On-machine Precision Preparation and Dressing of Ball-headed Diamond Wheel for the Grinding of Fused Silica

In the grinding of high quality fused silica parts with complex surface or structure using ball-headed metal bonded diamond wheel with small diameter,the existing dressing methods are not suitable to dress the ball-headed diamond wheel precisely due to that they are either on-line in process dressing which may causes collision problem or without consideration for the effects of the tool setting error and electrode wear.An on-machine precision preparation and dressing method is proposed for ball-headed diamond wheel based on electrical discharge machining.By using this method the cylindrical diamond wheel with small diameter is manufactured to hemispherical-headed form.The obtained ball-headed diamond wheel is dressed after several grinding passes to recover geometrical accuracy and sharpness which is lost due to the wheel wear.A tool setting method based on high precision optical system is presented to reduce the wheel center setting error and dimension error.The effect of electrode tool wear is investigated by electrical dressing experiments,and the electrode tool wear compensation model is established based on the experimental results which show that the value of wear ratio coefficient K’ tends to be constant with the increasing of the feed length of electrode and the mean value of K’ is 0.156.Grinding experiments of fused silica are carried out on a test bench to evaluate the performance of the preparation and dressing method.The experimental results show that the surface roughness of the finished workpiece is 0.03 μm.The effect of the grinding parameter and dressing frequency on the surface roughness is investigated based on the measurement results of the surface roughness.This research provides an on-machine preparation and dressing method for ball-headed metal bonded diamond wheel used in the grinding of fused silica,which provides a solution to the tool setting method and the effect of electrode tool wear.

Precision Grinding of Reaction Bonded Silicon Carbide Using Coarse Grain Size Diamond Wheels

Reaction bonded SiC（RBSiC） is attractive for optical application because of its favorable properties and low fabrication cost. However, the difficultness and cost involved in RBSiC grinding limit its application. The investigation on high efficient and low-cost machining with good grinding quality is desired. Generally, high efficient machining for RBSiC is realized by using coarse grain size grinding wheels, but serious grinding damage is inevitable. In this paper, monolayer nickel electroplated coarse grain size diamond grinding wheels with grain sizes of 46 μm, 91 μm, and 151 μm were applied to the grinding of RBSiC. An electrolytic in-process dressing（ELID） assisted conditioning technique was first developed by using cup shape copper bonded conditioning wheels with grain sizes of 15 μm and 91 μm to generate the conditioned coarse grain size wheels with minimized wheel run-out error within 2 μm, constant wheel peripheral envelop as well as top-flattened diamond grains. Then, the grinding experiments on RBSiC were carried out to investigate the grinding performance and material removal mechanism. The experimental results indicate that the developed conditioning technique is applicable and feasible to condition the coarse grain size diamond wheels under optimal conditioning parameters, and the material removal mechanism involved in RBSiC grinding is the combination of brittle fracture and ductile deformation to generate smooth ground surface. This research is significant for the high efficient and low-cost precision grinding of RBSiC with good ground surface quality.

IN SlTU TRUING/DRESSING OF DIAMOND WHEEL FOR PRECISION GRINDING

An application for achieving on-machine truing/dressing and monitoring of diamond wheel is dealt with in dry grinding. A dry electrical discharge （ED） assisted truing and dressing method is adopted in preparation of diamond grinding wheels. Effective and precise truing/dressing of a diamond wheel is carried out on a CNC curve grinding machine by utilizing an ED assisted diamond dresser. The dressed wheel is monitored online by a CCD vision system. It detects the topography changes of a wheel surface. The wear condition is evaluated by analyzing the edge deviation of a wheel image. The benefits of the proposed methods are confirmed by the grinding experiments. The designed truing/dressing device has high material removal rate, low dresser wear, and hence guarantees a desired wheel surface. Real-time monitoring of the wheel profile facilitates determining the optimum dressing amount, dressing interval, and the compensation error.

Fibre Metallurgy Characteristic of Short Cast Iron Fibre and Its Applications for Diamond Wheel

A kind of diamond grinding wheel bonded by short cast iron fibres has been developed. ln comparison with high quality bronze bonded diamond grinding wheel. the new wheel was more suitable to grind hard and brittle materials like ceramics. For Si3N4, the grinding efficiency has been raised two times and the grinding ratio five times

Electro-Discharge Fine Truing of Metal-Bonded Fine-Grain Diamond Wheel Based on Real-Time Monitoring

A data acquisition system based on LabVIEW is designed and implemented, and electro-discharge(ED) fine truing of metal-bonded fine-grain diamond wheel based on real-time monitoring is researched. Real-time monitoring not only makes efficient impulse specification of ED truing easily obtained, but also is good for timely identifying no-load, avoiding short circuit and arc discharge phenomena and then for obtaining normal machining state. ED fine truing of the fine-grain wheel includes two steps: rough truing for high efficiency and fine truing for high precision. Final ED truing precision and efficiency not only depend on electric process specification, but also is concerned with electrode shape, insulated performance of operating fluid and vertical feed quantity value and frequency. Experiments indicate that ED fine truing based on real-time monitoring can improve the truing precision and efficiency. Average machining efficiency of W10 wheel is about 0.95 μm/min; the final run-out by ED truing is less than 2 μm.

STUDY ON SURFACE OF DIAMOND PARTICLE BY CHEMICAL CU-CLADDING AND ITS APPLICATION IN DIAMOND WHEEL

In this paper a method that a layer of Cu was cladded on the surface of diamond particle by an appropriate chemically Cu-cladded process was put forward. The method can adjust the thickness of cladding by one step or multiple steps. The composition and structure of Cu-cladded diamond were analyzed with help of XRD, SEM and EPMA. The results shoe that copper was homogeneously dispersed on the surface of diamond particle by this method, the deposited copper is loosely dispersed by one step cladding process, and the copper is tightly organized by multiple steps cladding process. Copper presents crystalline, and a small amount of oxygen and iron exits ibn copper layers. Wearing test shows that the wear-resisting property of Cu-cladded diamond wheel is superior to that of general diamond wheel, and that of diamond of which Cu-cladded thickness is deposited more thickly by multi-steps cladding process is better.

A New Method for Dressing Fine Grain Diamond Wheels——the Soft-Elastic Dressing Method

This paper describes a completely new dressing technique, the soft-elastic dressing method, which can effectively dress fine grain diamond wheels. A rotating and vibrating abrasive belt is used in the soft-elastic dressing method. The principle of the new dressing technique and the soft-elastic dressing equipment are presented. Factors that influence the truing efficiency, truing precision and sharpening quality are carefully investigated. The grinding surface roughness after soft-elastic dressing is performed is investigated experimentally. The dressing and grinding experiments both prove that the soft-elastic dressing method has high truing efficiency, high truing precision and good sharpening quality.[

New Vitrified Bond Diamond Grinding Wheel for Grinding the Cylinder of Polycrystalline Diamond Compacts

In this work, a kind of new vitrified bond based on Li2O-Al2O3-SiO2 glass ceramics was used to bond the diamond grains, which is made into grinding wheel and the cylindrical grinding process of polycrystalline diamond compacts （PDCs） by using the new vitrified bond diamond grinding wheel was discussed. Several factors which influence the properties of grinding wheel such as amount of vitrified bond and the kinds and amount of stuff in grinding wheel were also investigated. It was found that the new vitrified bond can firmly combine diamond grains, when there are only diamonds and vitrified bond in the structure of grinding wheel, the longevity of the grinding wheel is about 2.5-3 times as that of resin bond grinding wheel for processing PDCs. The grinding size precision of PDCs can be improved from 4-0.03 mm to 4-0.01 mm because of larger Young＇s modulus of vitrified bond than resin bond. The grinding time of a PDC product can be 1.75-2.0 min from 3.25-3.5 min, so this kind of grinding wheel can save much time for processing PDCs. Also, there is hardly noise when using this new vitrified bond diamond grinding wheel to process PDCs. The amount of vitrified bond in grinding wheel influences the longevity of grinding wheel. When the size of diamond grains is 90-107 μm, the optimal amount of vitrified bond in grinding wheel is 21% （wt pct）. When the amount of vitrified bond exceeds 21%, there are many pores in grinding block, which will decrease the longevity of grinding wheel. The existence of addition stuff such as Al2O3 or SiC can reduce the longevity of grinding wheel.

Application of rare-earth and nano elements on diamond cup wheels

Diamond cup wheel is used widely as an important tool for machining ceramic tile.In this paper,nano rare-earth oxide and nano carbide were added in the segments of seven kinds of diamond cup wheels.The performance of diamond cup wheels were tested on a special designed test machine by grinding two kinds of ceramic tiles.The surface morphology of the segments was examined by Scanning Election Microscopy(SEM) and the micro-hardness of segments was measured.The results showed that nano rare-earth oxide and nano carbide can fine segment micro structure,make grain boundary clear and increase grasping of diamond grits.They can increase also the wear resistance of diamond cup wheels as well as the grinding ratio.

DRESSING OF CORUNDUM WHEEL WITH POLY CRYSTALLINE DIAMOND

Wheel dressing is an important part of grinding, it influences not only the grinding quality ofthe workpiece,but also the cost of grinding.At present the single point mined diamond is widelyused as dresser in industry.Because the mined diamond is rare in nature and dear,it has a practicalsignificance to find a substituting material for the mined diamond.Due to the isotropy of PCD(polyerystalline diamond),new sharp cutting edges will expose continuously during dressing opera-tions,maintaining high dressing efficiency.Tests show that dressing corundum wheel,especiallydressing those for internal grinding,PCD dresser is suitable to common hardnesses,and grains ofwheels and smaller depth of dressing.The authors consider that PCD dressing can be used to sub-stitute completely the mined diamond dresser and the cost of dressing may be reduced.

Anode Simulation and Cathode Design for Electrolytic Dressing of Diamond Profile Wheel

The design methods of anode and cathode are proposed for precision profile grinding. Based on the electrolytic machining theory, electrolytic equilibrium condition and Faraday′s law of electrolysis are applied to establishing the mathematical model of profile diamond dressing process- es. A finite element method (FEM) program is developed to solve the inverse boundary problem of Laplace′s equation. Desired anode contour or cathode shape is determined by computing the distribution of electric potential layer by layer. Electrolytic machining experiment is carried out to verify the simulated anode shape. The research result shows that shape deviation between designed cathode and profile wheel increases with the value of angle between feed rate and the normal to anode surface. The shape of simulated anode is consistent with the contour of metal-bonded diamond profile wheel for a given cathode. Based on the anode contour, cathode shape can also be designed accurately.

金刚石砂轮与金刚石滚轮磨削接触的声发射监测

为了实现金刚石砂轮磨削加工金刚石滚轮过程的自动化,需要对磨削接触状态进行准确识别。由于磨削过程中材料去除率较小导致声发射信号幅值变化不显著,仅用有效值对磨削接触状态识别的准确性受噪声影响很大。针对此问题,通过模态分解和相关性分析相结合的方法对采集的声发射信号进行处理,再计算各分量的有效值和方差值完成特征提取,最后利用支持向量机对磨削接触状态进行识别。实际应用发现:该方法对滚轮的磨削接触状识别准确率达到了98.3%,准确实现了对磨削接触状态的识别。

INFLUENCE OF WHEEL STRUCTURAL PARAMETERS ON MACHINING ACCURACY OF ULTRA-PRECISION PLANE HONING

A new idea for designing wheel patterns is presented so as to solve theproblems about machining accuracy of workpiece and wear of honing wheel in ultra-precision planehoning. The influence factors on motion principle and pattern structures are analyzed andoptimization machining parameters are obtained. By calculating effective cutting length on thesurface of workpiece cut by wheel's abrasive and the orbit of one point on the surface of workpiececontacting with wheel, the wear coefficient of different kinds of wheels and accuracy coefficient ofworkpiece machined by corresponding wheels are obtained. Furthermore, the simulation results showthat the optimal pattern structure of wheel turns out to have lower wheel wear and higher machiningaccuracy.

陶瓷磨削用多层钎焊金刚石砂轮的研制

为解决传统树脂、电镀金刚石砂轮磨削陶瓷材料时存在的磨削寿命短、砂轮易堵塞烧伤等问题,分析利用钎焊金刚石技术制备陶瓷磨削用多层钎焊金刚石砂轮的可行性。结合钎料组分优选,制备具有开槽结构的多层钎焊金刚石砂轮,并对99.9%高纯度的Al_(2)O_(3)陶瓷进行磨削性能试验。结果表明:树脂、电镀金刚石砂轮分别存在磨削效率低和磨削寿命不足的问题,单层钎焊金刚石砂轮磨削效率较高但磨削寿命有限,多层钎焊金刚石在保持高磨削效率的同时磨削寿命优势明显,较单层钎焊金刚石磨轮提升约60%。在陶瓷材料磨削过程中,多层钎焊金刚石砂轮磨削效果显著,虽磨粒出露高度有限,但开槽设计的排屑效果显著,砂轮表面不易发生陶瓷粉末黏结、堵塞。

不同造孔剂树脂金刚石砂轮对硬质合金球阀的精密研磨

为改善硬质合金球阀的加工效果,在树脂金刚石砂轮中引入造孔剂,对其力学性能、微观形貌及磨削性能进行分析,研究空心玻璃球和塑料球造孔剂对树脂金刚石砂轮性能的影响。结果表明:随着造孔剂体积分数增加,树脂砂轮的抗折强度逐渐下降,且2种造孔剂对抗折强度的影响基本一致;砂轮的硬度随造孔剂体积分数的增加亦逐渐下降,但空心玻璃球造孔剂对砂轮硬度的影响显著大于塑料球的;加入造孔剂明显提升了砂轮的锋利性,空心玻璃球体造孔剂体积分数为15%和塑料球造孔剂体积分数为20%的砂轮综合性能最好,且后者的综合性能优于前者的。

辅助磨料对树脂结合剂金刚石砂轮性能的影响

采用绿色碳化硅、黑色碳化硅和碳化硼三种不同的辅助磨料,通过同一配方和生产工艺制成树脂结合剂金刚石砂轮,研究了辅助磨料对其性能的影响。结果表明:绿色碳化硅和黑色碳化硅在增加砂轮强度方面的作用高于碳化硼;碳化硼能提高砂轮的耐磨性和锋利度,可以作为配方设计的参考辅助磨料。

超精密晶圆减薄砂轮及减薄磨削装备研究进展

在芯片制程的后道阶段,通过超精密晶圆减薄工艺可以有效减小芯片封装体积,导通电阻,改善芯片的热扩散效率,提高其电气性能、力学性能。目前的主流工艺通过超细粒度金刚石砂轮和高稳定性超精密减薄设备对晶圆进行减薄,可实现大尺寸晶圆的高精度、高效率、高稳定性无损伤表面加工。重点综述了目前超精密晶圆减薄砂轮的研究进展,在磨料方面综述了机械磨削用硬磨料和化学机械磨削用软磨料的研究现状,包括泡沫化金刚石、金刚石团聚磨料、表面微刃金刚石的制备方法及磨削性能,同时归纳总结了软磨料砂轮的化学机械磨削机理及材料去除模型。在结合剂研究方面,综述了金属、树脂和陶瓷3种结合剂的优缺点,以及在晶圆减薄砂轮上的应用,重点综述了目前在改善陶瓷结合剂的本征力学强度及与金刚石之间的界面润湿性方面的研究进展。在晶圆减薄超细粒度金刚石砂轮制备方面,由于微纳金刚石的表面能较大,采用传统工艺制备砂轮会导致磨料发生团聚,影响加工质量。在此基础上,总结论述了溶胶–凝胶法、高分子网络凝胶法、电泳沉积法、凝胶注模法、结构化砂轮等新型工艺方法在超细粒度砂轮制备方面的应用研究,同时还综述了目前不同的晶圆减薄工艺及超精密减薄设备的研究进展,并指出未来半导体加工工具及装备的发展方向。

一种树脂金刚石复合材料的分子动力学模拟

本文研究一种用于制备微细砂轮的树脂金刚石复合材料,该复合材料由丙烯腈-丁二烯-苯乙烯(ABS)作为基体,聚氯乙烯(PVC)作为混料,邻苯二甲酸二辛酯(DOP)作为加工助剂,与金刚石磨粒混合而成。对5种不同配比的共混体系进行分子动力学模拟,结果显示:提高ABS的质量比,复合材料分子间作用力逐渐增强,密度逐渐降低,延展性和柔性先减小后增加,ABS和PVC的相容性先减小后增加,复合材料最佳配比为62.5wt%ABS、18.6wt%PVC、8.3wt%DOP和10.6wt%金刚石磨粒。

成形砂轮修整对18CrNiMo7-6钢磨削表面完整性的影响

为了探究修整切深ad、轴向进给速度f_(d)和修整速比q_(d)等修整工艺参数对18CrNiMo7-6齿轮钢磨削表面完整性的影响,分别采用树脂结合剂金刚石碟轮、青铜结合剂金刚石碟轮和单颗粒金刚石笔3种修整工具对陶瓷结合剂铬刚玉砂轮进行成形修整工艺正交试验,并用修整后的铬刚玉砂轮对18CrNiMo7-6齿轮钢进行横磨试验。结果表明:随着各修整工艺参数的增大,齿轮钢磨削加工表面粗糙度Ra增大,磨削表面更容易产生残余压应力;通过归一化无量纲方法综合评价3种修整工具的磨削表面完整性,表明采用青铜结合剂金刚石碟轮修整时的磨削表面完整性优于其余2种修整工具的,且当ad=4μm,f_(d)=100 mm/min,q_(d)=0.3时齿轮钢,磨削表面的完整性较优。

凹小圆弧金刚石砂轮电火花修整试验研究

多槽凹小圆弧成形砂轮难以高精度、高效率修整的问题严重限制了其在精密磨削的应用.本文阐述了成形电极电火花修整凹小圆弧成形砂轮的原理,通过单因素试验研究设计出最佳加工参数组合,利用高精度车刀装置修整了紫铜电极车成砂轮对应的V形槽轮廓形状后进行逐级减能的电火花修整多槽凹小圆弧成形砂轮研究,完成了2 500#粒度和1 000#粒度成形金刚石砂轮修整验证,并磨削了石墨片试件进行检测.试验结果表明该方法在较高效率下控制了砂轮表面质量与轮廓精度,具有一定指导作用.