Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the s...Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.展开更多
采用等离子体增强化学气相沉积(PECVD)在不同衬底温度(常温、50、100、150、200℃)下制备了碳氮(CNx)薄膜,并对其形貌、结构及光学性能进行了研究。通过扫描电镜得出随着衬底温度的升高,薄膜由疏松逐渐变得致密。X射线光电子能谱分析表...采用等离子体增强化学气相沉积(PECVD)在不同衬底温度(常温、50、100、150、200℃)下制备了碳氮(CNx)薄膜,并对其形貌、结构及光学性能进行了研究。通过扫描电镜得出随着衬底温度的升高,薄膜由疏松逐渐变得致密。X射线光电子能谱分析表明:薄膜的结合健有sp^2C=C、sp^3C-C、sp^2C=N和sp^3C-N。随着衬底温度的升高,sp^2C=C的比例没有明显变化,sp3C-C比例逐渐增大(28.6%~36.4%),sp^3C-N的比例也逐渐增大(21.4%~33.4%),而sp^2C=N的比例减小(40.2%~21%)。反射光谱和吸收光谱显示:随着衬底温度的升高,薄膜在200~800 nm波段内的反射率增大(8%~40%),吸收率减小(92%~60%)。进一步推导得到薄膜的光学带隙随着衬底温度的升高而增大(2.5~3.57 e V),主要由薄膜中sp^2C=N减少导致的。本文实现了对CN_x薄膜在紫外可见波段范围内的光学带隙的调控。展开更多
The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were stud...The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C-C, sp2C-N, and sp3C-N. The TiN inter-layer cause the adhesion of CNx films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCrl5 steel balls, but the wear rates decreased.展开更多
文摘Carbon nitride thin films were prepared by electron-beam evaporation assisted with nitrogen ion bombardment and TiN/CNx composite films were by unbalanced dc magnetron sputtering, respectively. It was found that the sputtered films were better than the evaporated films in hardness and adhesion. The experiments of atomic oxygen action, cold welding, friction and wearing were emphasized, and the results proved that the sputtered TiN/CNx composite films were suitable for space application.
文摘采用等离子体增强化学气相沉积(PECVD)在不同衬底温度(常温、50、100、150、200℃)下制备了碳氮(CNx)薄膜,并对其形貌、结构及光学性能进行了研究。通过扫描电镜得出随着衬底温度的升高,薄膜由疏松逐渐变得致密。X射线光电子能谱分析表明:薄膜的结合健有sp^2C=C、sp^3C-C、sp^2C=N和sp^3C-N。随着衬底温度的升高,sp^2C=C的比例没有明显变化,sp3C-C比例逐渐增大(28.6%~36.4%),sp^3C-N的比例也逐渐增大(21.4%~33.4%),而sp^2C=N的比例减小(40.2%~21%)。反射光谱和吸收光谱显示:随着衬底温度的升高,薄膜在200~800 nm波段内的反射率增大(8%~40%),吸收率减小(92%~60%)。进一步推导得到薄膜的光学带隙随着衬底温度的升高而增大(2.5~3.57 e V),主要由薄膜中sp^2C=N减少导致的。本文实现了对CN_x薄膜在紫外可见波段范围内的光学带隙的调控。
基金supported by the International Science and Technology Cooperation Program of China(No. 2008DFA51470)
文摘The microstructure, mechanical, and tribological properties of the carbon nitride （CNx） thin films with different nitrogen contents deposited on high-speed steel substrates by reactive magnetron sputtering were studied. CNx films with nitrogen contents from 10.7 to 28.2 at.% had an amorphous structure composing of the carbon bonds of sp2C-C, sp2C-N, and sp3C-N. The TiN inter-layer cause the adhesion of CNx films enhancement. The more nitrogen concentration led to larger film hardness and friction coefficient against GCrl5 steel balls, but the wear rates decreased.
