Spatial batch optimal design based on self-learning Gaussian process models for LPCVD processes

Low pressure chemical vapor deposition(LPCVD) is one of the most important processes during semiconductor manufacturing.However,the spatial distribution of internal temperature and extremely few samples makes it hard to build a good-quality model of this batch process.Besides,due to the properties of this process,the reliability of the model must be taken into consideration when optimizing the MVs.In this work,an optimal design strategy based on the self-learning Gaussian process model(GPM) is proposed to control this kind of spatial batch process.The GPM is utilized as the internal model to predict the thicknesses of thin films on all spatial-distributed wafers using the limited data.Unlike the conventional model based design,the uncertainties of predictions provided by GPM are taken into consideration to guide the optimal design of manipulated variables so that the designing can be more prudent Besides,the GPM is also actively enhanced using as little data as possible based on the predictive uncertainties.The effectiveness of the proposed strategy is successfully demonstrated in an LPCVD process.

Bi-objective optimization models for mitigating traffic congestion in urban road networks

Traffic congestion in road transportation networks is a persistent problem in major metropolitan cities around the world.In this context,this paper deals with exploiting underutilized road capacities in a network to lower the congestion on overutilized links while simultaneously satisfying the system optimal flow assignment for sustainable transportation.Four congestion mitigation strategies are identified based on deviation and relative deviation of link volume from the corresponding capacity.Consequently,four biobjective mathematical programming optimal flow distribution(OFD)models are proposed.The case study results demonstrate that all the proposed models improve system performance and reduce congestion on high volume links by shifting flows to low volumeto-capacity links compared to UE and SO models.Among the models,the system optimality with minimal sum and maximum absolute relative-deviation models(SO-SAR and SO-MAR)showed superior results for different performance measures.The SO-SAR model yielded 50%and 30%fewer links at higher link utilization factors than UE and SO models,respectively.Also,it showed more than 25%improvement in path travel times compared to UE travel time for about 100 paths and resulted in the least network congestion index of1.04 compared to the other OFD and UE models.Conversely,the SO-MAR model yielded the least total distance and total system travel time,resulting in lower fuel consumption and emissions,thus contributing to sustainability.The proposed models contribute towards efficient transportation infrastructure management and will be of interest to transportation planners and traffic managers.