Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the ...Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the high profile accuracy and machining efficiency. The ultra-precision aspheric CNC grinding machine( UAG900) is presented by this paper,as well as its grinding capability. The hydrostatic bearings of high accuracy and stiffness are adopted by the linear and rotary motions to guarantee the mirror accuracy,material removal rate and subsurface damage. Disk type grinding wheel with arc edge is used. The material removal rate can be up to 360 mm3/ min to guarantee the machining efficiency during rough grinding using D180 diamond grinding wheel while the fine grinding is performed using D15 grinding wheel. It indicates that the grinding wheel radius measuring error is proportional to the profile error induced by the grinding path. The grinding step size is better to be 0. 01 mm for the reduction of the grinding movement accelerations and program length. The grinding path is planned and expressed based on the grinding mode according to the mirror shape. One540 mm×450 mm× 100 mm zerodur mirror is ground and re-ground using the measuring data acquired by the Leitz CMM. The final surface accuracy of P-V value is less than 5 μm after compensation grinding.展开更多
Shown is a possibility to make the image of a laser beam over a distance of 2.5 m, formed by the spherical multi-segment mirror installed in LHD, twice sharper by suitably adjusting the inclination of each segment mir...Shown is a possibility to make the image of a laser beam over a distance of 2.5 m, formed by the spherical multi-segment mirror installed in LHD, twice sharper by suitably adjusting the inclination of each segment mirror, which is equivalent to making the mirror surface aspherical. This will further enhance the attractiveness of a mirror-based Thomson scattering system.展开更多
Design method and procedures of computer-generated hologram （CGH） used for aspheric test are in- troduced in detail. For CGH phase calculation, virtual medium which has zero refractive index at given wavelength is u...Design method and procedures of computer-generated hologram （CGH） used for aspheric test are in- troduced in detail. For CGH phase calculation, virtual medium which has zero refractive index at given wavelength is used to model ideal aspheric wavefront. Reflective Fresnel zones located in a ring area concentric to the CGH structure is designed to reduce or eliminate alignment errors. Substrate figure error, pattern distortion, etching and duty cycle variations that influence the reconstructed wavefront are quantitatively analyzed in theory and corresponding error equations are obtained to guide the tolerance distribution during CGH fabricating. A design example is given and the uncertainty of t achieves λ20.展开更多
基金Sponsored by the National High Technology Research and Development Program(Grant No.2008AA042503)the National Science and Technology Major Project(Grant No.2013ZX04006011-201)
文摘Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the high profile accuracy and machining efficiency. The ultra-precision aspheric CNC grinding machine( UAG900) is presented by this paper,as well as its grinding capability. The hydrostatic bearings of high accuracy and stiffness are adopted by the linear and rotary motions to guarantee the mirror accuracy,material removal rate and subsurface damage. Disk type grinding wheel with arc edge is used. The material removal rate can be up to 360 mm3/ min to guarantee the machining efficiency during rough grinding using D180 diamond grinding wheel while the fine grinding is performed using D15 grinding wheel. It indicates that the grinding wheel radius measuring error is proportional to the profile error induced by the grinding path. The grinding step size is better to be 0. 01 mm for the reduction of the grinding movement accelerations and program length. The grinding path is planned and expressed based on the grinding mode according to the mirror shape. One540 mm×450 mm× 100 mm zerodur mirror is ground and re-ground using the measuring data acquired by the Leitz CMM. The final surface accuracy of P-V value is less than 5 μm after compensation grinding.
基金supported by the LHD project(NIFS09ULHH502)by the JSPS-CAS Core-University program in the field of 'Plasma and Nuclear Fusion'
文摘Shown is a possibility to make the image of a laser beam over a distance of 2.5 m, formed by the spherical multi-segment mirror installed in LHD, twice sharper by suitably adjusting the inclination of each segment mirror, which is equivalent to making the mirror surface aspherical. This will further enhance the attractiveness of a mirror-based Thomson scattering system.
基金the Ministerial Level Foundation (4645103030401)
文摘Design method and procedures of computer-generated hologram （CGH） used for aspheric test are in- troduced in detail. For CGH phase calculation, virtual medium which has zero refractive index at given wavelength is used to model ideal aspheric wavefront. Reflective Fresnel zones located in a ring area concentric to the CGH structure is designed to reduce or eliminate alignment errors. Substrate figure error, pattern distortion, etching and duty cycle variations that influence the reconstructed wavefront are quantitatively analyzed in theory and corresponding error equations are obtained to guide the tolerance distribution during CGH fabricating. A design example is given and the uncertainty of t achieves λ20.
