分析了硅基材料、聚合物和磷化铟基等材料在AWG制作技术中的材料特性与应用特点,同时展示了AWG在光通信领域中的应用前景。

基于AWG的OADM结构设计

光分插复用器 (OADM)是实现波长上下话路、灵活配置网络资源的关键网元设备之一 .因为阵列波导光栅 (AWG)在成本和综合性能方面具有很大的优越性而使其成为目前最适于作为 WDM复用器与解复用器以及构成 OADM的关键器件 .文章详细研究了基于AWG构建 OADM的不同结构组成 .主要研究了环回和折叠型两种结构 ,并给出了易于实现集成的平板形结构设计的不同方案 .

基于自聚焦平板波导的新型AWG理论研究

研究一种基于自聚焦平板波导的新型直波导阵列波导光栅(AWG)。介绍了自聚焦平板波导的结构:用几何光学法分析其光学特性,提出了二维半矢量有限差分光束传输法(SV FD-BPM)模拟光束在0.5节距自聚焦平板波导中先发散后会聚的传输过程,并介绍了这种基于自聚焦平板波导的直波导 AWG 的工作原理;最后设计了一个1×8的新型直波导 AWG 并用2D SV FD-BPM 对其进行了模拟,模拟结果显示该1×8的新型AWG 可以实现信道间隔为3.2 nm 的解复用功能。

基于Silica AWG的单纤三向器的微波设计

本文采用紫外固化胶将光纤、Silica基阵列波导光栅(AWG)、1310 nm激光器(LD)平台和1490 nm、1550 nm探测器(PD)平台混合集成为一新型单纤三向器(Triplexer)。其中,LD平台是由1310 nmLD、薄膜匹配电阻和50欧微带线(MSL)构成;PD平台是由两部分电路组成,一部分是由1490 nmPD、1.25Gb/s的跨阻放大器(TIA)和50欧MSL构成,另一部分是由1550 nmPD和50欧MSL构成。两个平台的基底都采用了镀金的硅片。小信号测试结果表明,LD在偏置电流为15 mA时的3dB带宽大约为4GHz;1490 nmPD部分接收电路3dB带宽大约为1.2GHz;1550 nmPD部分接收电路3dB带宽大约为1.9GHz。

AWG复用器的原理设计以及应用

介绍了阵列波导光栅(AWG)复用器的原理、结构设计、理论计算以及在制造工艺中的关键技术和应用前景.

Design and Fabrication of Polymer Arrayed Waveguide Grating

In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Then, a 9 X 9 polymer AWG is designed and thefabricating process are described . The cladding material is poly-methyl-methacrylate-co-glyciclylmethacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. Inorder to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen,an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabricationprocess. The measuring results indicate that the fabricated optical waveguide achieves single-modetransmission.

Characterization of Birefringence and Dispersion Properties in an Arrayed Waveguide Grating

We have characterized polarization dependent loss(PDL), differential group delay(DGD), and chromatic dispersion of an AWG and a simple method was proposed to estimate the chromatic dispersion from the measured DGD of the device.

16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides

A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of 5-8 dB, central channel＇s insertion loss of 2.2 dB, flee spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically.

Analysis of fabrication results for 17×17 polymer arrayed waveguide grating multiplexers with flat spectral responses

Based on transmission theory, a 17 x 17 polymer arrayed waveguide grating （AWG） multiplexer para meter optimization is performed, and the influence of the fabrication results on the transmission characteristics are analyzed. In this paper, we mainly discuss three of the main errors in the fabrication of polymer AWG devices. One is 3n 1, which is caused by the tuning of the core refractive index n 1, the second is 8b, which results from the rotating-coating of the core thickness b, and the other is the non-ideal core cross-section, which is caused by steam redissolution. The effects of the above fabrication errors on the transmission characteristics of the AWG device are investigated, and compensation techniques are proposed. By comparing the theoretical simulation and experimental results, the shift in the transmission spectrum is reduced by 0.028 nm, the 3 dB bandwidth is increased by about 0.036 nm, the insertion loss is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 1.5 dB.

基于AWG的光信号处理器的设计

在集成光波导器件阵列波导光栅的空间频域特性,即"分频成谱,合频成像"的频率特性基础上,运用频域综合法,在阵列波导光栅的频谱区引入不同的滤波函数,通过在阵列波导中部嵌入余弦振幅型光栅模片,设计出了光信号加减器;对中心阵列波导单元增加额外特定长度,从而引入π/2相位,设计出了相衬滤波器.

阵列波导光栅(AWG)与光纤列阵的自动化对接耦合技术研究

阵列波导光栅(AWG)与光纤列阵的对接耦合是AWG芯片模块化的核心工作。传统的对接耦合方法是利用手动调芯技术进行对接,但是这种技术存在耗时久,精度低等缺点。为此开发了一种采用质心调芯法和遗传算法的自动调芯耦合技术,该技术具有对准精度高、重复性好、效率高等优点。实验结果显示,使用这种自动调芯耦合技术制造出的48通道AWG器件每个通道的最大插入损耗为4.65dB,满足目前最大插入损耗小于5dB的行业标准。