This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical syst...This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical systems(MEMS)disk resonators through analysis and simulation.These parameters include the crystallographic orientation,dopant,substrate thickness,and temperature.The resonators operate in the elliptical,higher order,and flexural modes.The simulation results show that i)the turnover points of the resonators exist at 55°C,-50°C,40°C,and-10°C for n-doped silicon with the doping concentration of 2×1019 cm-3 and the Si thickness of 3.5μm,and these points are shifted with the substrate thickness and mode variations;ii)compared with pure Si,the modal-frequency splitting for n-doped Si is higher and increases from 5%to 10%for all studied modes;iii)Q of the resonators depends on the temperature and dopant.Therefore,the turnover,modal-frequency splitting,and Q of the resonators depend on the thickness and material of the substrate and the temperature.This work offers an analysis and design platform for high-performance MEMS gyroscopes as well as oscillators in terms of the temperature compensation by n-doped Si.展开更多
A B-spline active contour model based on finite element method is presented, into which the advantages of a B-spline active contour attributing to its fewer parameters and its smoothness is built accompanied with redu...A B-spline active contour model based on finite element method is presented, into which the advantages of a B-spline active contour attributing to its fewer parameters and its smoothness is built accompanied with reduced computational complexity and better numerical stability resulted from the finite element method. In this model, a cubic B-spline segment is taken as an element, and the finite element method is adopted to solve the energy minimization problem of the B-spline active contour, thus to implement image segmentation. Experiment results verify that this method is efficient for B-spline active contour, which attains stable, accurate and faster convergence.展开更多
Conceptual design, data model and key techniques of "Geo-engineer 3D assistant", an underground 3D GIS oriented to geology and mine application, were discussed. In particular, the importance of high-order sm...Conceptual design, data model and key techniques of "Geo-engineer 3D assistant", an underground 3D GIS oriented to geology and mine application, were discussed. In particular, the importance of high-order smoothing triangular pieces to surface's fine expression in geological modeling was emphasized. The contour mode is the most favorite mode of the three modes about surface expression: DEM, TIN and contour. Topology in underground 3D modeling with CAGD was compared. From the view of boundary and coboundary, which is soul of IS 19107 (Geographic information spatial schema), 3D underground topology was re-examined.展开更多
文摘This paper investigates the effects of material and dimension parameters on the frequency splitting,frequency drift,and quality factor(Q)of aluminium nitride(AlN)-on-n-doped/pure silicon(Si)microelectromechanical systems(MEMS)disk resonators through analysis and simulation.These parameters include the crystallographic orientation,dopant,substrate thickness,and temperature.The resonators operate in the elliptical,higher order,and flexural modes.The simulation results show that i)the turnover points of the resonators exist at 55°C,-50°C,40°C,and-10°C for n-doped silicon with the doping concentration of 2×1019 cm-3 and the Si thickness of 3.5μm,and these points are shifted with the substrate thickness and mode variations;ii)compared with pure Si,the modal-frequency splitting for n-doped Si is higher and increases from 5%to 10%for all studied modes;iii)Q of the resonators depends on the temperature and dopant.Therefore,the turnover,modal-frequency splitting,and Q of the resonators depend on the thickness and material of the substrate and the temperature.This work offers an analysis and design platform for high-performance MEMS gyroscopes as well as oscillators in terms of the temperature compensation by n-doped Si.
基金the National Natural Science Foundation of China (No.59975057).
文摘A B-spline active contour model based on finite element method is presented, into which the advantages of a B-spline active contour attributing to its fewer parameters and its smoothness is built accompanied with reduced computational complexity and better numerical stability resulted from the finite element method. In this model, a cubic B-spline segment is taken as an element, and the finite element method is adopted to solve the energy minimization problem of the B-spline active contour, thus to implement image segmentation. Experiment results verify that this method is efficient for B-spline active contour, which attains stable, accurate and faster convergence.
基金Project(A11024)supported by the Key Laboratory Fund of Geo-Informatics of State Bureau of Surveying and MappingProject(7771022)supported by the Basic Research Fund for Chinese Academy of Surveying and MappingProject(2010AA22202)supported by the National High-tech Research and Development Program of China
文摘Conceptual design, data model and key techniques of "Geo-engineer 3D assistant", an underground 3D GIS oriented to geology and mine application, were discussed. In particular, the importance of high-order smoothing triangular pieces to surface's fine expression in geological modeling was emphasized. The contour mode is the most favorite mode of the three modes about surface expression: DEM, TIN and contour. Topology in underground 3D modeling with CAGD was compared. From the view of boundary and coboundary, which is soul of IS 19107 (Geographic information spatial schema), 3D underground topology was re-examined.
