As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has...As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.展开更多
To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presente...To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.展开更多
在集成电路(Integrated Circuit,IC)制造行业中,自动物料搬运系统(Automatic Material Handling System,AMHS)有效地提高了生产速度、缩短了生产周期,因此设计AMHS具有重要意义。文章分析了AMHS控制功能要求,确定了电气控制总体方案,进...在集成电路(Integrated Circuit,IC)制造行业中,自动物料搬运系统(Automatic Material Handling System,AMHS)有效地提高了生产速度、缩短了生产周期,因此设计AMHS具有重要意义。文章分析了AMHS控制功能要求,确定了电气控制总体方案,进行了系统供配电方案设计,尤其是非接触供电,设计了关键设备的电气控制系统方案。通过分析实际装置的技术指标,表明所设计的300mm AMHS满足要求。展开更多
Overhead-hoist-transporters (OHTs) have become the most appropriate tools to transport wafer lots between inter-bay and intra-bay in united layouts of automated material handling systems (AMHSs) in 300 mm semiconducto...Overhead-hoist-transporters (OHTs) have become the most appropriate tools to transport wafer lots between inter-bay and intra-bay in united layouts of automated material handling systems (AMHSs) in 300 mm semiconductor wafer fabrications. To obtain a conflict-free scheduling solution, an intelligent multi-agent-based control system framework was built to support the AMHSs. And corresponding algorithms and rules were proposed to implement cooperation among agents. On the basis of the mentioned above, a time-constraint-based heuristic scheduling algorithm was presented to support the routing decision agent in searching the conflict-free shortest path. In the construction of the algorithm, the conflicted intervals of the k-shortest-route were identified with the time window theory. The most available path was chosen with an objective of the minimum completion time. The back tracking method was combined to finish the routing scheduling. Finally, experiments of the proposed method were simulated. The results show that the multi-agent framework is suitable and the proposed scheduling algorithm is feasible and valid.展开更多
基金Supported by National Natural Science Foundation of China(Grant No.51275307)
文摘As a key to improve the performance of the interbay automated material handling system （AMHS） in 300 mm semiconductor wafer fabrication system, the real- time overhead hoist transport （OHT） dispatching problem has received much attention. This problem is first formu- lated as a special form of assignment problem and it is proved that more than one solution will be obtained by Hungarian algorithm simultaneously. Through proposing and strictly proving two propositions related to the char- acteristics of these solutions, a modified Hungarian algo- rithm is designed to distinguish these solutions. Finally, a new real-time OHT dispatching method is carefully designed by implementing the solution obtained by the modified Hungarian algorithm. The experimental results of discrete event simulations show that, compared with con- ventional Hungarian algorithm dispatching method, the proposed dispatching method that chooses the solution with the maximum variance respectively reduces on average 4 s of the average waiting time and average lead time of wafer lots, and its performance is rather stable in multiple dif- ferent scenarios of the interbay AMHS with different quantities of shortcuts. This research provides an efficient real-time OHT dispatching mechanism for the interbay AMHS with shortcuts and bypasses.
基金National Natural Science Foundations of China(No.61273035,No.71071115)National High-Tech R&D Program for CIMS,China(No.2009AA043000)
文摘To quickly and accurately estimate the expected work-in-process (WIP)of material intersection points in continuous automated material handling systems (AMHSs) ,a queuing-based performance analytical model was presented for continuous flow transporters (CFTs) . In the modeling procedure which considered layout of crossovers and the variability of service time of turntables, an M /G /1 queuing model with multi-class customers and a non-preemptive priority M /G /1 queuing model with multi-class customers were introduced to accurately present the queuing WIP of each material intersection point and perform the analytical model. Finally,300 mm wafer fabrication facilities (fabs)with 24 bays were applied to evaluating the proposed model. Compared with results of an Arena simulation, the model performs well in evaluating the number of queuing WIP of the intersection points and overall system of CFTs in AMHSs.
基金National Natural Science Foundations of China(No. 61273035,No. 71071115)National High-Tech R&D Program for CIMS,China(No. 2009AA043000)
文摘Overhead-hoist-transporters (OHTs) have become the most appropriate tools to transport wafer lots between inter-bay and intra-bay in united layouts of automated material handling systems (AMHSs) in 300 mm semiconductor wafer fabrications. To obtain a conflict-free scheduling solution, an intelligent multi-agent-based control system framework was built to support the AMHSs. And corresponding algorithms and rules were proposed to implement cooperation among agents. On the basis of the mentioned above, a time-constraint-based heuristic scheduling algorithm was presented to support the routing decision agent in searching the conflict-free shortest path. In the construction of the algorithm, the conflicted intervals of the k-shortest-route were identified with the time window theory. The most available path was chosen with an objective of the minimum completion time. The back tracking method was combined to finish the routing scheduling. Finally, experiments of the proposed method were simulated. The results show that the multi-agent framework is suitable and the proposed scheduling algorithm is feasible and valid.
