A Into-Plane Rotating Micromirror Actuated by a Hybrid Electrostatic Driving Structure

A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.

A RGB LED Driving Structure and Signal Processing Based on Tone-to-Color Conversion

In order to solve the uncertainty of voice-to-color conversion in which one of the three voice features（loudness, tone, rhythm） is applied to control LED color, a linear conversion solution is proposed. And a chromaticity diagram is defined by using hue definition on hue-saturation-lightness（HSL） hue ring and the normalization of CIE xyY which is a color standard defined by International Commission on Illumination（CIE）. The chromaticity diagram shows a linear relation between pitch and color, which is referred to conversions of other physical parameters as well. Based on the solution, red（R）, green（G） and blue（B） LEDs, the driving structure of a conversion circuit is designed and set up. The results indicate that signal processing of tone-to-color conversion is effective, from 30 Hz to 3 kHz with a resolution of 10 Hz mapped to the chromaticity diagram.

Evaluation of measurement uncertainty of the high-speed variable-slit system based on the Monte Carlo method

This paper presents a dynamic and static error transfer model and uncertainty evaluation method for a high-speed variable-slit system based on a two- dimensional orthogonal double-layer air-floating guide rail structure. The motion accuracy of the scanning blade is affected by both the moving component it is attached to and the moving component of the following blade during high-speed motion. First, an error transfer model of the high-speed variable-slit system is established, and the influence coefficients are calculated for each source of error associated with the accuracy of the blade motion. Then, the maximum range of each error source is determined by simulation and experiment. Finally, the uncertainty of the blade displacement measurement is evaluated using the Monte Carlo method. The proposed model can evaluate the performance of the complex mechanical system and be used to guide the design.