High Quality SiGe Layer Deposited by a New Ultrahigh Vacuum Chemical Vapor Deposition System

An ultrahigh vacuum chemical vapor deposition (UHV/CVD) system is developed and the details of its construction and operation are reported. Using high purity SiH4 and GeH4 reactant gases, the Si0.82Ge0.18 layer is deposited at 550℃. With the measurements by double crystal X-ray diffraction (DCXRD), transmission electron microscopy (TEM) and Rutherford backscattering spectroscppy (RBS) techniques, it is shown that the crystalline quality of the SiGe layer is good, and the underlying SiGe/Si heterointerface is sharply defined.

In-situ wafer bowing measurements of GaN grown on Si(111) substrate by reflectivity mapping in metal organic chemical vapor deposition system

In this work, the wafer bowing during growth can be in-situ measured by a reflectivity mapping method in the 3×2 Thomas Swan close coupled showerhead metal organic chemical vapor deposition（MOCVD） system. The reflectivity mapping method is usually used to measure the film thickness and growth rate. The wafer bowing caused by stresses（tensile and compressive） during the epitaxial growth leads to a temperature variation at different positions on the wafer, and the lower growth temperature leads to a faster growth rate and vice versa. Therefore, the wafer bowing can be measured by analyzing the discrepancy of growth rates at different positions on the wafer. Furthermore, the wafer bowings were confirmed by the ex-situ wafer bowing measurement. High-resistivity and low-resistivity Si substrates were used for epitaxial growth. In comparison with low-resistivity Si substrate, Ga N grown on high-resistivity substrate shows a larger wafer bowing caused by the highly compressive stress introduced by compositionally graded Al Ga N buffer layer. This transition of wafer bowing can be clearly in-situ measured by using the reflectivity mapping method.

FABRICATION OF DIAMOND TUBES IN BIAS-ENHANCED HOT-FILAMENT CHEMICAL VAPOR DEPOSITION SYSTEM

Deposition of diamond thin films on tungsten wire substrate with the gas mixture of acetone and hydrogen by using bias-enhanced hot filament chemical vapor deposition（CVD）with the tantalum wires being optimized arranged is investigated.The self-supported diamond tubes are obtained by etching away the tungsten substrates.The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope（SEM）and Raman spectrum.The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD.The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of H2O2 and NH4 OH.There is no residual stress in diamond tube after substrate removal.

Development of a Low Cost Pulsed Laser Deposition System for Thin Films Growth

.Pulsed Laser Deposition (PLD) is a powerful technique to grow thin films. Oxides, Magnetics and superconducting materials have been obtained by PLD and theirs properties are strongly dependent of deposition parameters. The construction of a simple and cheap PLD system that is suitable for growing various thin films, including magnetic materials, controlling some deposition parameters is presented. The design characteristics and construction are presented for each one of the devices that compose this PLD system. The equipment has the possibility of carrying out films deposition using up to five targets under controlled atmosphere and substrate temperature. The system also allows controlling the cool off sample time after growing up films at high temperatures. A wide range of relative speeds between target and substrate axial rotation can be externally controlled. With the configuration and the dimensions adopted in their construction, a PLD system of great experimental flexibility is achieved, at a very low cost regarding the commercial systems. To evaluate their performance and effectiveness, the deposition characteristics of a BaFe12O19 film on (0001) sapphire substrate is presented.

Nitrogen deposition as an important nutrient from the environment and its impact on ecosystems in China

As an example of atmospheric nitrogen(N) deposition,the paper summarizes the definition,form and amount of nutrient from the environment(NFE) and the relationship between NFE and anthro-pogenic reactive N emission.Based on our own study and published articles,we find that N wet and dry deposition has been an important nutrient resource in agricultural and natural ecosystems in China.The total amount of N deposition and other environment-derived N in China was up to 18 Tg N/a,equal to ap-proximately 60% of the national N fertilizer consumption.Nitrogen deposition is expected to contribute substantially to nutrient cycling and net primary productivity in various ecosystems.Therefore,it is crucial to utilize this environment-derived nutrient resource by integrated nutrient resource management in order to realize the sustainable development of both agricultural and non-agricultural ecosystems.

Nitrogen Deposition and Its Spatial Pattern in Main Forest Ecosystems along North-South Transect of Eastern China

A continuous three-year observation(from May 2008 to April 2011)was conducted to characterize the spatial variation of dissolved inorganic nitrogen(DIN)deposition at eight main forest ecosystems along the north-south transect of eastern China(NSTEC).The results show that both throughfall DIN deposition and bulk DIN deposition increase from north to south along the NSTEC.Throughfall DIN deposition varies greatly from 2.7 kg N/(ha·yr)to 33.0 kg N/(ha·yr),with an average of 10.6 kg N/(ha·yr),and bulk DIN deposition ranges from 4.1 kg N/(ha·yr)to 25.4 kg N/(ha·yr),with an average of 9.8 kg N/(ha·yr).NH4+-N is the dominant form of DIN deposition at most sampling sites.Additionally,the spatial variation of DIN deposition is controlled mainly by precipitation.Moreover,in the northern part of the NSTEC,bulk DIN deposition is 17%higher than throughfall DIN deposition,whereas the trend is opposite in the southern part of the NSTEC.The results demonstrate that DIN deposition would likely threaten the forest ecosystems along the NSTEC,compared with the critical loads(CL)of N deposition,and DIN deposition in this region is mostly controlled by agricultural activities rather than industrial activities or transportation.

Palaeogeomorphology and its control on the development of sequence stratigraphy and depositional systems of the Early Silurian in the Tarim Basin

The Silurian in the Tarim Basin was deposited on the basement deformed by the Caledonian tectonic movements at the end of the Late Ordovician. The development and distribution of sedimentary sequences of the Early Silurian have been clearly controlled by the palaeogeomorphology of the Late Ordovician. Based on unconformity characteristics and distribution of erosion, several zones can be differentiated including a high uplifted erosion zone, a transitional slope zone and a depression zone. The central and west Tabei Uplift zones show high angular unconformity and intense erosion. The Tarim Basin in the late Ordovician shows characteristics of higher in the west, lower in the east while higher in the south, lower in the north. The Early Silurian mainly developed transgressive and highstand systems tracts on the whole, while the lowstand systems tract only developed partly below the slope break. The palaeogeomorphology controlled the elastic source supply and deposit distribution. Braided delta system and tidal flat-estuary system were deposited. The duration of uplifting of the Tazhong paleo- uplift was longer than that of the Tabei paleo-uplift, and deposition was later. This led to the lower and middle members of the Kepingtage Formation missing in that area. As a large-scale transgression occurred during the deposition period of the upper member of the Kepingtage Formation, sediment from the west of the basin was transported and deposited by tides and waves, forming tidal-marine debris systems above the uplift. Proximal alluvial fan and fan delta coarse elastic deposits developed in proximal uplift zone in the east and southeast of the basin, and braided delta put forward to the transitional zone between the edge of uplift and the sea. Large-scale tidal channel, sub-distributary channel and mouth bar of the delta front can form favorable reservoirs, and they are primary targets for oil and gas exploration. This research on sequence-depositional systems development and distribution controlled by palaeogeomorphology is significant in guiding the prediction of reservoir sandstones.

A systematical study on the electrodeposition process of metallic lithium

In this study,commercial copper(Cu)foil and Cu foam are used as the working electrodes to systematically investigate the electrochemical deposition and dissolution processes of metallic lithium(Li)on these electrodes;Li metal deposited on the Cu foil electrode is porous and loose.The surface solid electrolyte interface(SEI)film after dissolution from Li dendrites maintains a dendritic porous structure,resulting in a large volume effect of the electrode during the cycle.The Cu foam electrode provides preferential nucleation and deposition sites near the side surface of the separator;the difference in Li affinity results in a heterogeneous deposition and dendrite growth of metallic Li.

Sedimentary system characteristics and depositional filling model of Upper Permian——Lower Triassic in South Yellow Sea Basin

In the South Yellow Sea Basin,Mesozoic–Paleozoic marine strata are generally well developed with large thickness,and no substantial breakthroughs have been made in hydrocarbon exploration.Through research,it is believed that the Upper Permian–Lower Triassic can be regarded as a long-term base-level cycle.Based on drilling data,characteristics of the lithology–electric property combination cyclicity,and the special lithology,the long-term base-level cycle was divided into five medium-term base-level cycles(MC1–MC5).On this basis,the Permian–Triassic sedimentary systems and their filling model were analyzed in accordance with the change of base-level cycle and transition of sedimentary environment,as well as characteristics of the drilling sedimentary facies and seismic facies.The results show that there were six sedimentary systems(fluvial,delta,tidal flat,open platform,restricted platform,and continental shelf)developed in the Upper Permian–Lower Triassic,the sedimentary systems were distributed such that the water was deep in the northwest and shallow in the southeast,and there were two base-level cycle filling models(a relatively stable tidal flat facies and a rapidly transgressive continental shelf facies to stable platform facies)developed in the Upper Permian–Lower Triassic.These models can provide a basis for evaluation of the Mesozoic–Paleozoic hydrocarbon geology in the South Yellow Sea Basin.

Depositional System of the Carboniferous Huanglong Formation,Eastern Sichuan Basin:Constraints from Sedimentology and Geochemistry

Using analyses of the lithology,sequences,paleoenvironment,and tectonic setting,the depositional system of the Carboniferous Huanglong Formation in the eastern Sichuan Basin was identified.The lithological characteristics of the Lower Member,Middle Member,and Upper Member were analyzed and classified.Before the use of carbon,oxygen,and strontium isotopes in the analysis,all of the geochemical data were tested for validity.On the basis of the Z values obtained from carbon and oxygen isotopes,the paleoenvironments of the three members were elucidated.Lower Member was dominantly an enclosed marine environment with intense evaporation and little freshwater input into the sea.Middle Member developed in a semi-enclosed to normal marine environment with many rivers.Upper Member was formed in a normal marine environment.The east Sichuan Basin was enclosed by paleouplifts before the deposition of the Huanglong Formation,forming a relatively enclosed depositional setting.Paleogullies developed in the Silurian strata that underlie the Carboniferous rocks;these paleogullies can be identified.On the basis of a comprehensive analysis,we propose that the Huanglong Formation developed in a platform system.Four microfacies were identified：supratidal flat,dolostone flat,grain shoal,and shelf microfacies.The high-permeability and high-porosity characteristics of the grain shoal microfacies are favorable for hydrocarbon accumulation,while the supratidal flat and shelf microfacies developed very few high-quality reservoirs.The paleogullies,in which increased amounts of grain shoal microfacies developed,controlled the distribution of high-quality reservoirs.

Evaluation and mapping of relative sensitivity of the terrestrial ecosystems to acidic deposition in Fujian

Based on the semi-quantitative approach, four environmental factors of sites (i.e. bedrock lithology, soil type, land use, and rainfall) were categorized, weighted and combined to determine and assess the relative sensitivity of the terrestrial ecosystems to acidic deposition in Fujian Province. Then the factors have been digitized and combined to assign an overall value for each mesh square (16.77 km×18.39 km) by using the geographic information system (GIS) The results indicated that the most sensitive area in Fujian was mainly located in the southeast, and the least: ensitive area was distributed sporadically in the east along the coast. Due to slow weathering rate of siliceous rocks, acid to weakly acid reactions of the soils, along with the greater percent of coniferous forests, more than 80 percent of the total area exhibits higher sensitivity classes (4–7).

Sequence stratigraphy and depositional systems in the Paleogene,Liaodong Bay

Based on drilling and seismic data, the Paleogene developed in Liaodong Bay can be divided into five third-order sequences bounded by six sequence boundaries. Through analyzing depositional systems in each sequence in detail, the Es-3 time was defined as fast rifting. During the deposition of the Es-3 member, the lake basin was continuous along the N-S direction but compartmentalized along the E-W direction by several N-S trending faults. Deposition was dominated by steep slope fans and fan deltas. The time of Es-2 and Es-1 was stable settling. The lake basin expanded substantially. The fan delta system and braided fluvial system were developed. Carbonate and clastic deposits were formed on the Liaoxi （west Liaohe） Rise. The time of Ed-3 time was again fast rifting. During this time, shale was deposited. In the time of Es-2, tectonic movement weakened. The basin was higher in the west and north, and lower in the east and south. A series of delta depositional systems were developed and smallscale slumping turbidite fans were present in semi-deep lake to deep lake. In the time of Ed-1, tectonic movement stopped. Flood plain deposition occurred. Finally the paper presents the characteristics of evolution and distribution of depositional systems both vertically and horizontally.

Character of Terrestrial Sequence Stratigraphy and Depositional System in Incised Valley, Outcrop Area of Karamay Oilfield, Junggar Basin, China

In the Karamay oilfield located on the northwestern margin of Junggar basin, Xinjiang, China, a large area of the Karamay Formation is exposed at outcrop in the northeast of the oilfield, a consequence of thrusting. The Middle Triassic Karamay Formation in the outcrop area is a type of terrestrial third-order sequence, bounded by two easily recognizable sequence boundaries: a regional surface of angular unconformity (SB1) at the base and a regional unconformity (SB2) at the top. Within the Karamay Formation, two lacustrine expansion events can be recognized and be used to identify both the initial and the maximum lacustrine flooding surfaces. The two lacustrine flooding surfaces serve as references for the classification of this third-order sequence-Karamay Formation into the following three sedimentary successions: a lower lowstand systems tract (LST), a middle lacustrine-expanding systems tract (EST), and an upper highstand systems tract (HST). Different systems tracts are composed of different depositional system assemblages. In this paper, each depositional system is described in detail. The lowstand systems tract in the study area is characterized by incised valleys. At the base and on the margin of the incised valleys occur alluvial fan depositional systems, and in the upper and distal parts of the alluvial fan, low-sinuosity river depositional systems. The lacustrine-expanding systems tract consists of a lacustrine depositional system and a lacustrine delta depositional system, overlying the lower incised valley fills. The highstand systems tract is filled by a widespread lacustrine braided delta depositional system. The analysis of sequence stratigraphy in this paper serves the description of the spatial distribution of the reservoir. The depositional system analysis serves the description of the reservoir types. Field investigations of oil sandstone and oil seepage show that the Karamay Formation is composed of several types of reservoirs. However, two types of high quality reservoir occur both in the upper interval of the lowstand systems tract and in the lacustrine-expanding systems tract: gravelly low-sinuosity channel in the distal fans and sandy-gravelly distributary channel in the lacustrine delta plain.

Suppression of oxygen and carbon impurity deposition in the thermal system of Czochralski monocrystalline silicon

When preparing large monocrystalline silicon materials,severe carbon etching and silicide deposition often occur to the thermal system.Therefore,a suppression method that optimizes the upper insulation structure has been proposed.Assisted by the finite element method,we calculated temperature distribution and carbon deposition of heater and heat shield,made the rule of silicide and temperature distributing in the system,and we explained the formation of impurity deposition.Our results show that the optimized thermal system reduces carbon etching loss on heat components.The lowered pressure of the furnace brings a rapid decrease of silicide deposition.The increase of the argon flow rate effectively inhibits CO and back diffusion.The simulated results agree well with the experiment observations,validating the effectiveness of the proposed method.

AMORPHIZATION IN Nb-M (M=Fe, Co, Ni) BINARY METAL SYSTEMS INDUCED BY ION BEAM ASSISTED DEPOSITION (IBAD)

Ion beam assisted deposition technique (IBAD) was utilized to systematically study amorphization in binary metal systems of Nb-magnetic element, i.e., Nb-M (M=Fe, Co or Ni). The glass forming range termed as Nb fraction of Nb-Fe system was about 34at.% to 56at.%, that of Nb-Co system was about 32at.% to 72at.% and that of Nb-Ni about 20at. % to 80at. %. Similar percolation patterns were found in amorphous alloy films. The fractal dimensions of the percolation patterns approach to 2, which indicates 2-D layer growth for amorphous phases. It is regarded that the assisted Ar+ ion beam during the deposition process plays important role for the 2-D layer growth. Some metastable crystalline phases were obtained in these three systems by IBAD, e.g., bcc supersaturated solid solutions in Nb-Fe and Nb-Co systems, fcc and hcp phases in Nb-Co and Nb-Ni systems. The formation and competing between the amorphous and the metastable crystalline phases were determined by both the phases' thermodynamic states in binary metal systems and kinetics during IBAD process.

A Polymer-Rich Re-deposition Technique for Non-volatile Etching By-products in Reactive Ion Etching Systems

Re-deposition is a non-volatile etching by-product in reactive ion etching systems that is well known to cause dirt on etching work.In this study,we propose a novel etching method called the polymer-rich re-deposition technique,used particularly for improving the etched sidewall where the re-deposition is able to accumulate.This technique works by allowing the accumulated re-deposition on the etched sidewall to have a higher polymer species than the new compounds in the non-volatile etching by-product.The polymer-rich re-deposition is easy to remove along with the photo-resist mask residual at the photo-resist strip step using an isopropyl alcohol-based solution.The traditional,additional cleaning process step used to remove the re-deposition material is not required anymore,so this reduces the overall processing time.The technique is demonstrated on an Al_(2)O_(3)-TiC substrate by C4F8 plasma,and the EDX spectrum confirms that the polymer re-deposition has C and F atoms as the dominant atoms,suggesting that it is a C–F polymer re-deposition.

The Development of a Simulated Sediment Dosing Apparatus for Deposition Research in Wastewater Collection Systems

Water conservation initiatives promote installation of water efficient and low-flow appliances in waste water collection systems. This has resulted in lower flow rates in those systems than the intended design loading, causing solid deposition and sedimentation in some areas. A joint UKWIR/EPSRC CASE grant (14440031) has funded the work described in this paper which investigates sedimentation and solid deposition in building drainage system pipes. The purpose of this paper is to detail the design, calibration and operation of a sediment dosing apparatus to simulate sedimentation rates and explore possible solutions to this issue with a full scale laboratory model based on real site data. The methodology adopted is an experimental approach, where tests have been conducted on the sediment dosing apparatus based on calculations and observations to determine an appropriate sediment dosing regime representative of typical systems. Further tests were conducted with the addition of everyday household products to investigate their effects on sedimentation. The results indicated that a suitable dosing rate was approximately 12% weight-to-volume (w/v) of a fine sand with a known particle size distribution, diluted 1:5 in a clean water base flow. It was also shown that the addition of the household products added to the problem of sedimentation within drainage systems. The results give excellent correlation to real site data, with deposition depth and distribution comparable to measured site data to within 10%. The deposition was achieved within three hours, which approximated six weeks deposition in the live site used in the study. This straightforward investigation details the design, construction and testing of a device to cause accelerated sedimentation in a full scale model of a building drainage system. This is the first step in the process of updating research underpinning our understanding of the behaviour of these systems under conditions of low flow rates caused by water conservation, sedimentation, and the use of common household additives. It will be used to improve simulation of water flow and solid transport in sediment-laden systems. Specifically, the results will be used to determine refinements required to a specific drainage simulation model (DRAINET), which currently has an unquantified sedimentation component. This work is part of a larger body of current research funded by two joint EPSRK/UKWIR grants.

Critical load of sulfur deposition for ecosystemand its application in China

ＣｒｉｔｉｃａｌｌｏａｄｏｆｓｕｌｆｕｒｄｅｐｏｓｉｔｉｏｎｆｏｒｅｃｏｓｙｓｔｅｍａｎｄｉｔｓａｐｐｌｉｃａｔｉｏｎｉｎＣｈｉｎａＺｈａｏＤｉａｎｗｕ；ＺｈａｎｇＸｉａｏｓｈａｎ；ＹａｎｇＪｉａｎｘｉｎ（ＲｅｓｅａｒｃｈＣｅｎｔｅｒｆｏｒＥｃｏ－Ｅ...

Printability disparities in heterogeneous material combinations via laser directed energy deposition:a comparative study

Additive manufacturing provides achievability for the fabrication of bimetallic and multi-material structures;however,the material compatibility and bondability directly affect the parts’formability and final quality.It is essential to understand the underlying printability of different material combinations based on an adapted process.Here,the printability disparities of two common and attractive material combinations(nickel-and iron-based alloys)are evaluated at the macro and micro levels via laser directed energy deposition(DED).The deposition processes were captured using in situ high-speed imaging,and the dissimilarities in melt pool features and track morphology were quantitatively investigated within specific process windows.Moreover,the microstructure diversity of the tracks and blocks processed with varied material pairs was comparatively elaborated and,complemented with the informative multi-physics modeling,the presented non-uniformity in mechanical properties(microhardness)among the heterogeneous material pairs was rationalized.The differences in melt flow induced by the unlike thermophysical properties of the material pairs and the resulting element intermixing and localized re-alloying during solidification dominate the presented dissimilarity in printability among the material combinations.This work provides an in-depth understanding of the phenomenological differences in the deposition of dissimilar materials and aims to guide more reliable DED forming of bimetallic parts.

ZmbZIP27 regulates nitrogen-mediated leaf angle by modulating lignin deposition in maize

In grain crops such as maize(Zea mays),leaf angle(LA)is a key agronomic trait affecting light interception and thus planting density and yield.Nitrogen(N)affects LA in plants,but we lack a good understanding of how N regulates LA.Here,we report that N deficiency enhanced lignin deposition in the ligular region of maize seedlings.In situ hybridization showed that the bZIP transcription factor gene ZmbZIP27 is mainly expressed in the phloem of maize vascular bundles.Under N-sufficient conditions,transgenic maize overexpressing ZmbZIP27 showed significantly smaller LA compared with wild type(WT).By contrast,zmbzip27_(ems)mutant showed larger LA under both N-deficient and N-sufficient conditions compared with WT.Overexpression of ZmbZIP27 enhanced lignin deposition in the ligular region of maize in the field.We further demonstrated that ZmbZIP27 could directly bind the promoters of the microRNA genes ZmMIR528a and ZmMIR528b and negatively regulate the expression levels of ZmmiR528.ZmmiR528 knockdown transgenic maize displayed erect architecture in the field by increasing lignin content in the ligular region of maize.Taken together,these results indicate that ZmbZIP27 regulates N-mediated LA size by regulating the expression of ZmmiR528 and modulating lignin deposition in maize.