The electron swarm parameters including the density-normalized effective ionization coefficients(α-η)/N and the electron drift velocities V e are calculated for a gas mixture of CF3I with N2 and CO2 by solving the...The electron swarm parameters including the density-normalized effective ionization coefficients(α-η)/N and the electron drift velocities V e are calculated for a gas mixture of CF3I with N2 and CO2 by solving the Boltzmann equation in the condition of a steady-state Townsend(SST) experiment.The overall density-reduced electric field strength is from 100 Td to 1000 Td(1 Td = 10-17V·cm2),while the CF3I content k in the gas mixture can be varied over the range from 0% to 100%.From the variation of(αη)/N with the CF3I mixture ratio k,the limiting field strength(E/N) lim for each CF3I concentration is derived.It is found that for the mixtures with 70% CF3I,the values of(E/N) lim are essentially the same as that for pure SF 6.Additionally,the global warming potential(GWP) and the liquefaction temperature of the gas mixtures are also taken into account to evaluate the possibility of application in the gas insulation of power equipment.展开更多
CF3I gas mixtures have attracted considerable attention as potential environmentally-friendly alternatives to SF6 gas,owing to their excellent insulating performance.This paper attempts to study the CF3I ternary gas m...CF3I gas mixtures have attracted considerable attention as potential environmentally-friendly alternatives to SF6 gas,owing to their excellent insulating performance.This paper attempts to study the CF3I ternary gas mixtures with c-C4F8 and buffer gases N2 and CO2 by considering dielectric strength from electron transport parameters based on the Boltzmann method and synergistic effect analysis,compared with SF6 gas mixtures.The results confirm that the critical electric field strength of CF3I/c-C4F8/70%CO2 is greater than that of 30%SF6/70%CO2 when the CF3I content is greater than 17%.Moreover,a higher content of c-C4F8 decreases the sensitivity of gas mixtures to an electric field,and this phenomenon is more obvious in CF3I/c-C4F8/CO2 gas mixtures.The synergistic effects for CF3I/c-C4F8/70%N2 were most obvious when the c-C4F8 content was approximately 20%,and for CF3I/c-C4F8/70%CO2 when the c-C4F8 content was approximately 10%.On the basis of this research,CF3I/c-C4F8/70%N2 shows better insulation performance when the c-C4F8 content is in the15%–20%range.For CF3I/c-C4F8/70%CO2,when the c-C4F8 content is in the 10%–15%range,the gas mixtures have excellent performance.Hence,these gas systems might be used as alternative gas mixtures to SF6 in high-voltage equipment.展开更多
Trifluoroiodomethane(CF_3I) and its mixtures are believed to be prospective alternatives to sulfur hexafluoride(SF6), which has been included as a greenhouse gas. In this paper, the breakdown properties of a CF_3I/N_2...Trifluoroiodomethane(CF_3I) and its mixtures are believed to be prospective alternatives to sulfur hexafluoride(SF6), which has been included as a greenhouse gas. In this paper, the breakdown properties of a CF_3I/N_2/CO_2 mixture with the volume fraction of CF_3I fixed at 10% are investigated under power frequency and lightning impulse voltages. The experimental result shows that N_2 possesses higher power frequency and negative lightning impulse breakdown voltages than CO_2, but the power frequency and more negative lightning impulse breakdown voltages of the CF_3I/N_2/CO_2 mixture do not increase with the content of N_2. For the purpose of explaining this abnormal phenomenon, the ionization energies and excitation energies of CF_3I,N_2and CO_2 are calculated. The computation results indicate that the ionization energy of CF_3I is lower than the first excitation energy of N_2, but higher than the lowest excitation energy of CO_2,which means that CF_3I molecules are easily ionized by metastable N_2 molecules. The first excitation energy of N_2 is too high, which hinders its application as the buffer gas of CF_3I.展开更多
CF3I is a potential SF6 alternative gas.In order to study the insulation properties and synergistic effects of CF3I/N2 and CF3I/CO2 gas mixtures,two-term approximate Boltzmann equations were used to obtain the ionizat...CF3I is a potential SF6 alternative gas.In order to study the insulation properties and synergistic effects of CF3I/N2 and CF3I/CO2 gas mixtures,two-term approximate Boltzmann equations were used to obtain the ionization coefficient α,attachment coefficient η and the critical equivalent electrical field strength(E/N)(cr).The results show that the(E/N)(cr)of CF3I gas at 300 K is 1.2 times that of SF6 gas,and CF3I/N2 and CF3I/CO2 gas mixtures both have synergistic effect occurred.The synergistic effect coefficient of CF3I/CO2 gas mixture was higher than that of CF3I/N2 gas mixture.But the(E/N)(cr)of CF3I/N2 is higher than that of CF3I/CO2 under the same conditions.When the content of CF3I exceeds 20%,the (E/N)(cr) of CF3I/N2 and CF3I/CO2 gas mixture increase linearly with the increasing of CF3I gas content.The breakdown voltage of CF3I/N2 gas mixture is also higher than that of CF3I/CO2 gas mixture in slightly non-uniform electrical field under power frequency voltage,but the synergistic effect coefficients of the two gas mixtures are basically the same.展开更多
We calculated the uniform dielectric breakdown field strength of residual 30% CF3I/CO2 gas mixtures during the arc extinction process over the temperature range 300-3500 K at 0.1 MPa. The limiting reduced field streng...We calculated the uniform dielectric breakdown field strength of residual 30% CF3I/CO2 gas mixtures during the arc extinction process over the temperature range 300-3500 K at 0.1 MPa. The limiting reduced field strengths are decided by a balance of electron generation and loss based on chemical reactions estimated by the electron energy distribution function (EEDF), which employs the Boltzmann equation method with two-term expanding approximation in the steady-state Townsend (SST) condition. During the insulation recovery phase, the hot CF3I/CO2 gas mixtures have maximum dielectric strength at a temperature of about 1500 K. At room temperature 300 K, the electric strength after arc extinction (90.3 Td, 1 Td=10-21 V.m2) is only 38% of the original value before arc (234.9 Td). The adverse insulation recovery ability of CF3I/CO2 gas mixtures in arc extinction hinders its application in electric circuit breakers and other switchgears as an arc quenching and insulating medium.展开更多
A solid ternary mixture consisting of NaF,silicon and one metal oxide such as La2O3,CeO2,Pr6O11,Nd2O3,and Y2O3 was prepared and usedas de-fluorinated reagent for CF4 decomposition.The results show that 90% conversion ...A solid ternary mixture consisting of NaF,silicon and one metal oxide such as La2O3,CeO2,Pr6O11,Nd2O3,and Y2O3 was prepared and usedas de-fluorinated reagent for CF4 decomposition.The results show that 90% conversion of CF4 can be reached initially over NaF-Si-La2O3,NaF-Si-CeO2,NaF-Si-Nd2O3,and NaF-Si-Y2O3 at 850 C.The fresh and used reagents were characterized using XRD and XPS techniques.It was found that the active components of NaF and metal oxides in NaF-Si-CeO2,NaF-Si-Pr6O11,NaF-Si-Nd2O3,and NaF-Si-Y2O3 weretransformed into inert phases of mixed metal fluorides and silicates,respectively,resulting in an ineffective utilization of these de-fluorinatedreagents,whereas no inert phases from NaF and La2O3 can be observed in the used NaF-Si-La2O3,indicating the NaF-Si-La2O3 reagent couldbe utilized more efficiently than the other reagents in CF4 decomposition.展开更多
The dynamics of negative surface discharges in c-C_(4)F_(8)/CF_(3)I/CO_(2) gas mixture is investigated here with a 2D fuid model.The distributions of ion concentration,electric field strength and photon flux during th...The dynamics of negative surface discharges in c-C_(4)F_(8)/CF_(3)I/CO_(2) gas mixture is investigated here with a 2D fuid model.The distributions of ion concentration,electric field strength and photon flux during the propagation of the streamer are obtained by solving the drift-diffusion equations of particles and Poisson's equation,and the photon flux variation function during the propagation is also fitted.It is found that the streamer branches occur when the streamer transitions from the upper surface of the insulator to the side surface,and then when the streamer approaches the plane electrode,the photon flux will increase significantly.On this basis,the positive and negative surface discharge models are compared in terms of streamer characteristics,particle characteristics and streamer branches.It is found that the streamer has a higher electron concentration and electric field in the positive model.The streamer develops“floating”in the positive surface discharge,while it is close to the surface of the insulator in the negative model.In addition,the negative streamer branch has a wider width and develops further.展开更多
The dry etching characteristic of AlSbTe film was investigated by using a CF/Ar gas mixture.The experimental control parameters were gas flow rate into the chamber,CF/Ar ratio,the Oaddition,the chamber background pres...The dry etching characteristic of AlSbTe film was investigated by using a CF/Ar gas mixture.The experimental control parameters were gas flow rate into the chamber,CF/Ar ratio,the Oaddition,the chamber background pressure,and the incident RF power applied to the lower electrode.The total flow rate was 50 sccm and the behavior of etch rate of AlSbTe thin films was investigated as a function of the CF/Ar ratio,the Oaddition,the chamber background pressure,and the incident RF power.Then the parameters were optimized.The fast etch rate was up to 70.8 nm/min and a smooth surface was achieved using optimized etching parameters of CFconcentration of 4%,power of 300 W and pressure of 80 mTorr.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant No. 51177101)
文摘The electron swarm parameters including the density-normalized effective ionization coefficients(α-η)/N and the electron drift velocities V e are calculated for a gas mixture of CF3I with N2 and CO2 by solving the Boltzmann equation in the condition of a steady-state Townsend(SST) experiment.The overall density-reduced electric field strength is from 100 Td to 1000 Td(1 Td = 10-17V·cm2),while the CF3I content k in the gas mixture can be varied over the range from 0% to 100%.From the variation of(αη)/N with the CF3I mixture ratio k,the limiting field strength(E/N) lim for each CF3I concentration is derived.It is found that for the mixtures with 70% CF3I,the values of(E/N) lim are essentially the same as that for pure SF 6.Additionally,the global warming potential(GWP) and the liquefaction temperature of the gas mixtures are also taken into account to evaluate the possibility of application in the gas insulation of power equipment.
基金supported by National Natural Science Foundation of China(No.51337006)。
文摘CF3I gas mixtures have attracted considerable attention as potential environmentally-friendly alternatives to SF6 gas,owing to their excellent insulating performance.This paper attempts to study the CF3I ternary gas mixtures with c-C4F8 and buffer gases N2 and CO2 by considering dielectric strength from electron transport parameters based on the Boltzmann method and synergistic effect analysis,compared with SF6 gas mixtures.The results confirm that the critical electric field strength of CF3I/c-C4F8/70%CO2 is greater than that of 30%SF6/70%CO2 when the CF3I content is greater than 17%.Moreover,a higher content of c-C4F8 decreases the sensitivity of gas mixtures to an electric field,and this phenomenon is more obvious in CF3I/c-C4F8/CO2 gas mixtures.The synergistic effects for CF3I/c-C4F8/70%N2 were most obvious when the c-C4F8 content was approximately 20%,and for CF3I/c-C4F8/70%CO2 when the c-C4F8 content was approximately 10%.On the basis of this research,CF3I/c-C4F8/70%N2 shows better insulation performance when the c-C4F8 content is in the15%–20%range.For CF3I/c-C4F8/70%CO2,when the c-C4F8 content is in the 10%–15%range,the gas mixtures have excellent performance.Hence,these gas systems might be used as alternative gas mixtures to SF6 in high-voltage equipment.
基金financially supported by grants from National Natural Science Foundation of China (No. 51337006)the Science and Technology Project of SGCC ‘Research on SF6 Alternative Gas for Insulation and Arc Quenching Application’
文摘Trifluoroiodomethane(CF_3I) and its mixtures are believed to be prospective alternatives to sulfur hexafluoride(SF6), which has been included as a greenhouse gas. In this paper, the breakdown properties of a CF_3I/N_2/CO_2 mixture with the volume fraction of CF_3I fixed at 10% are investigated under power frequency and lightning impulse voltages. The experimental result shows that N_2 possesses higher power frequency and negative lightning impulse breakdown voltages than CO_2, but the power frequency and more negative lightning impulse breakdown voltages of the CF_3I/N_2/CO_2 mixture do not increase with the content of N_2. For the purpose of explaining this abnormal phenomenon, the ionization energies and excitation energies of CF_3I,N_2and CO_2 are calculated. The computation results indicate that the ionization energy of CF_3I is lower than the first excitation energy of N_2, but higher than the lowest excitation energy of CO_2,which means that CF_3I molecules are easily ionized by metastable N_2 molecules. The first excitation energy of N_2 is too high, which hinders its application as the buffer gas of CF_3I.
基金supported by National Natural Science Foundation of China (Grant No.51337006)China Postdoctoral Science Foundation (2016M602728)the Science and Technology Project of SGCC ‘Research on SF_6 Alternative Gas for Insulation and Arc Quenching Application’
文摘CF3I is a potential SF6 alternative gas.In order to study the insulation properties and synergistic effects of CF3I/N2 and CF3I/CO2 gas mixtures,two-term approximate Boltzmann equations were used to obtain the ionization coefficient α,attachment coefficient η and the critical equivalent electrical field strength(E/N)(cr).The results show that the(E/N)(cr)of CF3I gas at 300 K is 1.2 times that of SF6 gas,and CF3I/N2 and CF3I/CO2 gas mixtures both have synergistic effect occurred.The synergistic effect coefficient of CF3I/CO2 gas mixture was higher than that of CF3I/N2 gas mixture.But the(E/N)(cr)of CF3I/N2 is higher than that of CF3I/CO2 under the same conditions.When the content of CF3I exceeds 20%,the (E/N)(cr) of CF3I/N2 and CF3I/CO2 gas mixture increase linearly with the increasing of CF3I gas content.The breakdown voltage of CF3I/N2 gas mixture is also higher than that of CF3I/CO2 gas mixture in slightly non-uniform electrical field under power frequency voltage,but the synergistic effect coefficients of the two gas mixtures are basically the same.
基金supported by National Natural Science Foundation of China(No.10875093)
文摘We calculated the uniform dielectric breakdown field strength of residual 30% CF3I/CO2 gas mixtures during the arc extinction process over the temperature range 300-3500 K at 0.1 MPa. The limiting reduced field strengths are decided by a balance of electron generation and loss based on chemical reactions estimated by the electron energy distribution function (EEDF), which employs the Boltzmann equation method with two-term expanding approximation in the steady-state Townsend (SST) condition. During the insulation recovery phase, the hot CF3I/CO2 gas mixtures have maximum dielectric strength at a temperature of about 1500 K. At room temperature 300 K, the electric strength after arc extinction (90.3 Td, 1 Td=10-21 V.m2) is only 38% of the original value before arc (234.9 Td). The adverse insulation recovery ability of CF3I/CO2 gas mixtures in arc extinction hinders its application in electric circuit breakers and other switchgears as an arc quenching and insulating medium.
基金supported by the National Natural Science Foundation of China (No. 20976149)
文摘A solid ternary mixture consisting of NaF,silicon and one metal oxide such as La2O3,CeO2,Pr6O11,Nd2O3,and Y2O3 was prepared and usedas de-fluorinated reagent for CF4 decomposition.The results show that 90% conversion of CF4 can be reached initially over NaF-Si-La2O3,NaF-Si-CeO2,NaF-Si-Nd2O3,and NaF-Si-Y2O3 at 850 C.The fresh and used reagents were characterized using XRD and XPS techniques.It was found that the active components of NaF and metal oxides in NaF-Si-CeO2,NaF-Si-Pr6O11,NaF-Si-Nd2O3,and NaF-Si-Y2O3 weretransformed into inert phases of mixed metal fluorides and silicates,respectively,resulting in an ineffective utilization of these de-fluorinatedreagents,whereas no inert phases from NaF and La2O3 can be observed in the used NaF-Si-La2O3,indicating the NaF-Si-La2O3 reagent couldbe utilized more efficiently than the other reagents in CF4 decomposition.
基金the National Natural Science Foundation of China(No.62075045)。
文摘The dynamics of negative surface discharges in c-C_(4)F_(8)/CF_(3)I/CO_(2) gas mixture is investigated here with a 2D fuid model.The distributions of ion concentration,electric field strength and photon flux during the propagation of the streamer are obtained by solving the drift-diffusion equations of particles and Poisson's equation,and the photon flux variation function during the propagation is also fitted.It is found that the streamer branches occur when the streamer transitions from the upper surface of the insulator to the side surface,and then when the streamer approaches the plane electrode,the photon flux will increase significantly.On this basis,the positive and negative surface discharge models are compared in terms of streamer characteristics,particle characteristics and streamer branches.It is found that the streamer has a higher electron concentration and electric field in the positive model.The streamer develops“floating”in the positive surface discharge,while it is close to the surface of the insulator in the negative model.In addition,the negative streamer branch has a wider width and develops further.
基金supported by National Key Basic Research Program of China(Nos.2010CB934300,2011CBA00607,2011CB932800)the National Integrated Circuit Research Program of China(No.2009ZX02023-003)+1 种基金the National Natural Science Foundation of China(Nos.60906004, 60906003,61006087,61076121)the Science and Technology Council of Shanghai,China(No.1052nm07000)
文摘The dry etching characteristic of AlSbTe film was investigated by using a CF/Ar gas mixture.The experimental control parameters were gas flow rate into the chamber,CF/Ar ratio,the Oaddition,the chamber background pressure,and the incident RF power applied to the lower electrode.The total flow rate was 50 sccm and the behavior of etch rate of AlSbTe thin films was investigated as a function of the CF/Ar ratio,the Oaddition,the chamber background pressure,and the incident RF power.Then the parameters were optimized.The fast etch rate was up to 70.8 nm/min and a smooth surface was achieved using optimized etching parameters of CFconcentration of 4%,power of 300 W and pressure of 80 mTorr.