NF_(3)is commonly used as an etching and cleaning gas in semiconductor industry,however it is a strongly greenhouse gas.Therefore,the destruction of disposal NF_(3)is an urgent task to migrate the greenhouse effect.Am...NF_(3)is commonly used as an etching and cleaning gas in semiconductor industry,however it is a strongly greenhouse gas.Therefore,the destruction of disposal NF_(3)is an urgent task to migrate the greenhouse effect.Among the technologies for NF_(3)abatement,the destructive sorption of NF_(3)over metal oxides sorbents is an effective way.Thus,the search for a highly reactive and utilized sorbent for NF_(3)destruction is in great demand.In this work,AlOOH supported on carbon-sphere(AlOOH/CS)as precursors were synthesized hydrothermally and heat-treated to prepare the Al_(2)O_(3)sorbents.The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al_(2)O_(3)sorbents for NF_(3)destruction was investigated,and it is shown that the Al2O3 from AlOOH/CS hydro-thermalized at 120℃is superior to others.Subsequently,the optimized Al_(2)O_(3)was covered by Mn(OH)x to prepare Mn/Al_(2)O_(3)sorbents via changing hydrothermal temperatures and Mn loadings.The results show that the Mn/Al_(2)O_(3)sorbents are more utilized than bare Al_(2)O_(3)in NF_(3)destructive sorption due to the promotional effect of Mn_(2)O_(3)as surface layer on the fluorination of Al_(2)O_(3)as substrate,especially the optimal 5%Mn/Al2O3(160℃)exhibits a utilization percentage as high as 90.4%,and remarkably exceeds all the sorbents reported so far.These findings are beneficial to develop more efficient sorbents for the destruction of NF_(3).展开更多
开发了钠焙烧-还原浸出联合工艺从废Pd/Al_(2)O_(3)催化剂中回收Pd和Al_(2)O_(3)。钠化焙烧热力学分析表明,在最佳的Na_(2)O/Al_(2)O_(3)摩尔比和温度下,NaOH、Na_(2)CO_(3)和Na_(2)C2O4均可以与Al_(2)O_(3)完全反应生成Na Al O2。NaOH...开发了钠焙烧-还原浸出联合工艺从废Pd/Al_(2)O_(3)催化剂中回收Pd和Al_(2)O_(3)。钠化焙烧热力学分析表明,在最佳的Na_(2)O/Al_(2)O_(3)摩尔比和温度下,NaOH、Na_(2)CO_(3)和Na_(2)C2O4均可以与Al_(2)O_(3)完全反应生成Na Al O2。NaOH、Na_(2)CO_(3)和Na_(2)C_(2)O_(4)的焙烧渣经水浸后,Al_(2)O_(3)浸出率分别为99.6%、61.0%和55.3%。机械活化-NaOH无水焙烧工艺避免了焙烧渣的固结且可获得较高的Al_(2)O_(3)浸出率。N_(2)H_(4)·H_(2)O还原浸出避免了水浸过程中Pd的溶解损失且催化剂中99.7%的Al_(2)O_(3)被浸出。最终得到Na Al O2浸出液和富钯渣,其中有价的铝和钯可被进一步回收。展开更多
基金The financial support from the Natural Science Foundation of Shandong Province (ZR2020KB003)
文摘NF_(3)is commonly used as an etching and cleaning gas in semiconductor industry,however it is a strongly greenhouse gas.Therefore,the destruction of disposal NF_(3)is an urgent task to migrate the greenhouse effect.Among the technologies for NF_(3)abatement,the destructive sorption of NF_(3)over metal oxides sorbents is an effective way.Thus,the search for a highly reactive and utilized sorbent for NF_(3)destruction is in great demand.In this work,AlOOH supported on carbon-sphere(AlOOH/CS)as precursors were synthesized hydrothermally and heat-treated to prepare the Al_(2)O_(3)sorbents.The influence of AlOOH/CS hydrothermal temperatures on the reactivity of derived Al_(2)O_(3)sorbents for NF_(3)destruction was investigated,and it is shown that the Al2O3 from AlOOH/CS hydro-thermalized at 120℃is superior to others.Subsequently,the optimized Al_(2)O_(3)was covered by Mn(OH)x to prepare Mn/Al_(2)O_(3)sorbents via changing hydrothermal temperatures and Mn loadings.The results show that the Mn/Al_(2)O_(3)sorbents are more utilized than bare Al_(2)O_(3)in NF_(3)destructive sorption due to the promotional effect of Mn_(2)O_(3)as surface layer on the fluorination of Al_(2)O_(3)as substrate,especially the optimal 5%Mn/Al2O3(160℃)exhibits a utilization percentage as high as 90.4%,and remarkably exceeds all the sorbents reported so far.These findings are beneficial to develop more efficient sorbents for the destruction of NF_(3).
基金the financial support from the Science and Technology Plan of Yunnan Province,China(No.2018ZE001)the National Key Research and Development Program of China(No.2018YFE0110200)+1 种基金the Key Research and Development Program of Hunan Province,China(No.2020SK2125)the Science and Technology Plan of Department of Natural Resources of Hunan Province,China(No.2020-21)。
文摘开发了钠焙烧-还原浸出联合工艺从废Pd/Al_(2)O_(3)催化剂中回收Pd和Al_(2)O_(3)。钠化焙烧热力学分析表明,在最佳的Na_(2)O/Al_(2)O_(3)摩尔比和温度下,NaOH、Na_(2)CO_(3)和Na_(2)C2O4均可以与Al_(2)O_(3)完全反应生成Na Al O2。NaOH、Na_(2)CO_(3)和Na_(2)C_(2)O_(4)的焙烧渣经水浸后,Al_(2)O_(3)浸出率分别为99.6%、61.0%和55.3%。机械活化-NaOH无水焙烧工艺避免了焙烧渣的固结且可获得较高的Al_(2)O_(3)浸出率。N_(2)H_(4)·H_(2)O还原浸出避免了水浸过程中Pd的溶解损失且催化剂中99.7%的Al_(2)O_(3)被浸出。最终得到Na Al O2浸出液和富钯渣,其中有价的铝和钯可被进一步回收。
