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Polarization-Insensitive Silica on Silicon Arrayed Waveguide Grating Design 被引量:1
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作者 安俊明 李健 +4 位作者 郜定山 夏君磊 李建光 王红杰 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第11期1360-1363,共4页
A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The... A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer. 展开更多
关键词 silica on silicon arrayed waveguide grating stress BIREFRINGENCE polarization dependent wavelength numerical analysis
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A 32-channel 100 GHz wavelength division multiplexer by interleaving two silicon arrayed waveguide gratings 被引量:2
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作者 Changjian Xie Xihua Zou +3 位作者 Fang Zou Lianshan Yan Wei Pan Yong Zhang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第12期339-342,共4页
A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channe... A 32-channel wavelength division multiplexer with 100 GHz spacing is designed and fabricated by interleaving two silicon arrayed waveguide gratings(AWGs).It has a parallel structure consisting of two silicon 16-channel AWGs with200 GHz spacing and a Mach-Zehnder interferometer(MZI)with 200 GHz free spectral range.The 16 channels of one silicon AWG are interleaved with those of the other AWG in spectrum,but with an identical spacing of 200 GHz.For the composed wavelength division multiplexer,the experiment results reveal 32 wavelength channels in C-band,a wavelength spacing of 100 GHz,and a channel crosstalk lower than-15 dB. 展开更多
关键词 wavelength division multiplexer arrayed waveguide grating silicon photonics Mach-Zehnder interferometer
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Design and Fabrication of Polymer Arrayed Waveguide Grating 被引量:2
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作者 ZHANG Da ming, WANG Fei, ZHANG Zhen guo, ZHAO Yu, YI Mao bin, LIU Shi yong (State Key Laboratory of Integrated Optoelectronics, Jilin University, Changchun 130023, P.R.China) 《The Journal of China Universities of Posts and Telecommunications》 EI CSCD 2003年第2期11-15,共5页
In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Th... In this paper, based on the principle of Arrayed Waveguide Grating (AWG)theory, some important parameters are optimized for polymer AWG around the central wavelength of1.55μm with the wavelength spacing of 1.6 nm. Then, a 9 X 9 polymer AWG is designed and thefabricating process are described . The cladding material is poly-methyl-methacrylate-co-glyciclylmethacrylate (PMMA-GMA) and the core material is the mixture of PMMA-GMA and bis-phonel-A epoxy. Inorder to obtain a better shape of the waveguide after the Reactive Ion Etching (RIE) using oxygen,an aluminum mask is used on polymer instead of conventional photoresist as mask in the fabricationprocess. The measuring results indicate that the fabricated optical waveguide achieves single-modetransmission. 展开更多
关键词 arrayed waveguide grating POLYMER wavelength division multiplexing
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Design and fabrication of multi-channel photodetector array monolithic with arrayed waveguide grating 被引量:1
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作者 吕倩倩 潘盼 +4 位作者 叶焓 尹冬冬 王玉冰 杨晓红 韩勤 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第3期453-457,共5页
We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometr... We have provided optical simulations of the evanescently coupled waveguide photodiodes integrated with a 13- channels AWGs. The photodiode could exhibit high internal efficiency by appropriate choice of layers geometry and refrac- tive index. Aseamless joint structure has been designed and fabricated for integrating the output waveguides of AWGs with the evanescently coupled waveguide photodiode array. The highest simulation quantum efficiency could achieve 92% when the matching layer thickfiess of the PD is 120 nm and the insertion length is 2 μm. The fabricated PD with 320-nm-thick match.ing layer and 2-μm-length insertion matching layer present a responsivity of 0.87 A/W. 展开更多
关键词 photodetector array MONOLITHIC evanescent coupling arrayed waveguide grating
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Design and Analysis of 4×4 Arrayed Waveguide Grating Multiplexer 被引量:1
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作者 DINGYao-ming ZHANGGuo-ping 《Semiconductor Photonics and Technology》 CAS 2002年第2期65-69,79,共6页
The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring ar... The operation principle of an arrayed waveguide grating(AWG) multiplexer is introduced and the 4×4 AWG with following design parameters is discussed in detail, such as the choice of wavelength, the neighboring arrayed waveguide distance ΔL, the channel frequency interval Δf, and the free spectral range. The structure of 4×4 AWG is designed and the result of stimulated test is also given. Analysis shows that the 4×4 AWG is characterized by a wide dynamic range, low crosstalk, better spectrum properties, and a compact structure. 展开更多
关键词 arrayed waveguide grating Wavelength multiplex DESIGN
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Novel wavelength-accurate InP-based arrayed waveguide grating
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作者 潘盼 安俊明 +7 位作者 王红杰 王玥 张家顺 王亮亮 代红庆 张晓光 吴远大 胡雄伟 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期314-318,共5页
A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum ... A 13-channel, InP-based arrayed waveguide grating (AWG) is designed and fabricated in which the on-chip loss of the central channel is about -5 dB and the crosstalk is less than -23 dB in the center of the spectrum response. However, the central wavelength and channel spacing are deviated from the design values. To improve their accuracy, an optimized design is adopted to compensate the process error. As a result, the central wavelength 1549.9 nm and channel spacing 1.59 nm are obtained in the experiment, while their design values are 1549.32 nm and 1.6 nm, respectively. The route capability and thermo-optic characteristic of the AWG are also discussed in detail. 展开更多
关键词 arrayed waveguide grating wavelength accuracy thermo-optical characteristic ROUTER
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Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response
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作者 ZHANG Xi-Lin LIU Song Tao +2 位作者 LU Dan ZHANG Rui-Kang JI Chen 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期55-58,共4页
A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fab... A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results. 展开更多
关键词 AWG InP Design and Fabrication of a 400 GHz InP-Based arrayed waveguide grating with Flattened Spectral Response
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Fluorinated polymer with high thermal stability for fabrication of 32-channel arrayed waveguide grating multiplexer on silicon
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作者 王菲 李艾泽 +4 位作者 孙伟 衣茂斌 姜振华 刘式墉 张大明 《Journal of Central South University of Technology》 EI 2005年第4期366-369,共4页
A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared ab... A cross-linkable fluorinated poly (ether ether ketone) (FPEEK) was synthesized for the fabrication of arrayed waveguide grating (AWG) multiplexer. The results of thermal gravimetric analysis (TGA) and near-infrared absorption spectrum show that the materials have high thermal stability and high optical transparency in the infrared communication region. The refractive index of FPEEK can be controlled easily by changing the fluorine content of the materials. The 32-channel AWG multiplexer is fabricated using the FPEEK and oxygen reactive ion etching technology. The AWG multiplexer exhibits that the insertion loss is from 12.8 to 17.8 dB and the channel crosstalk is less than-20 dB. The wavelength channel spacing and the center wavelength are 0.8nm and 1548nm, respectively. 展开更多
关键词 wavelength division multiplexing arrayed waveguide grating fluorinated polymer poly (ether ether ketone)
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Influence of Crosstalk on Signal Power Based on Arrayed-waveguide Grating as N × N Optical Router
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作者 DING Yao ming, TONG Ju fang (Dept.of Phys.,Xiaogan University, Hubei 432100,CHN) 《Semiconductor Photonics and Technology》 CAS 2003年第3期170-177,共8页
The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the rando... The fact that the signal results in signal―crosstalk is confirmed forarrayed―waveguide grating as NXN optical router, and the relation between the crosstalk and powerpenalty is obtained. The method reveals the random distributions of optical path phase errors in twomultiplexers with channel numbers of 10 and 160. It is shown that the crosstalk must be less than―28 dB for a power penalty below 1 dB at a bit error rate of 1X10^(-9). It is found that when N =100, crosstalk power value is ? 20 dB with compensation power of 2―3 dB, so the compensation poweris not ignored. 展开更多
关键词 CROSSTALK arrayedwaveguide grating ROUTER bit error rate
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Ultralow cross talk arrayed waveguide grating integrated with tunable microring filter array
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作者 胡鹤鸣 刘世平 +3 位作者 李天文 范永杰 陈华 方青 《Chinese Optics Letters》 SCIE EI CAS CSCD 2024年第3期50-54,共5页
The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cro... The silicon-based arrayed waveguide grating(AWG)is widely used due to its compact footprint and its compatibility with the mature CMOS process.However,except for AWGs with ridged waveguides of a few micrometers of cross section,any small process error will cause a large phase deviation in other AWGs,resulting in an increasing cross talk.In this paper,an ultralow cross talk AWG via a tunable microring resonator(MRR)filter is demonstrated on the SOI platform.The measured insertion loss and minimum adjacent cross talk of the designed AWG are approximately 3.2 and-45.1 d B,respectively.Compared with conventional AWG,its cross talk is greatly reduced. 展开更多
关键词 SOI platform arrayed waveguide grating cross talk microring filter array thermo-optic effect
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Polymer Arrayed Waveguide Grating with Box-Like Spectral Response
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作者 秦政坤 马春生 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第12期2307-2310,共4页
An efficient technique is used to flatten the spectral response of an arrayed waveguide grating (AWG) multiplexer. By subtracting an increment from the core width of odd arrayed waveguides and by adding the same inc... An efficient technique is used to flatten the spectral response of an arrayed waveguide grating (AWG) multiplexer. By subtracting an increment from the core width of odd arrayed waveguides and by adding the same increment to that of even arrayed waveguides,a box-like spectral response can be obtained. A 17 × 17 polymer AWG multiplexer with box- like spectral response has been made using FPE polymer materials. Measured result for the AWG shows that the box-like spectral response has a 3dB bandwidth of 0. 476nm, the crosstalk is about or less than - 21dB for every output channel,and the insertion loss is 13-15dB. 展开更多
关键词 arrayed waveguide grating box-like spectral response 3dB bandwidth CROSSTALK
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Characterization of Birefringence and Dispersion Properties in an Arrayed Waveguide Grating 被引量:1
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作者 Jeong Hwan Song Oh Dal Kwon +2 位作者 Dong-Su Kim Sun Tae Jung Kyung Shik Lee 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期293-294,共2页
We have characterized polarization dependent loss(PDL), differential group delay(DGD), and chromatic dispersion of an AWG and a simple method was proposed to estimate the chromatic dispersion from the measured DGD of ... We have characterized polarization dependent loss(PDL), differential group delay(DGD), and chromatic dispersion of an AWG and a simple method was proposed to estimate the chromatic dispersion from the measured DGD of the device. 展开更多
关键词 of as AWG Characterization of Birefringence and Dispersion Properties in an arrayed waveguide grating PDL in
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Analysis of fabrication results for 17×17 polymer arrayed waveguide grating multiplexers with flat spectral responses 被引量:1
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作者 秦政坤 于跃 +4 位作者 宋佳 张会萍 王国峰 孙永欣 汪玉海 《Journal of Semiconductors》 EI CAS CSCD 2013年第9期82-85,共4页
Based on transmission theory, a 17 x 17 polymer arrayed waveguide grating (AWG) multiplexer para meter optimization is performed, and the influence of the fabrication results on the transmission characteristics are ... Based on transmission theory, a 17 x 17 polymer arrayed waveguide grating (AWG) multiplexer para meter optimization is performed, and the influence of the fabrication results on the transmission characteristics are analyzed. In this paper, we mainly discuss three of the main errors in the fabrication of polymer AWG devices. One is 3n 1, which is caused by the tuning of the core refractive index n 1, the second is 8b, which results from the rotating-coating of the core thickness b, and the other is the non-ideal core cross-section, which is caused by steam redissolution. The effects of the above fabrication errors on the transmission characteristics of the AWG device are investigated, and compensation techniques are proposed. By comparing the theoretical simulation and experimental results, the shift in the transmission spectrum is reduced by 0.028 nm, the 3 dB bandwidth is increased by about 0.036 nm, the insertion loss is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels, and the crosstalk is reduced by 1.5 dB. 展开更多
关键词 arrayed waveguide grating flat spectral response fabrication errors non-ideal core cross-section transmission spectrum
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16 channel 200 GHz arrayed waveguide grating based on Si nanowire waveguides 被引量:1
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作者 赵雷 安俊明 +3 位作者 张家顺 宋世娇 吴远大 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2011年第2期65-68,共4页
A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the... A 16 channel arrayed waveguide grating demultiplexer with 200 GHz channel spacing based on Si nanowire waveguides is designed. The transmission spectra response simulated by transmission function method shows that the device has channel spacing of 1.6 nm and crosstalk of 31 dB. The device is fabricated by 193 nm deep UV lithography in silicon-on-substrate. The demultiplexing characteristics are observed with crosstalk of 5-8 dB, central channel's insertion loss of 2.2 dB, flee spectral range of 24.7 nm and average channel spacing of 1.475 nm. The cause of the spectral distortion is analyzed specifically. 展开更多
关键词 integrated optics arrayed waveguide grating Si nanowire waveguides
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On-Chip Sub-Picometer Continuous Wavelength Fiber-Bragg-Grating Interrogator
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作者 Yuan ZHUANG Jun ZOU +4 位作者 Jiqiang ZHANG Lu ZHANG Jiahe ZHANG Leixin MENG Qing YANG 《Photonic Sensors》 SCIE EI CSCD 2024年第1期73-84,共12页
Miniaturized fiber-Bragg-grating(FBG)interrogators are of interest for applications in the areas where weight and size controlling is important,e.g.,airplanes and aerospace or in-situ monitoring.An ultra-compact high-... Miniaturized fiber-Bragg-grating(FBG)interrogators are of interest for applications in the areas where weight and size controlling is important,e.g.,airplanes and aerospace or in-situ monitoring.An ultra-compact high-precision on-chip interrogator is proposed based on a tailored arrayed waveguide grating(AWG)on a silicon-on-insulator(SOI)platform.The on-chip interrogator enables continuous wavelength interrogation from 1544 nm to 1568 nm with the wavelength accuracy of less than 1 pm[the root-mean-square error(RMSE)is 0.73 pm]over the whole wavelength range.The chip loss is less than 5 dB.The 1×16 AWG is optimized to achieve a large bandwidth and a low noise level at each channel,and the FBG reflection peaks can be detected by multiple output channels of the AWG.The fabricated AWG is utilized to interrogate FBG sensors through the center of gravity(CoG)algorithm.The validation of an on-chip FBG interrogator that works with sub-picometer wavelength accuracy in a broad wavelength range shows large potential for applications in miniaturized fiber optic sensing systems. 展开更多
关键词 Fiber optic sensing on-chip interrogator arrayed waveguide grating center of gravity
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Fabrication of 17×17 polymer/Si arrayed waveguide grating with flat spectral response using steam-redissolution technique
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作者 秦政坤 贺飞 +2 位作者 刘春玲 王立忠 马春生 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2010年第7期29-31,共3页
Arrayed waveguide grating(AWG) is a key device in the wavelength-division multiplexing(WDM) system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By u... Arrayed waveguide grating(AWG) is a key device in the wavelength-division multiplexing(WDM) system, and the flat spectral response of the AWG device is required.In this paper,the RIE process has been improved.By using the steam-redissolution technique,the insertion loss and the crosstalk have been reduced.Experimental results show that the central wavelength is 1550.86 nm,the channel spectral response flatness is about 1.5 dB,3-dB bandwidth is about 0.478 nm,insertion loss is 10.5 dB,and crosstalk is about-22 dB.The insertion loss of an AWG device is reduced by about 3 dB for the central channel and 4.5 dB for the edge channels,and the crosstalk is reduced by 2.5 dB after the steam-redissolution. 展开更多
关键词 arrayed waveguide grating flat spectral response steam-redissolution 3-dB bandwidth CROSSTALK
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Triplexers Based on SOI Flattop AWGs 被引量:1
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作者 安俊明 吴远大 +4 位作者 李健 王红杰 李建光 李俊一 胡雄伟 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2008年第8期1504-1506,共3页
Triplexers are designed based on SOl flattop arrayed waveguide gratings (AWGs). Three wavelengths (1310, 1490,and 1550nm) operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosst... Triplexers are designed based on SOl flattop arrayed waveguide gratings (AWGs). Three wavelengths (1310, 1490,and 1550nm) operate at three diffraction orders of AWGs. Simulation shows that the 3dB bandwidth,crosstalk, and loss are 6nm,less than -40dB, and 5dB, respectively. The output optical fields of the device fabricated in our laboratory are clear and show a good triplexing function. 展开更多
关键词 integrated optics arrayed waveguide grating TRIPLEXER
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Array Waveguide Grating Based Fiber Lasers
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作者 Shien-Kuei Liaw 《光学学报》 EI CAS CSCD 北大核心 2003年第S1期-,共2页
Two array waveguide grating (AWGs) based fiber ring lasers are experimentally demonstrated. Either of them achieves wavelength discrete tuning of 32 nm, or yields simultaneously lasing up to four channels with -7 dBm ... Two array waveguide grating (AWGs) based fiber ring lasers are experimentally demonstrated. Either of them achieves wavelength discrete tuning of 32 nm, or yields simultaneously lasing up to four channels with -7 dBm output power for each channel. 展开更多
关键词 AWG in be as Array waveguide grating Based Fiber Lasers of DBM HAVE for
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16-channel dual-tuning wavelength division multiplexer/demultiplexer
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作者 Pei Yuan Yue Wang +2 位作者 Yuan-Da Wu Jun-Ming An Xiong-Wei Hu 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第12期315-320,共6页
A 16-channel dual tuning wavelength division multiplexer/demultiplexer based on silicon on insulator platform is demonstrated, which is both peak wavelength tunable and output optical power tunable. The wavelength div... A 16-channel dual tuning wavelength division multiplexer/demultiplexer based on silicon on insulator platform is demonstrated, which is both peak wavelength tunable and output optical power tunable. The wavelength division multiplexer/demultiplexer consists of an arrayed waveguide grating for wavelength division multiplexing/demultiplexing, a heater for peak wavelength tuning and a variable optical attenuator based on p–i–n carrier-injection structure for optical power tuning. The experimental results show that the insertion loss on chip of the device is 3.7 dB–5.7 dB and the crosstalk is 7.5 dB–9 dB. For the tunability of the peak wavelength, 1.058-nm wavelength tunability is achieved with 271.2-mW power consumption, and the average modulation efficiency is 3.9244 nm/W; for the tunability of the optical power, the optical power equalization is achieved in all 16 channels, 20-dB attenuation is achieved with 144.07-mW power consumption,and the raise/fall time of VOA is 35 ns/42 ns. 展开更多
关键词 arrayed waveguide grating variable optical attenuator silicon photonics
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Analysis of Optical Signal Transmission Characteristics in AWG Multi/Demultiplexer with Electromagnetic Field Theory
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作者 GUO Ai-huang FU Jun-mei 《Semiconductor Photonics and Technology》 CAS 2003年第1期8-13,共6页
Based on the electromagnetic field theory, the optical signal transmission characteristics in input/output waveguides, slab waveguides and arrayed waveguides of the arrayed waveguide grating (AWG) multi/demultiplexer ... Based on the electromagnetic field theory, the optical signal transmission characteristics in input/output waveguides, slab waveguides and arrayed waveguides of the arrayed waveguide grating (AWG) multi/demultiplexer are analyzed. The relationship between the physical parameters such as geometry sizes and relative refractive index in AWG multi/demultiplexer and the optical signal transmission characteristics are discussed. This theoretical study can be used for optimizing the design and improving the performance of the AWG multi/demultiplexer. 展开更多
关键词 waveguide Optical signal transmission arrayed waveguide grating CLC number:TN929.11Document code:A
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