The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential...The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential stages is calculated;the differential pumping system design and equipment choice are introduced;the tests of Molecular/Booster Pump(MBP),a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.展开更多
文摘The research is to design a differential pumping system not only to achieve the pressure transition with a large throughput,but also to achieve a clean system without back-oil.In the paper,the pressure in differential stages is calculated;the differential pumping system design and equipment choice are introduced;the tests of Molecular/Booster Pump(MBP),a new kind of molecular-drag pump with large throughout and clean vacuum are described and the system experimental result and analysis are presented.
