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Balmer H_α,H_β and H_γ Spectral Lines Intensities in High-Power RF Hydrogen Plasmas 被引量:1
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作者 王松柏 雷光玖 +1 位作者 刘东平 杨思泽 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第3期219-222,共4页
Hα(Balmer-alpha), Hβ (Balmer-beta) and Hγ (Balmer-gamma) spectral line inten- sities in atomic hydrogen plasma are investigated by using a high-power RF source. The intensities of the Hα, Hβ and Hγ spectra... Hα(Balmer-alpha), Hβ (Balmer-beta) and Hγ (Balmer-gamma) spectral line inten- sities in atomic hydrogen plasma are investigated by using a high-power RF source. The intensities of the Hα, Hβ and Hγ spectral lines are detected by increasing the input power (0-6 kW) of ICPs (inductively coupled plasmas). With the increase of net input power, the intensity of Hα im- proves rapidly (0-2 kW), and then reaches its dynamic equilibrium; the intensities of Hβ can be divided into three processes: obvious increase (0-2 kW), rapid increase (2-4 kW), almost constant (4-6 kW); while the intensities of Hγ increase very slowly. The energy levels of the excited hydro- gen atoms and the splitting energy levels produced by an obvious Stark effect play an important role in the results. 展开更多
关键词 Keywords: high-power RF (radio frequency) source ICPs (inductively coupled plasmas) and spectral lines intensity boltzmann distribution law Stark effect transitionprobability
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