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PVT法掺钒SiC单晶生长电阻率变化规律研究
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作者 洪颖 冯玢 +3 位作者 王磊 吴华 郭俊敏 杜萍 《电子工业专用设备》 2012年第6期31-34,共4页
在采用COREMA方法测试SiC晶片电阻率时发现同一晶片电阻率相差较大,主要体现在高阻(>105Ω.cm量级)和低阻(<105量级)并存,有的甚至超高阻(>1012量级)和低阻并存,针对这一测试结果,开展了相关的实验研究,SiC单晶半绝缘性能的实... 在采用COREMA方法测试SiC晶片电阻率时发现同一晶片电阻率相差较大,主要体现在高阻(>105Ω.cm量级)和低阻(<105量级)并存,有的甚至超高阻(>1012量级)和低阻并存,针对这一测试结果,开展了相关的实验研究,SiC单晶半绝缘性能的实现是通过在单晶生长过程中掺入深能级杂质V来补偿浅施主N和浅受主B,利用二次质谱(SIMS)对同一晶片不同区域的杂质元素V、N和B含量进行测试,结果发现晶片中V和N的含量都在1×1017量级时会出现同一晶片不同区域电阻率相差较大的情况,而当V含量在1×1017量级,N含量在5×1016量级以下时,可制备电阻率均匀性好的半绝缘SiC单晶。 展开更多
关键词 SIC 电阻率 均匀性 corema SIMS
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半绝缘SiC单晶电阻率均匀性研究 被引量:2
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作者 王香泉 洪颖 +3 位作者 吴华 冯玢 郝建民 严如岳 《半导体技术》 CAS CSCD 北大核心 2010年第2期121-124,共4页
采用非接触电阻率面分布(COREMA)方法对本实验室生长得到的2英寸(50mm)4H和6H晶型半绝缘SiC单晶片进行电阻率测试,结果发现数据的离散性大,低者低于测试系统下限10^5Ω·cm高者高于其上限10^12Ω·cm,甚至在同一晶片内... 采用非接触电阻率面分布(COREMA)方法对本实验室生长得到的2英寸(50mm)4H和6H晶型半绝缘SiC单晶片进行电阻率测试,结果发现数据的离散性大,低者低于测试系统下限10^5Ω·cm高者高于其上限10^12Ω·cm,甚至在同一晶片内会出现小于10^5Ω·cm,10^5~10^12Ω·cm和大于10^12^12Ω·cm的不同区域,而有的晶片则电阻率的均匀性较好。将SiC电阻率测试结果与二次离子质谱(SIMS)对晶体内主要杂质V,B和N含量测试结果相结合,初步探讨得到引起掺钒SiC单晶电阻率的高低及均匀性的变化由补偿方式决定,在深受主补偿浅施主模式下,V的浓度控制在2×10^16-3×10^17cm-3,N的浓度控制在1×10^16cm-3左右,深受主钒充分补偿浅施主氮,制备得到的SiC单晶具有半绝缘性,且电阻率均匀性好。 展开更多
关键词 碳化硅 电阻率 均匀性 非接触电阻率面分布 二次离子质谱
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Understanding plant drought resistance in a Mediterranean coastal sand dune ecosystem:differences between native and exotic invasive species 被引量:5
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作者 Cristina Antunes Ana Júlia Pereira +4 位作者 Patrícia Fernandes Margarida Ramos Lia Ascensão Otília Correia Cristina Máguas 《Journal of Plant Ecology》 SCIE CSCD 2018年第1期26-38,共13页
Aims Mediterranean coastal dunes are habitats of great conservation interest,with a distinctive and rich flora.In the last century,Acacia spp.,native from Australia,have been introduced in Portugal,with the objective ... Aims Mediterranean coastal dunes are habitats of great conservation interest,with a distinctive and rich flora.In the last century,Acacia spp.,native from Australia,have been introduced in Portugal,with the objective of stabilizing sand dunes,and since have become dominant in numerous sand dune habitats.This invasion process led to the reduction of native plant species richness,changed soil characteristics and modified habitat’s microclimatic char-acteristics.The aim of this research was to typify and compare,in Mediterranean sand dune ecosystems,the ecophysiological responses to drought of Helichrysum italicum and Corema album,two native species,and Acacia longifolia,an exotic invasive spe-cies.We addressed the following specific objectives:(i)to com-pare water relations and water use efficiencies,(ii)to evaluate water stress,(iii)to assess water use strategies and water sources used by plants and(iv)to evaluate the morphological adaptations at leaf and phyllode level.Methods In order to obtain an integrative view of ecophysiological patterns,water relations and performance measuring methods have been applied:predawn(ψPD)and midday(ψMD)water potential,chloro-phyll a fluorescence,oxygen isotopic composition of xylem,rain and groundwater(δ18O)and leaf carbon isotopic discrimination(Δ13C).The leaf characteristics of the three species,as well as the histochemistry of non-glandular trichome cell walls,were also studied to identify morpho-traits related to drought resistance.Important Findings The results support our initial hypothesis:although A.longifolia clearly possesses a degree of resistance to water stress,such ability is provided by a different water strategy,when compared to native species.Natives relied on morphological adaptations to restrict water loss,whereas the invasive species adjusted the water uptake as a way to balance their limited ability of restricting water loss.We corroborate that woody native species(i)have a conservative water-saving strategy and minor seasonal variations relative to invasive species,(ii)use enriched water sources during drought periods,indicating different water sources and root systems com-paring with invasive species and(iii)present drought leaf morpho-functional adaptations related with limiting water loss.Comparing the physiological performance of invasive and native species can offer causal explanations for the relative success of alien plant invasions on sand dunes ecosystems. 展开更多
关键词 ECOPHYSIOLOGY water use strategy leaf morphology Acacia longifolia corema album Helichrysum italicum
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